• Transactions on Electrical and Electronic Materials
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• v.15 no.1
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• pp.49-54
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• 2014

In this study, we carried out an investigation of the etch characteristics of silicon (Si) film, and the selectivity of Si to $SiO_2$ in $SF_6/O_2$ plasma. The etch rate of the Si film was decreased on adding $O_2$ gas, and the selectivity of Si to $SiO_2$ was increased, on adding $O_2$ gas to the $SF_6$ plasma. The optical condition of the Si film with this work was 1,350 nm/min, at a gas mixing ratio of $SF_6/O_2$ (=130:30 sccm). At the same time, the etch rate was measured as functions of the various etching parameters. The X-ray photoelectron spectroscopy analysis showed the efficient destruction of oxide bonds by ion bombardment, as well as the accumulation of high volatile reaction products on the etched surface. Field emission auger electron spectroscopy analysis was used to examine the efficiency of the ion-stimulated desorption of the reaction products.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.67-70
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• 2013

In this study, we changed the input parameters (gas mixing ratio, RF power, DC bias voltage, and process pressure), and then monitored the effect on TiN etch rate and selectivity with $SiO_2$. When the RF power, DC-bias voltage, and process pressure were fixed at 700 W, - 150 V, and 15 mTorr, the etch rate of TiN increased with increasing $CF_4$ content from 0 to 20 % in $CF_4$/Ar plasma. The TiN etch rate reached maximum at 20% $CF_4$ addition. As RF power, DC bias voltage, and process pressure increased, all ranges of etch rates for TiN thin films showed increasing trends. The analysis of x-ray photoelectron spectroscopy (XPS) was carried out to investigate the chemical reactions between the surfaces of TiN and etch species. Based on experimental data, ion-assisted chemical etching was proposed as the main etch mechanism for TiN thin films in $CF_4$/Ar plasma.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.6 no.3
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• pp.217-222
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• 2006

Recently, LG chemical corporation developed new material called HYPERIER, which has an excellent barrier characteristic. It has many layers which are made of nano-composite within LDPE(Low-Density Poly Ethylene). In order to guarantee the quality of the final product from the production line, a certain test equipment is required to investigate the existence of layers inside the HYPERIER. In this work, ultrasonic sensor based test equipment for investigating the existence of inner layers is proposed. However, it is a tedious job for human operators to check the existence by just looking at the resounding waveform from ultrasonic sensor. Therefore, to enhance the performance of the ultrasonic test equipment, wavelet and PCA(Principle Componet Analysis) schemes are introduced into neural network scheme which is used for classification. To verify the feasibility of the proposed scheme, some experiments are executed.

• Journal of Sensor Science and Technology
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• v.20 no.3
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• pp.168-171
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• 2011

Porous 3C-SiC(pSiC) samples with different pore diameters were prepared from poly crystalline N-type 3C-SiC by electrochemical anodization. The pSiC surface was chemically modified by the sputtering of Pd and Pt nano-particles as a hydrogen catalyst. Changes in resistance were monitored with hydrogen concentrations in the range of 110 ppm - 410 ppm. The variations of the electrical resistance in the presence of hydrogen demonstrated that Pd and Pt-deposited pSiC samples have the ability to detect hydrogen at room temperature. Regardless of the catalyst, the 25 nm pore diameter samples showed good response and recovery properties. However, the 60 nm samples showed unstable and slow response. It was found that the pore size affects the catalyst reaction and consequently, results in changes of the sensitivity to hydrogen.

• Journal of Sensor Science and Technology
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• v.17 no.1
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• pp.35-40
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• 2008

Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.4
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• pp.271-275
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• 2016

For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

• Bulletin of the Korean Chemical Society
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• v.33 no.4
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• pp.1247-1252
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• 2012

In this paper, a potentiometric sensor based on polyaniline conducting polymer for potentiometric determination of Cr (VI) ions is reported. Polyaniline was synthesized electrochemically (cyclic voltammetry method) onto a micro pencil graphite electrode (0.7 mm diameter) in the presence of HCl and diphenylcarbazide (termed as (PGE/PAni/DPC). Some initial experiments were performed in order to find out the optimized conditions for preparation of the introduced Cr (VI) sensor electrode. The plot of E vs. log [Cr (VI)], showed a linear response in the range from $1.0{\times}10^{-6}$ to $1.0{\times}10^{-1}$ M. High repeatability with the detection limit of $8.0{\times}10^{-7}$ M was obtained.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.86.3-86
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• 2001

Hall effect sensor using 7um, 1.7 ohm-cm or 10um, 3.5 ohm-cm Bipolar process was successfully developed. The Hall sensor consists of various patterns, such as regular shapes, rectangles, diamond, hexagon and cross shapes to optimize offset voltage and sensitivity for proper applications. In order to measure offset voltage in chip scale the Agilent company´s 4156C and Nano-Voltage Meter were used and the best structure in offset voltage was finally selected by using ceramic package. The patterns appear to be the quadri-rectangular patterns entirely and three-parallelogram patterns. The measured offset voltages were found to be about 173-365uV. Meanwhile, in ...

• International journal of advanced smart convergence
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• v.7 no.4
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• pp.75-83
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• 2018

Predictive IoT Sensor Algorithm is a technique of data science that helps computers learn from existing data to predict future behaviors, outcomes, and trends. This algorithm is a cloud predictive analytics service that makes it possible to quickly create and deploy predictive models as analytics solutions. Sensors and computers collect and analyze data. Using the time series prediction algorithm helps to predict future temperature. The application of this IoT in industrial environments like power plants and factories will allow organizations to process much larger data sets much faster and precisely. This rich source of sensor data can be networked, gathered and analyzed by super smart software which will help to detect problems, work more productively. Using predictive IoT technology - sensors and real-time monitoring - can help organizations exactly where and when equipment needs to be adjusted, replaced or how to act in a given situation.

• Journal of Powder Materials
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• v.26 no.1
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• pp.28-33
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• 2019

The gas sensor is essential to monitoring dangerous gases in our environment. Metal oxide (MO) gas sensors are primarily utilized for flammable, toxic and organic gases and $O_3$ because of their high sensitivity, high response and high stability. Tungsten oxides ($WO_3$) have versatile applications, particularly for gas sensor applications because of the wide bandgap and stability of $WO_3$. Nanosize $WO_3$ are synthesized using the hydrothermal method. As-prepared $WO_3$ nanopowders are in the form of nanorods and nanorulers. The crystal structure is hexagonal tungsten bronze ($MxWO_3$, x =< 0.33), characterized as a tunnel structure that accommodates alkali ions and the phase stabilizer. A gas detection test reveals that $WO_3$ can detect acetone, butanol, ethanol, and gasoline. This is the first study to report this capability of $WO_3$.