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http://dx.doi.org/10.6111/JKCGCT.2018.28.6.263

Fabrication of porous titanium oxide-manganese oxide ceramics with enhanced anti-static and mechanical properties  

Yu, Dongsu (Icheon Branch, Korea Institution of Ceramic Engineering and Technology)
Hwang, Kwang-Taek (Icheon Branch, Korea Institution of Ceramic Engineering and Technology)
Kim, Jong-Young (Icheon Branch, Korea Institution of Ceramic Engineering and Technology)
Jung, Jong-Yeol (Icheon Branch, Korea Institution of Ceramic Engineering and Technology)
Baik, Seung-Woo (Maxtech Co. Ltd.)
Shim, Wooyoung (Department of Advanced Materials Science and Engineering, Yonsei University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.28, no.6, 2018 , pp. 263-270 More about this Journal
Abstract
Recently, porous ceramic materials with anti-static performance are urgently needed for semiconductor and OLED/LCD display manufacturing industry. In this work, we fabricated porous titanium manganese oxide ceramics having the surface resistivity of $10^8-10^{10}$ ohm and enhanced mechanical strength by partial sintering method using nanosized titanium oxide. By addition of nano-sized titanium oxide in the matrix, neck formation between grains was strengthened, which remarkably increased flexural strength up to 170 MPa (@porosity: 15 %), 110 MPa (@porosity: 31 %), compared to 80 MPa (@porosity: 26 %) for pristine titanium manganese oxide ceramics. We evaluated the performances of our ceramics as air-floating module for OLED flexible display manufacturing devices.
Keywords
Porous ceramic; Titanium oxide; Manganese oxide; Anti-static; Flexural strength; Air-floating;
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