• 한국세라믹학회지
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• 제37권6호
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• pp.596-603
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• 2000

The hardness and elastic modulus of three bulk materials are computed from the load and displacement data which are measured during basic nanoindentation test and compared with values determined by independent means to assess the accuracy of the method. The results show that with this technique, modulus and hardness and elastic modulus profile through depth of silicon nitride and silicon oxynitride films. The results show that for silicon nitride film deposited on silicon, hardness and elastic modulus increase as the volume ratio of NH3 : SiH4, which had been used for deposition, increases up to 20.0; and for silicon oxynitride film on silicon, the hardness and elastic modulus profile changes distinctly as the relative amount of oxygen in deposition gas mixture changes.

• 대한기계학회논문집A
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• 제26권7호
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• pp.1270-1279
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• 2002

Residual stress is a dominant obstacle to efficient production and safe usage of device by deteriorating the mechanical strength and failure properties. Therefore, we proposed a new thin film stress-analyzing technique using a nanoindentation method. For this aim, the shape change in the indentation load-depth curve during the stress-relief in film was theoretically modeled. The change in indentation depth by load-controlled stress relaxation process was related to the increase or decrease in the applied load using the elastic flat punch theory. Finally, the residual stress in thin film was calculated from the changed applied load based on the equivalent stress interaction model. The evaluated stresses for diamond-like carbon films from this nanoindentation analysis were consistent with the results from the conventional curvature method.

• 한국세라믹학회지
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• 제40권7호
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• pp.667-671
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• 2003

테이프 캐스팅법을 이용하여 알루미나/지르콘(반응결합 뮬라이트/지르코니아 유도)을 내부층으로 하고 알루미나/지르코니아 혹은 뮬라이트/지르코니아를 외부층으로 하는 산화물 층상 복합체를 고온가압소결법으로 제조하였다. 나노압입시험법을 이용하여 층상 산화물 복합체의 기계적 성질(경도 및 탄성계수)을 측정하고, SEM을 통하여 복합체의 미세구조를 관찰하였다. 산화물 층상 복합체의 제조를 위한 가열·냉각시 유도된 구성 산화물간의 열팽창 계수의 차이로 인하여 생성된 잔류응력을 하중-변위곡선을 이용하여 확인할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.527-528
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• 2006

In the proposed research plan, the effects of anisotropic and time-dependent mechanical properties on nanoindentation measurements of osteonic lamellae in a human cortical bone are investigated. The most popular method(Oliver-Pharr method) in nanoindentation data analysis is based on the assumption of elastic isotropy. Since cortical bone has exhibited anisotropy, it is necessary to consider the effects of anisotropy on nanoindentation measurement for cortical bone. By comparison with the contact area obtained from monitoring the contact profile in FEA simulations, the Oliver-Pharr method was found to underpredict or overpredict the contact area due to effects of anisotropy. The mount of error depended on the indentation orientation. The indentation modulus results and were also similar to moduli calculated from mathematical model. The Oliver-Pharr method has been shown to be useful for providing first order approximations in analysis of anisotropic mechanical properties of cortical bone, although the indentation modulus is influenced by anisotropy.

• 열처리공학회지
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• 제33권2호
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• pp.72-79
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• 2020

To improve the mechanical properties of most structural materials for industrial applications, the control of microstructure is essential by heat treatment process or plastic deformation process. Since the mechanical behavior of structural materials is significantly influenced by their microstructure, it is inevitably preceded to understand the relationship between microstructure and strengthening mechanisms of materials which can be easily changed by heat treatment. In this regard, the nanoindentation test is useful technique for analyzing the influence of the localized microstructural change on small-scale mechanical behavior of various structural materials. Here, the interesting studies performed on various heat-treated materials are reviewed with focus on micromechanical properties obtained by nanoindentation, which are reported in the available literature.

• 한국세라믹학회지
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• 제46권5호
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• pp.510-514
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• 2009

The microstructure and mechanical behavior of deformed silicon were characterized using transmission electron microscopy and nanoindentation. Structural defects such as stacking faults and dislocations were observed through the diffraction contrast in transmission electron microscopy. The mechanical properties of deformed Si and 111 Si wafer and mechanical behaviors during contact loading were also characterized using nanoindentation. The hardness values of silicon samples were ${\sim}10$ GPa and the elastic modulus were varied with indentation conditions. Elbow or pop-out behaviors were found in load-displacement curves of silicon samples during nanoindentation. Deformed silicon showed 'pop-out' behavior more frequently under the load of 10 mN, which is attributed to the structural defects in deformed silicon.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2001년도 춘계학술발표회요약집
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• pp.323-323
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• 2001

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.231.2-231.2
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• 2005

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.643-644
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• 2011

• 한국세라믹학회지
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• 제40권7호
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• pp.657-661
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• 2003

잉크젯 프린터 헤드용 기능성 막으로 많이 활용하고 있는 다층박막(SiO$_2$/poly-Si/SiN/SiO$_2$, 두께, 2.77 $\mu\textrm{m}$)과 다이아몬드 박막(두께, 1.6 $\mu\textrm{m}$)을 미소 외팔보($\mu$-CLB) 형태로 가공한 후 nanoindenter를 이용한 굽힘 시험 방법으로 탄성계수와 굽힘 강도를 측정하였으며 다층막을 이루는 박막 중 SiO$_2$ 박막(두께, 1 $\mu\textrm{m}$)과 SiN 박막(두께, 0.43 $\mu\textrm{m}$)의 탄성계수를 미소 외 팔보 굽힘 시험 방법과 nanoindentation 방법으로 측정한 후 그 결과를 비교하였다. 미소 외팔보 굽힘 시험방법으로 측정한 다층막의 탄성계수와 파괴강도는 외팔보의 폭이 18.5 $\mu\textrm{m}$에서 58.5 $\mu\textrm{m}$로 증가함에 따라 각각 68.08 ㎬과 2.495 ㎬에서 56.53 ㎬과 1.834 ㎬로 감소하였다. SiO$_2$ 박막의 탄성계수 측정값은 외팔보의 폭이 29.6$\mu\textrm{m}$ 와 59.5 $\mu\textrm{m}$ 범위에서 변하여도 영향을 받지 않고 68.16$\pm$0.942 ㎬이었으며, SiN 박막의 탄성계수는 215.45 ㎬이었다. Nanoindentation 방법으로 측정한 SiO$_2$ 박막과 SiN 박막의 탄성계수는 각각 98.78 ㎬, 219.38 ㎬이었다. 이 결과로부터 미소 외팔보 굽힘 시험방법으로 측정한 박막의 탄성계수가 nanoindentation 방법으로 측정한 탄성계수와 2% 미만의 차이를 보이며 일치함을 알 수 있었다.