• 제목/요약/키워드: Nano master

검색결과 76건 처리시간 0.031초

Poly Vinyl Alcohol 몰드를 이용한 Nano Transfer Printing 기술 및 이를 이용한 Mo 나노 패턴 제작 기술 (Fabrication of Mo Nano Patterns Using Nano Transfer Printing with Poly Vinyl Alcohol Mold)

  • 양기연;윤경민;한강수;변경재;이헌
    • 한국재료학회지
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    • 제19권4호
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    • pp.224-227
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    • 2009
  • Nanofabrication is an essential process throughout industry. Technologies that produce general nanofabrication, such as e-beam lithography, dip-pen lithography, DUV lithography, immersion lithography, and laser interference lithography, have drawbacks including complicated processes, low throughput, and high costs, whereas nano-transfer printing (nTP) is inexpensive, simple, and can produce patterns on non-plane substrates and multilayer structures. In general nTP, the coherency of gold-deposited stamps is strengthened by using SAM treatment on substrates, so the gold patterns are transferred from stamps to substrates. However, it is hard to apply to transfer other metallic materials, and the existing nTP process requires a complicated surface treatment. Therefore, it is necessary to simplify the nTP technology to obtain an easy and simple method for fabricating metal patterns. In this paper, asnTP process with poly vinyl alcohol (PVA) mold was proposed without any chemical treatment. At first, a PVA mold was duplicated from the master mold. Then, a Mo layer, with a thickness of 20 nm, was deposited on the PVA mold. The Mo deposited PVA mold was put on the Si wafer substrate, and nTP process progressed. After the nTP process, the PVA mold was removed using DI water, and transferred Mo nano patterns were characterized by a Scanning electron micrograph (SEM) and Energy Dispersive spectroscopy (EDS).

Fabrication of Biodegradable Disc-shaped Microparticles with Micropattern using a Hot Embossing Process with Porous Microparticles

  • Hwang, Ji-Yea;Choy, Young-Bin;Seo, Soon-Min;Park, Jung-Hwan
    • Journal of Pharmaceutical Investigation
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    • 제41권3호
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    • pp.147-151
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    • 2011
  • This paper demonstrates the development of a method for preparing micropatterned microdiscs in order to increase contact area with cells and to change the release pattern of drugs. The microdiscs were manufactured with hot embossing, where a polyurethane master structure was pressed onto both solid and porous microparticles made of polylactic-co-glycolic acid at various temperatures to form a micropattern on the microdiscs. Flat microdiscs were formed by hot embossing of porous microparticles; the porosity allowed space for flattening of the microdiscs. Three types of micro-grooves were patterned onto the flat microdiscs using prepared micropatterned molds: (1) 10 ${\mu}M$ deep, 5 ${\mu}M$ wide, and spaced 2 ${\mu}M$ apart; (2) 10 ${\mu}M$ deep, 9 ${\mu}M$ wide, and spaced 5 ${\mu}M$ apart; and (3) 10 ${\mu}M$ deep, 50 ${\mu}M$ wide, and spaced 50 ${\mu}M$ apart. This novel microdisc preparation method using hot embossing to create micropatterns on flattened porous microparticles provides the opportunity for low-cost, rapid manufacture of microdiscs that can be used to control cell adhesion and drug delivery rates.

나노 광소자용 나노스탬프 제조공정 연구 (Nano stamp fabrication for photonic crystal waveguides)

  • 정명영;정은택;김창석
    • 한국정밀공학회지
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    • 제22권12호
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    • pp.16-21
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    • 2005
  • Photonic crystals, periodic structure with a high refractive index contrast modulation, have recently become very interesting platform for the manipulation of light. The existence of a photonic bandgap, a frequency range in which the propagation of light is prevented in all directions, makes photonic crystal very useful in application where the spatial localization of light is required, for example waveguide, beam splitter, and cavity. However, the fabrication of 3 dimensional photonic crystals is still difficult process. A concept that has recently attracted a lot of attention is a planar photonic crystal based on a dielectric membrane, suspended in the air and perforated with two dimensional lattice of hole. The fabrication of Si master with pillar structure using hot embossing process is investigated for two dimensional, low-index-contrast photonic crystal waveguide. From our research we show that the multiple stamp copy process proved to be feasible and useful.

나노임프린트 리소그래피와 유연 PVA 템플릿을 이용한 렌즈 표면 moth-eye 패턴 형성에 관한 연구 (Fabrication of Moth-Eye Pattern on a Lens Using Nano Imprint Lithography and PVA Template)

  • 배병주;홍성훈;곽신웅;이헌
    • 한국표면공학회지
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    • 제42권2호
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    • pp.59-62
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    • 2009
  • Antireflection pattern, moth-eye structure, was fabricated on lens using Ultra Violet nanoimprint lithography and flexible template. Ni template with conical shaped structure was used as a master template to molding. The flexible poly vinyl alcohol template was fabricated by molding. This poly vinyl alcohol template was used as an imprint template of imprint at lens. Using Ultra Violet nanoimprint lithography and poly vinyl alcohol template, polymer based moth-eye structure was formed on lens and its transmittance was increased up to 94% from 92% at 550 nm wavelength.

Improvement of Fast-Growing Wood Species Characteristics by MEG and Nano SiO2 Impregnation

  • DIRNA, Fitria Cita;RAHAYU, Istie;ZAINI, Lukmanul Hakim;DARMAWAN, Wayan;PRIHATINI, Esti
    • Journal of the Korean Wood Science and Technology
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    • 제48권1호
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    • pp.41-49
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    • 2020
  • Jabon (Anthocephalus cadamba) is a fast-growing wood species that is widely utilized for light construction and other purposes in Indonesia. The objectives of the current study were to determine the effects of monoethylene glycol (MEG) and SiO2 nanoparticles (nano SiO2) impregnation treatment on the dimensional stability and density of jabon wood and to identify the characteristics of impregnated jabon wood. Wood samples were immersed in water (as untreated), MEG, 0.5% MEGSiO2, then impregnated by applying 0.5 bar of vacuum for 60 min, and then applying 2.5 bar of pressure for 120 min. The results showed that impregnation with MEG and Nano SiO2 had a significant effect on the dimensional stability of jabon wood. Polymers can fill cell walls in wood indicated by increasing weight percentgain, antiswelling efficiency, bulking effect, and density, then decreasing in water uptake value. Jabon wood morphology by using SEM showed that MEGSiO2 polymers can cover part of the pitsin the wood vessel wall of jabon. This finding was reinforced by EDX results showing that the silicon content was increased due to the addition of SiO2 nano. The XRD diffraction pattern indicated that MEGSiO2 treatment increased the degree of crystallinity in wood samples. Overall, treatment with 0.5% MEGSiO2 led to the most improvement in the dimensional stability of 5-year-old jabon wood in this study.

패턴전사프린팅용 고분자 복제 소재 연구 (A Study on Polymer Replica Materials for Nanotransfer Printing)

  • 강영림;박운익
    • 한국전기전자재료학회논문지
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    • 제34권4호
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    • pp.262-268
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    • 2021
  • For the past several decades, various next-generation patterning methods have been developed to obtain well-designed nano-to-micro structures, such as imprint lithography, nanotransfer printing (nTP), directed self-assembly (DSA), E-beam lithography, and so on. Especially, nTP process has much attention due to its low processing cost, short processing time, and good compatibility with other patterning techniques in achieving the formation of high-resolution functional patterns. To transfer functional patterns onto desirable substrates, the use of soft materials is required for precise replication of master mold. Here, we introduce a simple and practical nTP method to create highly ordered structures using various polymeric replica materials. We found that polymethyl methacrylate (PMMA), polystyrene (PS), and polyvinylpyridine (PVP) are possible candidates for replica materials for reliable duplication of Si master mold based on systematic analysis of pattern visualization. Furthermore, we successfully obtained well-defined metal and oxide nanostructures with functionality on target substrates by using replica patterns, through deposition and transfer process. We expect that the several candidates of replica materials can be exploited for effective nanofabrication of complex electronic devices.

적층 방식 3차원 프린팅에 의한 미세유로 칩 제작 공정에서 프린팅 방향 및 적층 두께의 영향에 관한 연구 (Study on Effect of the printing direction and layer thickness for micro-fluidic chip fabrication via SLA 3D printing)

  • 진재호;권다인;오재환;강도현;김관오;윤재성;유영은
    • Design & Manufacturing
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    • 제16권3호
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    • pp.58-65
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    • 2022
  • Micro-fluidic chip has been fabricated by lithography process on silicon or glass wafer, casting using PDMS, injection molding of thermoplastics or 3D printing, etc. Among these processes, 3D printing can fabricate micro-fluidic chip directly from the design without master or template for fluidic channel fabricated previously. Due to this direct printing, 3D printing provides very fast and economical method for prototyping micro-fluidic chip comparing to conventional fabrication process such as lithography, PDMS casting or injection molding. Although 3D printing is now used more extensively due to this fast and cheap process done automatically by single printing machine, there are some issues on accuracy or surface characteristics, etc. The accuracy of the shape and size of the micro-channel is limited by the resolution of the printing and printing direction or layering direction in case of SLM type of 3D printing using UV curable resin. In this study, the printing direction and thickness of each printing layer are investigated to see the effect on the size, shape and surface of the micro-channel. A set of micro-channels with different size was designed and arrayed orthogonal. Micro-fluidic chips are 3D printed in different directions to the micro-channel, orthogonal, parallel, or skewed. The shape of the cross-section of the micro-channel and the surface of the micro-channel are photographed using optical microscopy. From a series of experiments, an optimal printing direction and process conditions are investigated for 3D printing of micro-fluidic chip.

염료감응형 태양전지 $TiO_{2}$ 광전극 표면의 초음파 열처리에 관한 연구 (A study of DSC using Ultrasonic and Thermal treatment on nano-crystalline $TiO_{2}$ surface)

  • 홍지태;최진영;서현웅;김종락;김희제
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2007년도 춘계학술대회
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    • pp.317-319
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    • 2007
  • Recently, there were many researches for efficiency improvement of DSC. Among of these works, research of surface treatment is still a prerequisite for electron diffusion, light-harvesting and surface state of $DSC^{4)}$. Using of the surface treatment, it can be raise up porosity of $TiO_{2}$ nano-crystalline structure on $photo-electrode^{5)}$. There are chemical, physical, electrical and optical methods which raise up its porosity. In this paper, we have designed and manufactured MOPA-type ultrasonic circuit (100W, frequency and duty variable). Manufactured ultrasonic circuit to use to force cavity density and power into $TiO_{2}$ paste. Then, we have optimized forcing time, frequency and duty of ultrasonic irradiation for surface treatment of photo-electrode of DSC. In I-V characteristic test of DSC, ultrasonic and thermal treated DSC shows 19% improved its efficiency against established DSC.

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롤투롤 나노 복제 공정을 이용한 이차원 광결정 소자의 제작 (Fabrication of Two-dimensional Photonic Crystal by Roll-to-Roll Nanoreplication)

  • 김영규;변의현;장호영;김석민
    • 한국기계가공학회지
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    • 제12권5호
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    • pp.16-22
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    • 2013
  • A two-dimensional photonic crystal structure was investigated using a roll-to-roll nanoreplication and physical vapor deposition processes for the inexpensive enhanced fluorescence substrate which is not sensitive to the polarization directions of excitation light source. An 8 inch silicon master having nano dot array with a diameter of 200 nm, a height of 100 nm and a pitch of 400 nm was prepared by KrF laser scanning lithography and reactive ion etching processes. A flexible polymer mold was fabricated by flat type UV replication process and a deposition of 10 nm nickel layer as an anti-adhesion layer. A roll mold was prepared by warping the flexible polymer mold on an aluminum roll base and a roll-to-roll UV replication process was carried out using the roll mold. After the deposition of ~ 100 nm $TiO_2$ layer on the replicated nano dot array, a 2 dimensional photonic crystal structure was realized with a resonance wavelength of 635 nm for both p- and s-polarized light sources.

Influence of Nano-Cellulose Dispersant on the Vulcanization Characteristics, Viscoelastic Properties, and Mechanical Properties of Silica-SBR Compounds

  • Kim, Jung Soo;Kim, Dong Hyun
    • Elastomers and Composites
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    • 제55권3호
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    • pp.215-221
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    • 2020
  • Silica/SBR (styrene-butadiene rubber) compounds are the primary constituents of tire treads. Furthermore, the excellent dynamic viscoelastic properties of silica lead to good fuel efficiencies. However, the silanol group on the surface of silica does not mix well with non-polar rubber because of its polarity. This incompatibility causes aggregation due to the occurrence of hydrogen bonding between the hydroxyl groups, thereby reducing the dispersibility of silica. Recently, the wet master batch (WMB) process has been applied to overcome these disadvantages, and research on silica dispersants that can be used in the WMB process has been increasing. In this study, we prepared silica/SBR compounds by using three types of eco-friendly cellulose-based dispersants in the WMB process, namely: cellulose-, sodium carboxymethyl cellulose, and nanocellulose-based dispersants. Subsequently, we compared the vulcanization characteristics, viscoelastic properties, and mechanical properties of the compounds. The silica dispersibility in the rubber compounds was improved with the addition of the nano-cellulose dispersant, resulting in the enhancement of the workability, hardness, tensile strength, and wear resistance of the SBR compound.