• 한국해양공학회지
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• 제27권6호
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• pp.95-99
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• 2013

Lead zirconate titanate (PZT) thick films with a thickness of $10-20{\mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{\mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{\mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{\circ}C$. A 20-${\mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.

• 한국재료학회지
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• 제31권12호
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• pp.677-681
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• 2021

The Mn-Zn ferrite powders were prepared by high energy ball milling, then compacted and sintered at various temperatures to assess their sintering behavior and magnetic properties. The initial ferrite powders were spherical in shape with the size of approximately 70 ㎛. After 3 h of ball milling at 300 rpm, aggregated powders ~230 nm in size and composed of ~15 nm nanoparticles were formed. The milled powders had a density of ~70 % when compacted at 490 MPa for 3 min. In the samples subsequently sintered at 1,273 K ~ 1,673 K for 3 h, the MnZnFe₂O₄ phase was detected. The density of the sintered samples had a tendency to increase with increasing sintering temperature up to 1,473 K, which produced the highest density of 98 %. On the other hand, the sample sintered at 1,373 K had the highest micro-hardness of approximately 610 Hv, which is due to much finer grains.

• 한국재료학회지
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• 제24권11호
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• pp.639-643
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• 2014

Hydrophilic $SiO_2$ layers were obtained by the atmospheric-pressure plasma treatment. Superhydrophobic $SiO_2$ layers were first deposited by the electrospray deposition method. The electrospunable solution that was prepared based on the solgel method was sprayed on Si (100) substrates. The surface of the electrosprayed $SiO_2$ layers consisted of the agglomeration of nano-sized grains, which led to a very high roughness and revealed a very high contact angle to water droplets over $162^{\circ}$. After having been exposed to the atmospheric $Ar/O_2$ plasma, the observed superhydrophobicity of the $SiO_2$ layers were greatly changed: a dramatic variation of the water contact angle from $162^{\circ}$ to $3^{\circ}$, namely realization of superhydrophillicity. Interestingly, the surface microstructure was almost preserved. According to the XPS analysis, it is more likely that thanks to the plasma exposure, the surface of $SiO_2$ layers will be cleaned in terms of organic species that are hydrophobic-inducing, consequently leading to the hydrophilic nature observed for the plasma-exposed $SiO_2$ layers.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 추계학술발표대회
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• pp.31.1-31.1
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• 2009

In an approach to acclimate ourselves torecent ecological consciousness trend, a lead-free piezoelectric material, bismuth sodium titanate (abbreviated as BNT) based bismuth sodium barium titanate (abbreviated as BNT-BT), was considered as an environment-friendly alternative for a lead based piezoelectric system. Ceramic specimens of0.94[(BixNa0.5)TiO3]-0.06[BaTiO3] (x = 0.500~0.515) compositions were prepared by a modified mixed oxide method. To increase the chemical homogeneity andre action activity, high energy mechanical milling machine and pre-milled nanosized powder has been used. In this method (BixNa0.5)TiO3 (x=0.500~0.515) andBaTiO3 were prepared separately from pre-milled constituent materials at low calcination temperature and then separately prepared BNTX (X=1, 2, 3 and 4) and BT were mixed by high energy mechanical milling machine. Without further calcination step the mixed powders were pressed into disk shape and sintered at $1110^{\circ}C$. Microstructures, phase structures and electrical properties of the ceramic specimens were systematically investigated. Highly dense ceramic specimens with homogenous grains were prepared in spite of relatively low sintering temperature. Phase structures were not significantly influenced by the excess amount Bi. Large variation on the piezoelectric and dielectric properties was detected at relative high excess Bi amounts. When $x{\leq}0.505$, the specimens exhibit insignificant variation in piezoelectric and dielectric constant though depolarization temperature is found to be decreased. Considerable amount of decrease in piezoelectric and dielectric properties are observed with higher excess of Bi amounts ($x{\geq}0.505$). This research indicates the advantages of high energy mechanical milling and importance of proper maintenance of Bi stoichiometry.

• 한국결정성장학회지
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• 제28권1호
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• pp.14-20
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• 2018

에어로졸 증착법에 의해서 상온에서 $6{\mu}m/min$의 속도로 $5{\sim}10{\mu}m$ 두께의 PZT-PZN(0 %, 20 %, 40 %) 복합체의 막을 실리콘/사파이어 기판위에서 제조하였다. 에어로졸 증착에 사용된 PZT, 2PZN-8PZT, 4PZN-6PZT 초기분말입자는 불규칙한 형상을 가지고 있으며 submicron 크기임을 확인하였다. 증착된 막은 어떠한 뜯김이나 기공도 없는 치밀한 막임을 확인하였고 나노크기의 입자를 가진 페로브스카이트 단상이었다. 실리콘기판 및 사파이어 기판위에서 증착된 막은 전기로에서 $700^{\circ}C$ 및 $900^{\circ}C$에서 각각 어닐링처리 하였으며 PZT에 40 %의 PZN이 첨가된 조성의 막의 경우 pyrochlore의 2차상이 형성되었다. 미세구조에 미치는 PZN 첨가의 영향을 관찰하기 위해 FE-SEM 및 HR-TEM이 사용되었다.

• 한국재료학회지
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• 제23권2호
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• pp.98-103
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• 2013

$Mg_{3-x}Zn_xSb_2$ powders with x = 0-1.2 were fabricated by mechanical alloying in a planetary ball mill with a speed of 350 rpm for 24 hrs and then hot pressed under a pressure of 70 MPa at 773 K for 2 hrs. It was found that there were systematic shifts in the X-ray diffraction peaks of $Mg_3Sb_2$ (x = 0) toward a higher angle with increasing Zn for both the powder and the bulk sample and finally the phase of $Mg_{1.86}Zn_{1.14}Sb_2$ was formed at the Zn content of x = 1.2. The $Mg_{3-x}Zn_xSb_2$ compounds had nano-sized grains of 21-30 nm for the powder and 28-66 nm for the hot pressed specimens. The electrical conductivity of hot pressed $Mg_{3-x}Zn_xSb_2$ increased with increasing Zn content and temperature from 33 $Sm^{-1}$ for x = 0 to 13,026 $Sm^{-1}$ for x = 1.2 at 323 K. The samples for all the compositions from x = 0 to x = 1.2 had positive Seebeck coefficients, which decreased with increasing Zn content and temperature, which resulted from the increased charge carrier concentration. Most of the samples had relatively low thermal conductivities comparable to the high performance thermoelectric materials. The dimensionless figure of merit of $Mg_{3-x}Zn_xSb_2$ was directly proportional to the Zn content except for the compound with Zn = 1.2 at high temperature. The $Mg_{3-x}Zn_xSb_2$ compound with Zn = 0.8 had the largest value of ZT, 0.33 at 723 K.

• 한국결정성장학회지
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• 제28권6호
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• pp.263-270
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• 2018

최근 반도체, 디스플레이 제조장비용 세라믹소재로 대전방지 기능을 가지는 다공성 세라믹스가 시급히 요구되고 있다. 본 연구에서는 다공성 산화티탄-산화망간 기지상에 산화티탄 나노분말을 첨가하여 부분소결함으로써 $10^8-10^{10}$ ohm의 표면저항을 가지고 향상된 기계적 강도를 가지는 다공성 세라믹스를 제조하였다. 나노 크기의 산화티탄 분말을 첨가함으로써 입자 사이의 목 형성을 강화하였고, 그 결과 꺽임강도를 170 MPa(@기공률 15 %), 110 MPa(@기공률 31 %) 수준으로 증가시킬 수 있었다. 이는 P-25를 첨가하지 않았을 때의 꺽임강도(80 MPa @ 기공률 26 %)에 비하여 주목할만큼 증가한 값으로 단순한 기공률 감소가 아닌 목 형성등 미세구조 변화에 따른 것으로 판단된다. 개발 세라믹스를 적용한 OLED 유연소자 제조공정용 공기부상용 모듈을 제작하여 진공척의 성능을 평가하였다.

• 한국재료학회지
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• 제29권11호
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• pp.684-689
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• 2019

Single crystals, which have complexed composition, are fabricated by solid state grain growth. However, it is hard to achieve stable properties in a single crystal due to trapped pores. Aerosol deposition (AD) is suitable for fabrication of single crystals with stable properties because this process can make a high density coating layer. Because of their unique features (nano sized grains, stress inner site), it is hard to fabricate single crystals, and so studies of grain growth behavior of AD film are essential. In this study, a $BaTiO_3$ coating layer with ${\sim}9{\mu}m$ thickness is fabricated using an aerosol deposition method on (100) and (110) cut $SrTiO_3$ single crystal substrates, which are adopted as seeds for grain growth. Each specimen is heat-treated at various conditions (900, 1,100, and $1,300^{\circ}C$ for 5 h). $BaTiO_3$ layer shows different growth behavior and X-ray diffraction depending on cutting direction of $SrTiO_3$ seed. Rectangular pillars at $SrTiO_3$ (100) and laminating thin plates at $SrTiO_3$ (110), respectively, are observed.

• 한국산학기술학회논문지
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• 제6권6호
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• pp.457-460
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• 2005

금속 알콕사이드의 가수분해법인 졸-겔 공정을 이용하여 일차로 $TiO_2$와 $ZrO_2$ 나노 입자를 합성하고 난 후 $TiO_2$ 나노입자와 PbO를 혼합하여 $PbTiO_3$의 나노 입자를 얻었다. 2차 공정으로 나노입자 크기의 $ZrO_2$와 혼합하여 최종적으로 $PbZrTiO_3(PZT)$ 분말을 합성하였다. 소결된 압전체의 결정상을 분석하기 위하여 X-선 회절분석을 시행하였으며, 소결전 합성분말의 모양과 크기를 투과전자현미경을 이용하여 관찰하였으며 $900^{\circ}C$의 저온에서 소결한 $PbZrTiO_3$시편의 미세조직을 관찰하기 위하여 주사전자현미경을 이용하였다. 합성된 입자들의 크기는 각각 $TiO_2$는 약 20 ${\~}$ 30nm, $ZrO_2$는 15${\~}$30nm이였으며, $900^{\circ}C$ 저온에서 소결한 PZT 시편의 SEM 관찰결과 평균 입경은 $2{\~}4{\mu}m$의 페로 브스카이트 결정으로 치밀한 조직을 나타내었으며, 우수한 압전 특성도 나타내었다.

• 한국재료학회지
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• 제19권2호
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• pp.61-67
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• 2009

Electrolessly deposited Co (Re,P) was investigated as a possible capping layer for Cu wires. 50 nm Co (Re,P) films were deposited on Cu/Ti-coated silicon wafers which acted as a catalytic seed and an adhesion layer, respectively. To obtain the optimized bath composition, electroless deposition was studied through an electrochemical approach via a linear sweep voltammetry analysis. The results of using this method showed that the best deposition conditions were a $CoSO_4$ concentration of 0.082 mol/l, a solution pH of 9, a $KReO_4$ concentration of 0.0003 mol/l and sodium hypophosphite concentration of 0.1 mol/L at $80^{\circ}C$. The thermal stability of the Co (Re,P) layer as a barrier preventing Cu was evaluated using Auger electron spectroscopy and a Scanning calorimeter. The measurement results showed that Re impurities stabilized the h.c.p. phase up to $550^{\circ}C$ and that the Co (Re,P) film efficiently blocked Cu diffusion under an annealing temperature of $400^{\circ}C$ for 1hr. The good barrier properties that were observed can be explained by the nano-sized grains along with the blocking effect of the impurities at the fast diffusion path of the grain boundaries. The transformation temperature from the amorphous to crystal structure is increased by doping the Re.