• 센서학회지
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• 제23권2호
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• pp.94-98
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• 2014

Aluminum nitride (AlN) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 25~75% $N_2$ /Ar. The characterization of film properties were performed using surface profiler, X-ray diffraction, X-ray photoelectron spectroscopy(XPS), and pressure-voltage measurement system. The deposition rates of AlN films were decreased with increasing the $N_2$ concentration owing to lower mass of nitrogen ions than Ar. The as-deposited AlN films showed crystalline phase, and with increasing the $N_2$ concentration, the peak of AlN(100) plane and the crystallinity became weak. Any change in the preferential orientation of the as-deposited AlN films was not observed within our $N_2$ concentration range. But in the case of 50% $N_2$ /Ar condition, the peak of (002) plane, which is determinant in pressure sensing properties, appeared. XPS depth profiling of AlN/TiN/SUS430 revealed Al/N ratio was close to stoichiometric value (45:47) when deposited under 50% $N_2/Ar$ atmosphere at room temperature. The output signal voltage of AlN sensor showed a linear behavior between 26~85 mV, and the pressure-sensing sensitivity was calculated as 7 mV/MPa.

• 한국지능시스템학회논문지
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• 제18권2호
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• pp.230-235
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• 2008

최근 LG화학은 '하이페리어(HYPERIER)'라 불리우는 고차단성의 고급 엔지니어링 플라스틱 신소재를 개발하였다. 이 소재는 LDPE(Low-Density Poly Ethylene)로 구성된 나노복합소재로 만들어졌으며, 여러 층으로 구성된다. 생산라인에서 산출된 최종 생산품의 품질을 보증하기 위해서는 하이페리어 내부에 존재하는 층들의 존재 유/무를 식별하기 위한 시험장비가 요구된다. 본 논문에서는 하이페리어 내부에 존재하는 층들의 유무를 조사하기 위해 사용될 수 있는 초음파 테스트 장치를 소개하고, 사람이 직접 계측된 신호를 검사하여 품질을 분류하는 기존의 시스템의 성능향상을 위해 FFT와 PCA, BP 신경망을 통하여 품질을 분류(양품/불량품)하는 기법을 제안하며, 시뮬레이션을 통하여 제안된 기법의 유용성을 확인해 보고자 한다.

• 한국재료학회지
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• 제21권6호
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• pp.299-302
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• 2011

[ $WO_3$ ]powders were ball-milled with an alumina ball for 0-72 hours. $In_2O_3$ doped $WO_3$ was prepared by soaking ball-milled $WO_3$ in an $InCl_3$ solution. The mixed powder was annealed at $700^{\circ}C$ for 30 min in an air atmosphere. A paste for screen-printing the thick film was prepared by mixing the $WO_3$:In2O3 powders with ${\alpha}$-terpinol and glycerol. $In_2O_3$ doped $WO_3$ thick films were fabricated into a gas sensor by a screen-printing method on alumina substrates. The structural properties of the $WO_3$:$InO_3$ thick films were a monoclinic phase with a (002) dominant orientation. The particle size of the $WO_3$:$InO_3$ decreased with the ball-milling time. The sensing characteristics of the $In_2O_3$ doped $WO_3$ were investigated by measuring the electrical resistance of each sensor in the test-box. The highest sensitivity to 5 ppm $CH_4$ gas and 5 ppm $CH_3CH_2CH_3$ gas was observed in the ball-milled $WO_3$:$InO_3$ gas sensors at 48 hours. The response time of $WO_3$:$In_2O_3$ gas sensors was 7 seconds and recovery time was 9 seconds for the methane gas.

• Journal of Electrochemical Science and Technology
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• 제12권2호
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• pp.173-187
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• 2021

In the present research, a simple electrochemical sensor based on a carbon paste electrode (CPE) modified with ZnO-Zn₂SnO₄-SnO₂ and graphene (ZnO-Zn₂SnO₄-SnO₂/Gr/CPE) was developed for the direct, simultaneous and individual electrochemical measurement of Acetaminophen (AC), Caffeine (Caf) and Ascorbic acid (AA). The synthesized nano-materials were investigated using scanning electron microscopy, X-ray Diffraction, Fourier-transform infrared spectroscopy, and electrochemical impedance spectroscopy techniques. Cyclic voltammetry and differential pulse voltammetry were applied for electrochemical investigation ZnO-Zn₂SnO₄-SnO₂/Gr/CPE, and the impact of scan rate and the concentration of H⁺ on the electrode's responses were investigated. The voltammograms showed a linear relationship between the response of the electrode for individual oxidation of AA, AC and, Caf in the range of 0.021-120, 0.018-85.3, and 0.02-97.51 μM with the detection limit of 8.94, 6.66 and 7.09 nM (S/N = 3), respectively. Also, the amperometric technique was applied for the measuring of the target molecules in the range of 0.013-16, 0.008-12 and, 0.01-14 μM for AA, AC and, Caf with the detection limit of 6.28, 3.64 and 3.85 nM, respectively. Besides, the ZnO-Zn₂SnO₄-SnO₂/Gr/CPE shows an excellent selectivity, stability, repeatability, and reproducibility for the determination of AA, AC and, Caf. Finally, the proposed sensor was successfully used to show the amount of AA, AC and, Caf in urine, blood serum samples with recoveries ranging between 95.8% and 104.06%.

• Korean Chemical Engineering Research
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• 제61권1호
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• pp.52-57
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• 2023

본 연구는 고성능 유연 전극 소재 개발을 위한 기초 연구로, 유연 전극 소재의 성능을 향상시키기 위해 금속 산화물 CuO nanoparticles (CuO NPs)를 도입하여 탄소나노튜브 섬유(carbon nanotube fiber; CNT fiber) 표면 위에 전기화학적 증착시켜 CNT fiber/CuO NPs 전극을 합성하고, 이를 전기화학적 비효소 글루코스 센서에 적용하였다. 이 전극의 표면 및 elemental composition 분석은 주사전자 현미경(SEM)과 에너지분산형 분광분석법(EDS)을 이용하였으며, 전극의 전기화학적 특성 및 글루코스에 대한 센싱 성능은 순환전압 전류법(CV)과 전기화학 임피던스법(EIS), 시간대전류법(CA)을 통해 조사되었다. CNT fiber/CuO NPs 전극은 CNT fiber의 우수한 특성과 함께 CuO NPs 도입에 따른 약 2.6배의 유효 전극면적(active surface area) 증가 효과와 11배 정도의 향상된 전자전달(electron transfer) 특성 및 우수한 전기적 촉매 활성(electrocatalytic activity) 덕분에 CNT fiber 유연 기반 전극의 글루코스 검출에 대한 성능이 개선되었다. 따라서, 본 연구를 기반으로 다양한 나노구조체를 활용한 고성능 유연 전극 소재 개발이 기대된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.93-93
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• 2009

In order to overcome the lack of reactivity with hydrogen gas ($H_2$) and utilize unique properties of Carbon Nano Tubes (CNTs) for the application to hydrogen sensors, there have been intensive works on the surface functionalization of CNTs with various types of nanoparticles including Pd. In the present work, we have investigated the effect of dendrimers and Pd nanoparticles to the hydrogen sensing properties of CNTs by comparing three types of samples: Pd/SWNTs (Sample I), Pd/dendrimer/SWNTs (Sample II) and heat-treated Pd/dendrimers/SWNTs (Sample III). As a result of IV measurement under the $H_2$ and air, sample I was found to have a high sensitivity (25%) to $H_2$, but to have a very slow response time (324 s) and recovery rate. On the other hand, Sample II was found to show much faster response time (3 s) and good recovery rate but lower sensitivity (8.6%) than Sample I which is due to induced dipole moments in the dendrimers. Interestingly, Sample III showed both fast response time (7 s) and high sensitivity (25%), indicating that the pyrolysis of the dendrimers during heat treatment which reduce the distance between the surface of the SWNTs and the functionalized Pd nanoparticles plays a key role in improving the sensitivity. The pyrolysis of the dendrimers in Pd nanoparticle-dendrimer-SWNTs was found to enable a significant electrical conductance modulation upon exposure to extremely low concentrations (10 ppm) of $H_2$ in air. Our results demonstrate that the Pd Nanoparticle-Grafted Single-Walled Carbon Nanotubes(SWNTs) with Dendrimers can be used to detect hydrogen, makingoutstanding properties such as fast response, and recovery time, high sensitivity, low detection limit at room temperature compared with other types of hydrogen sensors.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권2호
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• pp.73-76
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• 2004

0-3 PbTiO$_3$/P(VDF/TrFE) nanocomposite thin films for passive pyroelectric infrared sensors were fabricated by a two-step spin coating technique. 65wt% VDF and 35 wt% TrFE was formed into a P(VDF/TrFE) powder. Nano size PbTiO$_3$ powder was used. 0-3 connectivity of PbTiO$_3$/P(VDF/TrFE) composite film was successfully achieved and observed using SEM photography. The dielectric constant and pyroelectric coefficient were measured and compared with P(VDF/TrFE). A very low dielectric constant (13.48 at 1KHz and sufficiently high pyroelectric coefficient (3.101 nC/$\textrm{cm}^2$ㆍk at 5$0^{\circ}C$) were measured. This nanocomposite can be used for a new pyroelectric infrared sensor to achieve better performance.

• 한국기계가공학회지
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• 제5권1호
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• pp.45-50
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• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.

• Journal of Electrochemical Science and Technology
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• 제8권4호
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• pp.307-313
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• 2017

In this paper we report an electrochemical sensor based on ZnO-functionalized graphene oxide nanocomposite (ZnO-GO) for the sensitive determination of the cabergoline. Cabergoline electrochemical behaviors were investigated by cyclic voltammetry (CV), chronoamperometry (CHA) and differential pulse voltammetry (DPV). The modified electrode shows electrocatalytic activity toward cabergoline oxidation in phosphate buffer solution (PBS) (pH 7.0) with a reduction of the overpotential of about 180 mV and an increase in peak current. The DPV data showed that the obtained anodic peak currents were linearly dependent on the cabergoline concentrations in the range of $1.0-200.0{\mu}M$, with the detection limit of $0.45{\mu}M$. The prepared electrode was successfully applied for the determination of cabergoline in real samples.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations