• 열처리공학회지
• /
• 제34권2호
• /
• pp.75-80
• /
• 2021

The crystal grains of polycrystalline diamond vary depending on deposition conditions and growth thickness. The diamond thin film deposited by the CVD method has a very rough growth surface. On average, the surface roughness of a diamond thin film deposited by CVD is in the range of 1-100 um. However, the high surface roughness of diamond is unsuitable for application in industrial applications, so the surface roughness must be lowered. As the surface roughness decreases, the scattering of incident light is reduced, the heat conduction is improved, the mechanical surface friction coefficient can be lowered, and the transmittance can also be improved. In addition, diamond-coated cutting tools have the advantage of enabling ultra-precise machining. In this study, the surface roughness of diamond was improved by thermal diffusion reaction between diamond carbon atoms and ferrous metals at high temperature for diamond thin films deposited by MPCVD.

• 한국정밀공학회지
• /
• 제29권12호
• /
• pp.1267-1271
• /
• 2012

Demand for optical glass device used for lighting could increase rapidly because of LED lighting market growth. The optical glass devices that have been formed by hot press molding process the desired optical performance without being subjected to mechanical processing such as curve generation or grinding. EL-Max material has been used for many engineering applications because of their high wear resistance, high compressive strength, corrosion resistant and very good dimensional stability. EL-Max is very useful for a glass lens mold especially at high temperature and pressure. The performance and reliability of optical components are strongly influenced by the surface damage of EL-Max during grinding process. Therefore, the severe process condition optimization shall be necessary for the highly qualified EL-Max glass lens mold. To get the required qualified surface of EL-Max, the selection of type of the diamond wheel is also important. In this paper, we report best grinding conditions of ultra-precision grinding machining. The grinding machining results of the form accuracy and surface roughness have been analyzed by using Form Talysurf and NanoScan.

• 대한기계학회논문집B
• /
• 제28권3호
• /
• pp.265-270
• /
• 2004

Experiment study on a down scaled two-phase catalytic reactor is presented. As a preliminary step for the development of catalytic reactor, nano-particulate catalyst was prepared. Perovskite La$\_$0.8/Sr$\_$0.2/CoO$_3$is chosen and synthesized as a catalyst considering superior catalytic performance in reduction and oxidation process where oxygen is involved among the reagent. Reactor that has a scale of 2${\times}$10${\times}$25mm was made by machining of A1 block as a layered structure considering further extension to micro-machining. Hydrogen peroxide of 70wt% was adopted as reactant and was provided to the reactor loaded with 1.5 g of catalyst. Reactant flow rate was varied by precision pump with a range of 0.15cc/min to 17.2cc/min. Temperature distribution within reactor was recorded by 3 thermocouples and total amount of liquid product was measured. Temperature distribution and factors that affect temperature were observed and relation between temperature distribution and production rate was also analyzed. Relative time scale plays a significant role in the performance of the reactor. To obtain steady state operation, appropriate ratio of flow rate, catalyst mass and reactor geometry is required and furthermore to get more efficient production rate temperature distribution should be evenly distributed. The database obtained by the experiment will be used as a design parameter for micro reactor.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1507-1510
• /
• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국재료학회지
• /
• 제15권9호
• /
• pp.589-593
• /
• 2005

Nanoimprinting lithography (NIL) is known as a suitable technique for fabricating nano and micro structures of high definition. Hot embossing is one of NIL techniques and can imprint on thin films and bulk polymers. Key issues of hot embossing are time and expense needed to produce a stamp withstanding a high temperature and pressure. Fabrication of a metal stamp such as an electroplated nickel is cost intensive and time consuming. A ceramic stamp made by silicon is easy to break when the pressure is applied. In this paper, a plastic stamp using a high temperature epoxy was fabricated and tested. The plastic stamp was relatively inexpensive, rapid to produce and durable enough to withstanding multiple hot embossing cycles. The merits of low viscosity epoxy solutions were a fast degassing and a rapid filling the microstructures. The hot embossing process with plastic stamp was performed on PMMA substrates. The hot embossing was conducted at 12.6 bar, $120^{\circ}C$ and 10 minutes. An imprinted PMMA wafer was almost same value of the plastic stamp after 10 times embossing. Entire fabrication process from silicon master to plastic stamp was completed within 12 hours.

• 한국정밀공학회지
• /
• 제23권8호
• /
• pp.171-177
• /
• 2006

This study was performed as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-{\mu}m$-deep indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.51 GPa and 104 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$ ) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46- 0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined are a during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국산업융합학회 논문집
• /
• 제24권6_2호
• /
• pp.729-735
• /
• 2021

Recently Artificial Intelligence(AI) has been developed and used in various fields. Especially AI recognition technology can perceive and distinguish images so it should plays a significant role in quality inspection process. For stability of autonomous driving technology, semiconductors inside automobiles must be protected from external electromagnetic wave(EM wave). As a shield film, a thin polymeric material with hole shaped micro-patterns created by a laser processing could be used for the protection. The shielding efficiency of the film can be increased by the hole structure with appropriate pitch and size. However, since the sensitivity of micro-machining for some parameters, the shape of every single hole can not be same, even it is possible to make defective patterns during process. And it is absolutely time consuming way to inspect all patterns by just using optical microscope. In this paper, we introduce a AI inspection system which is based on web site AI tool. And we evaluate the usefulness of AI model by calculate Area Under ROC curve(Receiver Operating Characteristics). The AI system can classify the micro-patterns into normal or abnormal ones displaying the text of the result on real-time images and save them as image files respectively. Furthermore, pressing the running button, the Hardware of robot arm with two Arduino motors move the film on the optical microscopy stage in order for raster scanning. So this AI system can inspect the entire micro-patterns of a film automatically. If our system could collect much more identified data, it is believed that this system should be a more precise and accurate process for the efficiency of the AI inspection. Also this one could be applied to image-based inspection process of other products.

• 한국세라믹학회지
• /
• 제42권6호
• /
• pp.377-383
• /
• 2005

Generally, the strength achieved of glass-ceramics is higher as is the fracture toughness, as compared with the original glass. This improvement is due to the microstructure consisting of very small crystals. In this study, Ag-doped $45SiO_2-24CaO-24Na_2O-4P_2O_5$ glasses were irradiated to strengthen by the crystallization using Femto second laser Pulses. Through the UV/VIS spectroscope, XRD, Nano-indenter and SEM etc., heat-treated and irradiation of laser pulses without heat-treated samples were analyzed. Two kinds of samples, heat-treated and laser irradiated without heat-treated samples, showed the peaks in the same wavelength near 360 nm. Especially, samples irradiated by 140 mW laser with XYZ stage having at the rate of 100$\~$l000 $\mu$m/s had the largest absorption peak among them, and heat-treated samples was shown lower absorption range than over 90 mW laser irradiated samples. Moreover, samples irradiated by laser had higher values ($4.4\~4.56{\times}10^{-3}(Pa)$) of elastic modulus which related with strength of glass than values of heat-treated samples and these are 1.2$\~$1 .5 times higher values than them of mother glass.

• 한국기계가공학회지
• /
• 제12권4호
• /
• pp.75-80
• /
• 2013

Single crystal sapphire being used in high technology industry is a brittle material with a high hardness and excellent physical properties. ELID(Electrolytic In-Process Dressing) grinding technology was applied to material removal machining process of single crystal sapphire wafer. Ultrasonic vibration which added to material using ultrasonic table was adopted to efficient ELID grinding of sapphire materials. The evaluation of the ground surface of single crystal sapphire wafer was carried out by means of surface measuring by using AFM(Atomic Force Microscope), surface roughness tester and optical microscope device. As the results of experiment, it was shown that more efficient grinding was conducted when using ultrasonic table. In case of using #170 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was superior to ELID ground specimen without ultrasonic table. However, In case of using #2000 grinding wheel, surface roughness of ELID ground specimen in using ultrasonic table was inferior to ELID ground specimen without ultrasonic table.

• 열처리공학회지
• /
• 제17권3호
• /
• pp.173-179
• /
• 2004

In this study, the influence of heat treatment and Ca contents on the electrochemical behavior was investigated. Mg-Ca alloys, i.e., Mg-0.22wt%Ca, Mg-0.56wt%Ca, Mg-1.31wt%Ca are prepared by ingot metallurgy. As-cast Mg-Ca alloys exhibited better electrochemical properties than pure Mg. Especially, Mg-0.22wt%Ca alloy improves its anode efficiency up to 62% and lowers the OCP up to -1.72VSCE. Microstructure and XRD patterns of Mg-Ca alloys show that additive Ca element is mainly solid-solutioned. While, the others show the microstructure and XRD pattern with large $Mg_2Ca$ at grain boundary. To assess the effect of heat treatment on the as-cast Mg-alloy, the specimens were heat treated at $200^{\circ}C$ for 2 hours under $CO_2$ gas atmosphere. Although corrosion properties of Mg-Ca alloys are somewhat deteriorated by heat treatment at $200^{\circ}C$ Mg-0.22wt%Ca alloy with uniformly distributed nano-sized $Mg_2Ca$ phase in ${\alpha}$-Mg matrix show still better corrosion properties than pure Mg specimen.