Browse > Article
http://dx.doi.org/10.3795/KSME-A.2009.33.3.224

A Study on the Machining Characteristic of DLC Coated Mold Material Using FIB  

Hong, W.P. (한국생산기술연구원 융합생산기술연구부)
Choi, B.Y. (한국생산기술연구원 디지털협업지원센터)
Kang, E.G. (한국생산기술연구원 디지털협업지원센터)
Lee, S.W. (한국생산기술연구원 디지털협업지원센터)
Choi, H.Z. (한국생산기술연구원 디지털협업지원센터)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.33, no.3, 2009 , pp. 224-230 More about this Journal
Abstract
FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.
Keywords
Sputtering; DLC(Diamond-like Carbon); Waveguide Mold;
Citations & Related Records

Times Cited By SCOPUS : 0
연도 인용수 순위
  • Reference
1 Kang, E. G., Choi, B. Y., Hong, W. P., Lee, S. W. and Choi, H. Z., 2006, "FIB Processing Technology for Nano Stamp," KSPE Autumn Conference, pp. 539-540   과학기술학회마을
2 Noriko, N. and Masafumi, T., 2007, "Nano-Fabrication Utilizing Point Defects Induced by Ion-Implantation," Surface and Coatings Technology, Vol.201, pp. 8521-8525   DOI   ScienceOn
3 Youn, S. W., Takahashi, M., Goto, H. and Maeda, R., 2006, "Microstructuring of Glassy Carbon Mold for Glass Embossing-Comparison of Focused Ion Beam, Nano/Femtosecond-Pulsed Laser and Mechanical Machining," Microelectronic Engineering, Vol.83, pp. 2482-2492   DOI   ScienceOn
4 Kuhnke, M., Lippert, T., Ortelli, E., Scherer, G. G. and Wokaun, A., 2004, "Microstructuring of Glassy Carbon: Comparison of Laser Machining and Reactive Ion Etching," Thin Solid Films, Vol.453-454, pp. 36-41   DOI   ScienceOn
5 Jeong, J. I, Yang, J. H., Park, Y. H., Lee, K. H. and Kim H. K., 2007, "Effect of the Ion Beam Conditions and Interlayer on the Formation of Diamond-Like Carbon Films," RIST Research Report, Vol.21, pp. 49-56
6 Lee, S. W., Kang, E. G., Choi, B. Y., Hong, W. P. and Choi, H. Z., 2007, "Analysis of FIB-Sputtering Characteristics on Glassy Carbon," KSPE Spring Conference, pp. 767-768   과학기술학회마을
7 Kang, E. G., Choi, B. Y., Hong, W. P., Lee, S. W. and Choi, H. Z., 2007, "Nano-Pattering Characteristics Using FIB-Sputtering Technology for DVD Mols," J. of Industrial Technology, Vol.16, pp. 158-169
8 Dubner, A. D., 1990, "Mechanism of Ion Beam Induced Deposition," Doctoral Thesis, Massachusetts Institute of Technology
9 Youn, S. W., Takahashi, M., Goto, H. and Maeda, R. 2007, "Fabrication of Micro-Mold for Glass Embossing Using Focused Ion Beam, Femto-Second Laser, Eximer Laser And Dicing Techniques," Journal of Materials Processing Technology, Vol.187-188, pp. 326-330   DOI   ScienceOn
10 Hong, W. P., Kang, E. G., Choi, B. Y., Lee, S. W. and Choi, H. Z., 2006, "Development of the Process to Minimize the Redeposition Effect for FIB Technology,” J. of Industrial Technology, Vol.15, pp. 56-67