Automated Inspection System for Micro-pattern Defection Using Artificial Intelligence |
Lee, Kwan-Soo
(Dept. of Optics and Mechatronics Engineering, College of Nano Science and Technology, Pusan National University)
Kim, Jae-U (Dept. of Optics and Mechatronics Engineering, College of Nano Science and Technology, Pusan National University) Cho, Su-Chan (Dept. of Cogno-Mechatronics Engineering, College of Nano Science and Technology, Pusan National University) Shin, Bo-Sung (Dept. of Optics and Mechatronics Engineering, College of Nano Science and Technology, Pusan National University) |
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