Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
권호 표지

Fabrication of Two-dimensional Photonic Crystal by Roll-to-Roll Nanoreplication

롤투롤 나노 복제 공정을 이용한 이차원 광결정 소자의 제작

  • Kim, Young-Kyu (Department of Mechanical Engineering, Chung-Ang Univ.) ;
  • Byeon, Euihyeon (Department of Mechanical Engineering, Chung-Ang Univ.) ;
  • Jang, Ho-Young (Department of Mechanical Engineering, Chung-Ang Univ.) ;
  • Kim, Seok-Min (Department of Mechanical Engineering, Chung-Ang Univ.)
  • Published : 2013.10.31
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Abstract

A two-dimensional photonic crystal structure was investigated using a roll-to-roll nanoreplication and physical vapor deposition processes for the inexpensive enhanced fluorescence substrate which is not sensitive to the polarization directions of excitation light source. An 8 inch silicon master having nano dot array with a diameter of 200 nm, a height of 100 nm and a pitch of 400 nm was prepared by KrF laser scanning lithography and reactive ion etching processes. A flexible polymer mold was fabricated by flat type UV replication process and a deposition of 10 nm nickel layer as an anti-adhesion layer. A roll mold was prepared by warping the flexible polymer mold on an aluminum roll base and a roll-to-roll UV replication process was carried out using the roll mold. After the deposition of ~ 100 nm $TiO_2$ layer on the replicated nano dot array, a 2 dimensional photonic crystal structure was realized with a resonance wavelength of 635 nm for both p- and s-polarized light sources.

Keywords

References

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