Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
권호 표지
DOI QR코드

DOI QR Code

A study on the Nano adhesion and Friction at Different Contact Conditions using SPM

SPM을 이용한 접촉조건 변화에 따른 미소응착 및 마찰특성에 관한 연구

  • 윤의성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 박지현 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센터)
  • Published : 2001.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Nano adhesion and friction characteristics between SPM(scanning electron microscope) tips and flat plates of different materials were experimentally studied. Tests were performed to measure adhesion and friction in AFM(atomic force microscope) and LFM(lateral force microscope) modes in different conditions of relative humidity. Three different Si$_3$N$_4$ tips (rdaii : 15nm, 22nm and 50 nm) and three different flat plates of Si-wafer(100), W-DLC(tungsten-incorporated diamond-like carbon) and DLC were used. Results generally showed that adhesion and friction increased with the tip radius, and W-DLC and DLC surfaces were superior to Si-wafer. But the adhesion force of Si-wafer showed non linearity with the tip radius while W-DLC and DLC surfaces showed good correlation to the “JKR model”. It was found that high adhesion force between Si-wafer and a large radius of tip was caused by a capillary action due to the condensed water.

Keywords

References

  1. Microsensors Muller, R.S.;Howe, R.T.;Senturia, S.D.;Smith, R.L.;White, R.M.
  2. Semiconductor Sensors Sze, S.M.
  3. Micromechanics and MEMS Classic and Seminal Papers to 1990 Trimmer, W.S.
  4. J. Vac. Sci. Technol. B v.15 no.1 Critical Review: Adhesion in surface micromechanical structures Maboudian, R.;Howe, R. T.
  5. Wear v.1200 Surface engineering and microtribology for microelectromechanical systems komvopoulos, K.
  6. Wear v.225-229 Nanoscale tribo-physics and tribomechanics Bhushan, B.
  7. Rroc. R. Soc. London v.A331 The mea-surement of Van der Waals dispersion forces in the range 1.5 to 130nm Israelachvili, J.N.;Tabor, D.
  8. Proc. R. Soc. London v.A324 Surface energy and the contact of elastic solid Johnson, K.L.;Kendall, K.;Rohert, A.D.
  9. J. Colloid Interfaces Sci. v.53 Effect of contact deformation on the adgesion of rarticles Derjaguin, B.V.;Muller, V.N.;Toporov, Yu.P
  10. J. Rhys. D. v.5 Sliding friction under negative load Skinner, J.;Gane, N.
  11. Sensors and Actuators A: Physical v.82Iss.1-3 Self-assembled monolayers as antistiction coatings for MEMS: characteristics and recent developments Maboudian, R.
  12. Mater. Res. Soc. Symp. Proc. v.383 Diamond-like sarbon films for silicon passivation in microelectromechanical drives Houston, M.R.;Howe, R.T.;Komvopoulos, K.;Maboudian, M.
  13. Proc. 7th Int. Conf. Solid-state Sensors and Actuators, Transducers `93 Surface roughness modification of interfacial contacts in polysilicon microstructures Alley, R.L.;Mai, P.;Konvopoulos, K.;Howe, R.T.
  14. Trans. ASME J. Tribol. v.117 Friction characteristics and adhesion force under low normal load Ando, Y.;Oshikawa, Y.;Kitahara, T.
  15. Trans. ASME J. TRibol. v.119 The effect of asperity array geometry on friction and pull-off force Ando, Y.;Ino, J.

Cited by

  1. 코팅 방법에 따른 이종 SAMs의 관능기별 마이크로/나노 응착 및 마찰 특성 vol.21, pp.3, 2001, https://doi.org/10.9725/kstle.2005.21.3.107