• Title/Summary/Keyword: Nano Resolution

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SWIR 이미지 센서 기술개발 동향 및 응용현황

  • Lee, Jae-Ung
    • Ceramist
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    • v.21 no.2
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    • pp.59-74
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    • 2018
  • Imaging in the Short Wave Infrared (SWIR) provides several advantages over the visible and near-infrared regions: enhanced image resolution in in foggy or dusty environments, deep tissue penetration, surveillance capabilities with eye-safe lasers, assessment of food quality and safety. Commercially available SWIR imagers are fabricated by integrating expensive epitaxial grown III-V compound semiconductor sensors with Si-based readout integrated circuits(ROIC) by indium bump bonding Infrared image sensors made of solution-processed quantum dots have recently emerged as candidates for next-generation SWIR imagers. They combine ease of processing, tunable optoelectronic properties, facile integration with Si-based ROIC and good performance. Here, we review recent research and development trends of various application fields of SWIR image sensors and nano-materials capable of absorption and emission of SWIR band. With SWIR sensible nano-materials, new type of SWIR image sensor can replace current high price SWIR imagers.

Electric Circuit Fabrication Technology using Conductive Ink and Direct Printing

  • Jeong, Jae-U;Kim, Yong-Sik;Yun, Gwan-Su
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.12.1-12.1
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    • 2009
  • For the micro conductive line, memory device fabrication process use many expensive processes such as manufactur-ing of photo mask, coating of photo resist, exposure, development, and etching. However, direct printing technology has the merits about simple and cost effective processes because nano-metal particles contained inks are directly injective without mask. And also, this technology has the advantage about fabrication of fine pattern line on various substrates such as FPCB, PCB, glass, polymer and so on. In this work, we have fabricated the fine and thick metal pattern line on flexible PCB substrate for the next generation electronic circuit using Ag nano-particles contained ink. To improve the line tolerance on flexible PCB, metal lines are fabricated by sequential prinitng method. Sequential printing method has vari-ous merits about fine, thick and high resolution pattern lines without bulge.

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NanoAnalysis with TOF-MEIS (TOF-MEIS 나노분석법)

  • Yu, Kyu-Sang;Moon, DaeWon
    • Vacuum Magazine
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    • v.2 no.2
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    • pp.17-23
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    • 2015
  • Medium Energy Ion Scattering (MEIS) has been successfully used for ultrathin film analysis such as gate oxides and multilayers due to its single atomic depth resolution in compostional and structural depth profiling. Recently, we developed a time-of-flight (TOF) MEIS for the first time, which can analyze a $10{\mu}m$ small spot. Small spot analysis would be useful for test pattern analysis in semiconductor industry and various thin film technology. The ion beam damage problem is minimized due to its improved collection efficiency by orders of magnitude and the ion beam neutralization problem is removed completely for quantitative analysis. Newly developed TOF-MEIS has been applied for gate oxides, ultra shallow junctions, nanoparticles, FINFET structures to provide compositional and structural profiles. Further development for submicron spot analysis and applications for functional nano thin films and nanostructured materials are expected for various nanotechnology and biotehnology.

Design of Fuzzy PI Controller for Piezo Actuator of Nano Stage (나노 스테이지용 압전 구동기의 퍼지 PI 제어기 설계)

  • Cho, Seong-Yeon;Chung, Chung-Choo
    • Proceedings of the KIEE Conference
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    • 2003.11c
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    • pp.629-632
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    • 2003
  • Piezo actuators are mainly used in precision position control system because of their high position resolution. Although there have been many approaches in open loop control of this, those method turn out to be not effective in precision control due to hysteresis and creep. To overcome the problems, closed loop PI control method is used in commercial products. However, it is very difficult to obtain fast response with conventional PI control although piezo actuator has fast response. In this paper, we propose a fuzzy PI control method with the proposed fuzzy PI controller, we obtains faster settling response over the conventional PI controller. We verify the effectiveness of the proposed method with experimental results.

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Electrical Properties of Nano Floating Gate Memory for Using Au and$ Au/SiO_2$ Nanoparticles (Au 및 $Au/SiO_2$ 나노입자를 이용한 나노부유게이트메모리 단일소자의 전기적 특성)

  • Park, Byoung-Jun;Kim, Hyun-Suk;Cho, Kyung-Ah;Kim, Sang-Sig
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.107-108
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    • 2005
  • Au and $Au/SiO_2$ nanoparticles(NPs) were synthesized by the colloidal method. The formation of Au and $Au/SiO_2$ NPs was confirmed using high resolution transmission electron microscopy (HRTEM). Synthesized solutions were deposited on Si wafer. The electrical properties of structures were measured using a semiconductor analyzer and a LCR meter. Capacitance versus voltage hysterisis curves showed the charge storage effect by Au and $Au/SiO_2$ NPs.

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Micro Patterning of Conductive Line by Micro Droplet Ejection of Nano Metal Ink (나노 금속잉크의 미세 액적 토출을 이용한 마이크로 패터닝)

  • Seo S.H.;Park S.J.;Jung H.C.;Joung J.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.689-693
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    • 2005
  • Inkjet printing is a non-contact and direct writing associated with a computer. In the industrial field, there have been many efforts to utilize the inkjet printing as a new way of manufacturing, especially for electronic devices. For the application of inkjet printing to electronic field, one of the key factors is exact realization of designed images into printed patterns. In this work, micro patterning for conducting line has been studied using the piezoelectric print head and silver nano ink. Dimensions of printed images have been predicted in terms of print resolution and diameter of a single dot. The predicted and the measured values showed consistent results. Using the results, the design capability for industrial inkjet printing could be achieved.

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Fabrication of Nanopatterns by Using Diblock Copolymer

  • KANG GIL BUM;KIM SEONa-IL;KIM YONG TAE;KIM YOUNG HHAN;PARK MIN CHUL;KIM SANG JIN;LEE CHANG WOO
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2005.09a
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    • pp.183-187
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    • 2005
  • Thin films of diblock copolymers may be suitable for semiconductor device applications since they enable patterning of ordered domains with dimensions below photolithographic resolution over wafer-scale area. We obtained nanometer-scale cylindrical structure of dibock copolymer of polystyrene-block-poly(methylmethacrylate), PS-b-PMMA, also demonstrate pattern transfer of the nanoporous polymer using both reactive ion etching. The size of fabricated naonoholes were about 10 nm. Fabricated nanopattern surface was observed by field emission scanning electron microscope (FESEM).

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TEM sample preparation using micro-manipulator for in-situ MEMS experiment

  • Hyunjong Lee;Odongo Francis Ngome Okello;Gi-Yeop Kim;Kyung Song;Si-Young Choi
    • Applied Microscopy
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    • v.51
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    • pp.8.1-8.7
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    • 2021
  • Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

A Simple and Quick Chemical Synthesis of Nanostructured Bi2Te3, Sb2Te3, and BixSb2-xTe3

  • Kim, Hee-Jin;Lee, Ki-Jung;Kim, Sung-Jin;Han, Mi-Kyung
    • Bulletin of the Korean Chemical Society
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    • v.31 no.5
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    • pp.1123-1127
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    • 2010
  • We report a simple and quick route for the preparation of high-quality, nearly monodisperse $Bi_2Te_3$, $Sb_2Te_3$, and $Bi_xSb_{2-x}-Te_3$ nanocrystallites. The reactions of bismuth acetate or antimony acetate with Te in oleic acid result in pure phase of $Bi_2Te_3$ or $Sb_2Te_3$ nanoparticles, respectively. Also, ternary $Bi_xSb_{2-x}Te_3$ nanoparticles were successfully synthesized using the same method. The size and morphology of the nanoparticles were controlled by varying the stabilizing agents. The as-prepared nanoparticles are characterized by X-ray diffraction, scanning electron microscope, and high-resolution transmission electron microscope using an energy dispersive spectroscopy.

Fabrication of Monolithic Spectrometer Module Based on Planar Optical Waveguide Platform using UV Imprint Lithography (UV 임프린트 공정을 이용한 평판형 광도파로 기반의 집적형 분광 모듈 제작)

  • Oh, Seung hun;Jeong, Myung yung;Kim, Hwan gi;Choi, Hyun young
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.3
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    • pp.73-77
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    • 2015
  • This paper presents integrated polymeric spectrometer module which offers compact size, easily-fabricated structure and low cost. The proposed spectrometer module includes the nano diffraction grating with non-uniform pitch and planar optical waveguide with concave mirror to be fabricated by UV imprint lithography. To increase the reflection efficiency, we designed the nano diffraction grating with triangular profiles. The polymeric planar spectrometer includes a spectral bandwidth of 700 nm, resolution of 10 nm and precision below 5 nm. This polymeric planar spectrometer is well-suited for sensor system.