Applied Microscopy

  • Volume 51
  • /
  • Pages.8.1-8.7
  • /
  • 2021
  • /
  • 2287-5123(pISSN)
  • /
  • 2287-4445(eISSN)
Korean Society of Microscopy (한국현미경학회)
권호 표지
DOI QR코드

DOI QR Code

TEM sample preparation using micro-manipulator for in-situ MEMS experiment

  • Hyunjong Lee (Korea Institute of Industrial Technology) ;
  • Odongo Francis Ngome Okello (Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Gi-Yeop Kim (Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Kyung Song (Division of Materials Testing and Reliability, Korea Institute of Materials Science) ;
  • Si-Young Choi (Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH))
  • Received : 2021.04.02
  • Accepted : 2021.05.20
  • Published : 2021.12.31
Download PDF
⟨ Previous Next ⟩

Abstract

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

Keywords

Acknowledgement

This work was supported by Korea Basic Science Institute (National research Facilities and Equipment Center) grant funded by the Ministry of Education. (2020R1A6C1020259) and by POSTECH-Samsung Electronics Industry-Academia Cooperative Research Center.

References

  1. J. Damiano, D. Nackashi, S. Mick, A MEMS-based technology platform for in-situ TEM heating studies. Microsc. Microanal. 14(S2), 1332 (2008)
  2. L.A. Giannuzzi, Z. Yu, D. Yin, M.P. Harmer, Q. Xu, N.S. Smith, L. Chan, J. Hiller, D. Hess, T. Clark, Theory and new applications of ex situ lift out. Microsc. Microanal. 21(4), 1034 (2015)
  3. W. Li, M. Li, X. Wang, P. Xu, H. Yu, X. Li, An in-situ TEM microreactor for real-time nanomorphology & physicochemical parameters interrelated characterization. Nano Today 35, 100932 (2020)
  4. J. Mayer, L.A. Giannuzzi, T. Kamino, J. Michael, TEM sample preparation andFIB-induced damage. MRS Bull. 32(5), 400-407 (2007)
  5. L. Mele, S. Konings, P. Dona, F. Evertz, C. Mitterbauer, P. Faber, R. Schampers, J.R. Jinschek, A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes. Microsc. Res. Tech. 79(4), 239-250 (2016)
  6. L. Novak, J. Starek, T. Vystavel, L. Mele, MEMS-based heating element for in-situDynamical experiments on FIB/SEM systems. Microsc. Microanal. 22(S3), 184-185 (2016)
  7. B. Prenitzer, C. Urbanik-Shannon, L. Giannuzzi, S. Brown, R. Irwin, T. Shofner, F. Stevie, The correlation between ion beam/material interactions and practical FIB specimen preparation. Microsc. Microanal. 9(3), 216 (2003)
  8. M.H. Roshan, S. Zaliasl, K. Joo, K. Souri, R. Palwai, L.W. Chen, A. Singh, S. Pamarti, N.J. Miller, J.C. Doll, A MEMS-assisted temperature sensor with 20-μK resolution, conversion rate of 200 S/s, and FOM of 0.04 pJK2. IEEE J. Solid-State Circuits 52(1), 185-197 (2016)
  9. E. Tochigi, T. Sato, N. Shibata, H. Fujita, Y. Ikuhara, In situ STEM mechanical experiments at atomic-resolution using a MEMS device. Microsc. Microanal. 25(S2), 1884-1885 (2019)
  10. K.A. Unocic, M.J. Mills, G. Daehn, Effect of gallium focused ion beam milling on preparation of aluminium thin foils. J. Microsc. 240(3), 227-238 (2010)
  11. J.T. van Omme, M. Zakhozheva, R.G. Spruit, M. Sholkina, H.H.P. Garza, Advanced microheater for in situ transmission electron microscopy; enabling unexplored analytical studies and extreme spatial stability. Ultramicroscopy 192, 14-20 (2018)
  12. S. Vijayan, In situ investigation of thermally activated processes using MEMS-based devices: practical challenges & applications (2018)
  13. S. Vijayan, J.R. Jinschek, S. Kujawa, J. Greiser, M. Aindow, Focused ion beam preparation of specimens for micro-electro-mechanical system-based transmission electron microscopy heating experiments. Microsc. Microanal. 23(4), 708 (2017)