• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.647-648
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Journal of the Korean Ceramic Society
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• v.46 no.1
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• pp.102-107
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• 2009

This study has been focused on an effective surface finishing method combining ELID (ELectrolytic In-process Dressing) and MAP (Magnetic Assisted Polishing) for the nano-precision mirror grinding of glass-lens molding mould. ELID grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP has been used as polishing method due to its high polishing efficiency and superior surface quality. It also presents some techniques for achieving the nanometer roughness of the hard material such as WC-Co, which are extensively used in precision tooling material.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.3
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• pp.224-230
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• 2009

FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.268-271
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• 2005

Etch resistance of mask layer on silicon substrate modified by AFM-based Tribo-Nanolithography (TNL) in Aqueous Solution in an aqueous solution was demonstrated. n consists or sequential processes, nano-scratching and wet chemical etching. The simple scratching can form a mask layer on the silicon substrate, which acting as an etching mask. For TNL, a specially designed cantilever with diamond tip, allowing the formation of mask layer on silicon substrate easily by a simple scratching process, has been applied instead of conventional silicon cantilever fur scanning. This study demonstrates how the TNL parameters can affect the etch resistance of mask layer, hence introducing a new process of AFM-based maskless nanolithography in aqueous solution.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1101-1106
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• 2014

Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.4
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• pp.8-13
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• 2015

In this study, we fabricated and characterized a nanostructured surface based on a plastic injection molding with a local mold heating (LMH) system. A metal mold core with a closed packed nano convex array (CVA) was achieved by integrated engineering procedures: (1) master template fabrication by anodic aluminum oxidation (AAO), (2) nickel electroforming (NE) process, and (3) post-processing by precision machining. The nickel mold core was utilized to replicate a surface with a closed packed nano concave-array (CCA) based on injection molding using cyclic olefin copolymer (COC) as a plastic material. In particular, an LMH system was introduced to enhance transcription quality of the nano structures by delaying solidification of molten polymer near the surface of the mold core.

• Design & Manufacturing
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• v.14 no.1
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• pp.63-68
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• 2020

Ultra-high brightness and thin displays need to optical micro-patterns which can uniformly diffuse the lights and low loss. The micro random patterns have characteristics to rise the optical efficiency such as light extraction, uniform diffusion. For this reason, various fabrication processes are studied for random patterns. In this study, the micro random patterns were machined by diamond turning which used a controlled cutting tool path with random cutting depth. The machined patterns had random shape and directionality along the circumferential direction. The average width and length of machined random pattern according to rotation radius were 40.13㎛~55.51㎛ and 37.25㎛~59.49㎛, and these results were compared with the designed result. Also, the machining error according to rotation radius in diamond turning using randomly controlled cutting depth was discussed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.48-53
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• 2005

The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, nano-technology and biotechnology. In particular, the nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.8
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• pp.759-763
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• 2015

The laser machining process has been proposed as an advanced process for the selective fabrication of electrodes without a mask. In this study, we adapt laser machining to metals that have different thermal properties. Based on the results, the metals exhibit a different surface morphology, heat-affected zone (HAZ), and a recast layer around the machined surface according to their thermal conductivity, boiling point, and thermal diffusivity. Then, we apply ultrasonic-assisted laser machining to remove the recast layer. The ultrasonic-assisted laser machining exhibits a better surface quality in metals with higher diffusivity than those having lower diffusivity.