Synthesis and Characterization of The Electrolessly Deposited Co(Re,P) Film for Cu Capping Layer |
Han, Won-Kyu
(Division of Materials Science and Engineering, Hanyang University)
Kim, So-Jin (Division of Materials Science and Engineering, Hanyang University) Ju, Jeong-Woon (Division of Materials Science and Engineering, Hanyang University) Cho, Jin-Ki (Department of advanced Materials Engineering, Korea Polytechnic University) Kim, Jae-Hong (R&D Divisions, Hynix Semiconductor Inc.) Yeom, Seung-Jin (R&D Divisions, Hynix Semiconductor Inc.) Kwak, Noh-Jung (R&D Divisions, Hynix Semiconductor Inc.) Kim, Jin-Woong (R&D Divisions, Hynix Semiconductor Inc.) Kang, Sung-Goon (Division of Materials Science and Engineering, Hanyang University) |
1 | D. C Edelstein, N. Awaya and T. Kobayashi, Jpn. J. Appl. Phys., 37, 1156 (1998) DOI |
2 | D. C Edelstein, G. A. Sai-Halasz and Y. J. Mii, IBM J. Res.Develop, 39(4), 383 (1995) DOI ScienceOn |
3 | Vabry M. Dubin, Microelectron. Eng., 70, 461 (2003) DOI ScienceOn |
4 | S. Y. Chang, C. C. Wan, Y. Y. Wang, C. H. Shih, M. H. Tsai, S. L. Shue, C. H. Yu and M. S. Liang, Thin Solid Films. 515, 1107 (2006) DOI ScienceOn |
5 | E. J. O'Sullivan, A. G.Schott, M.Paunovic, C. J. Sambucetti, T. R. Marino, P. J. Bailey, S. Kaja and K. W. Semkow, IBM J. Res. Dev., 42, 607 (1998) DOI ScienceOn |
6 | Y. Sverdlov, V. Bogush, Y. S.-Diamand, Microelec-tron. Eng., 33, 2243 (2006) |
7 | Y. S.-Diamand, A. Zylberman, N. Petrov and Y. Sverdlov, microelectron. Eng., 64, 315 (2002) DOI ScienceOn |
8 | A. Kohn, M. Eizenberg, Y. S.-Diamand and Y. Sverdlov, Mater. Sci. Eng., A302, 18 (2001) |
9 | S. Y. Chang, C. C. Wan, Y. Y. Wang, C. H. Shih, M. H. Tsai, S. L. Shue, C. H. Yu and M. S. Liang, Thin Solid films 515, 1107 (2006) DOI ScienceOn |
10 | I. Baskaran, R. S. Kumar, T. S. N. Sankara Narayanan, A. Stephen Surf. Coat. Technol., 200, 6888 (2006) DOI ScienceOn |
11 | A. Kohn, M.Eizenberg, Y. S.-Diamand, B. Tsrael and Y. Sverdlov, Microelectron. Eng., 55, 297 (2001) DOI ScienceOn |
12 | G.Ritter, P.McHugh, G.Silson, T.Ritzdrf, Solid-State Electron., 44, 797 (2000) DOI ScienceOn |
13 | T. H. Kim, S. M. S. I. Dulal, C. H. Park, H. Chae and C. K. Kim, Surf. Coat. Technol., 202, 4861 (2008) DOI ScienceOn |
14 | Y. S Kim, J. Shin, H. I Kim, J. H Cho, H. K Seo, G. S Kim and H. S Shin, Kor. Chem. Eng. Res., 43, 495(2005) DOI |
15 | W. F. A. Besling, M. Broekaart, V. Arnal, J. Torres, Microelectron. Eng., 76, 167 (2004) DOI ScienceOn |