• Tribology and Lubricants
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• v.17 no.3
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• pp.191-197
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• 2001

Nano adhesion and friction characteristics between SPM(scanning electron microscope) tips and flat plates of different materials were experimentally studied. Tests were performed to measure adhesion and friction in AFM(atomic force microscope) and LFM(lateral force microscope) modes in different conditions of relative humidity. Three different Si$_3$N$_4$ tips (rdaii : 15nm, 22nm and 50 nm) and three different flat plates of Si-wafer(100), W-DLC(tungsten-incorporated diamond-like carbon) and DLC were used. Results generally showed that adhesion and friction increased with the tip radius, and W-DLC and DLC surfaces were superior to Si-wafer. But the adhesion force of Si-wafer showed non linearity with the tip radius while W-DLC and DLC surfaces showed good correlation to the “JKR model”. It was found that high adhesion force between Si-wafer and a large radius of tip was caused by a capillary action due to the condensed water.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.235-238
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• 2009

To study the relationship between spark ignition and the gap in the nano-scale region, the electric potential was applied to between a Pt-Ir tip and a gold substrate. The tip was sharpened by electro-chemical etching process in the solution of $CaCl_2;H_2O$ and acetone. The radius of tip was measured to be around 200nm and attached to the scanning probe microscope to control the gap between the tip and the substrate. The electric potential of 10V to 80V was applied to initialize the spark. The gaps and the current profile were measured to analyze the characteristics of spark ignition. A spark sustaining time was measured to be between 50ns and 200ns depending on the applied electric potential and the gap between the electrodes. The continuous electric discharge was successfully sustained up to 1 second of spark or arc time. The developed process can be applicable to the micro-scale fabrication of automotive sensors as a similar concept of GTAW.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1144-1148
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• 2012

Process conditions for generating nano patterns handle different process according to the pattern characteristics, and different process data according to patterns in questions. To efficiently find optimal process conditions for generating nano patterns, process data by experiment is needed consideration of the pattern characteristics concerning the equipment. In particular, coating methods of a cylindrical mold differ from it of a flat plate because of viscosity of coating materials. Also the coating thickness affects nano process and pattern line width. So coating method of coating thickness for cylindrical mold is very important on nano pattern generating. In this study, a method is proposed for coating Photo Resist through the spray in order to coat cylindrical mold and measuring the thickness of coating using measuring tip considering the size of cylindrical mold because there is no method in the existing SEM. The proposed method is applied to a real printed electronics system to verify its accuracy and efficiency.

• Korean Journal of Materials Research
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• v.23 no.9
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• pp.489-494
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• 2013

In this study, by using nickel chloride solution as a raw material, a nano-sized nickel oxide powder with an average particle size below 50 nm was produced by spray pyrolysis reaction. A spray pyrolysis system was specially designed and built for this study. The influence of nozzle tip size on the properties of the produced powder was examined. When the nozzle tip size was 1 mm, the particle size distribution was more uniform than when other nozzle tip sizes were used and the average particle size of the powder was about 15 nm. When the nozzle tip size increases to 2 mm, the average particle size increases to roughly 20 nm, and the particle size distribution becomes more uneven. When the tip size increases to 3 mm, particles with an average size of 25 nm and equal to or less than 10 nm coexist and the particle size distribution becomes much more uneven. When the tip size increases to 5 mm, large particles with average size of 50 nm partially exist, mostly consisting of minute particles with average sizes in the range of 15~25 nm. When the tip size increases from 1 mm to 2 mm, the XRD peak intensities greatly increase while the specific surface area decreases. When the tip size increases to 3 mm, the XRD peak intensities decrease while the specific surface area increases. When the tip size increases to 5 mm, the XRD peak intensities increase again while the specific surface area decreases.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.87.2-87.2
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• 2016

As an era of nano science approaches, the understanding on the shape and optical properties of various materials in a nanoscale range is getting important more seriously than ever. Accordingly the development of high spatial-temporal-spectral resolution measurement tools for characterization of nanomaterials/structures is highly required. Generally, the various properties of sample can be measured independently, e.g. to observe the structural property of sample, we use the scanning electron microscopy or atomic force microscopy, and to observe optical property, we have to use another independent measurement tool such as photoluminescence spectroscopy or Raman spectroscopy. In the case of nano-materials, however, it is very difficult to find out the same position of sample at every different measurement processes, and the condition of sample can be changed by the influence of first measurement. The tip enhanced Raman scattering(TERS), which can simultaneously measure the two or more information of sample with nanoscale spatial resolution, is one of solutions of this problem. In this talk, I will present our recent nano Raman scattering data of graphene that measured by TERS and optimized tip fabrication method for efficient experiment.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.239.2-239.2
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.552-555
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• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1277-1281
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• 2007

A Nano-tip as a cold field emitter for inducing a field emission current has manufactured in many ways. In the paper, the electrochemical etching method is used. Thus, in order to optimize the final shape as the field emitter, the reliable fabrication system for electrochemical etching was constructed. In addition, the effective parameters such as applied voltage, submerged length, meniscus height, electrolyte concentration and environmental condition(vibration, humidity, cut-off time) have investigated in detail. By controlling the parameters, reliable tungsten tip for field emitter was fabricated. And the fabricated tungsten tip was evaluated optically. Finally, the very sharp apex of the tungsten tip was observed with scanning electron microscope.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.923-928
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• 2004

AFM tip has been used for surface profiling with a fine resolution, but there is a barrier to improve its performance because of the low aspect ratio. Many researchers have solved this problem with attaching carbon nanotube (CNT) to Si-tip. In this paper, we proposed the aligner system that composed of dual type stage system, and these stages could attach a carbon nanotube to tungsten-tip in vacuum condition. We used tungsten tip instead of Si-tip because of its conductivity. The aligner system proposed in this paper has 10 degree-of-freedom that 3 in the first stage and 7 in the second stage. With picomotors and piezotube, the first stage has the resolution about several tens of nm and the second stage has a resolution about a nm. We experimented on characterization of Nano Aligner System and operated picomotors in SEM environment.

• Korean Journal of Materials Research
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• v.23 no.2
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• pp.81-88
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• 2013

In this study, using a tin chloride solution as the raw material, a nano-sized tin oxide powder with an average particle size below 50 nm is generated by a spray pyrolysis process. The properties of the tin oxide powder according to the nozzle tip size are examined. Along with an increase in the nozzle tip size from 1 mm to 5 mm, the generated particles that appear in the shape of droplets maintain an average particle size of 30 nm. When the nozzle tip size increases from 1 mm to 2 mm, the average size of the generated particles is around 80-100 nm, and the ratio of the independent particles with a compact surface structure increases significantly. When the nozzle tip size is at 3 mm, the majority of the generated particles maintain the droplet shape, the average size of the droplet-shaped particles increases remarkably compared to the cases of other nozzle tip sizes, and the particle size distribution also becomes extremely irregular. When the nozzle tip size is at 5 mm, the ratio of droplet-shaped particles decreases significantly and most of the generated particles are independent ones with incompact surface structures. Along with an increase in the nozzle tip size from 1 mm to 3 mm, the XRD peak intensity increases, whereas the specific surface area decreases greatly. When the nozzle tip size increases up to 5 mm, the XRD peak intensity decreases significantly, while the specific surface area increases remarkably.