• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.156-159
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• 2008

The electrical characteristic of SiGe-on-SOI (SGOI) wafer with different Ge concentration were evaluated by pseudo-MOSFET. Epitaxial SiGe layers was grown directly on top of SOI with Ge concentrations of 16.2, 29.7, 34.3 and 56.5 at.%. As Ge concentration increased, leakage current increased and threshold voltage shifted from 3 V to 7 V in nMOSFET, from -7 V to -6 V in pMOSFET. The interface states between buried oxide and top of Si was significantly increased by the rapid thermal annealing (RTA) process, and so the electrical characteristic of SGOI wafer degraded. On the other hand, additional post RTA　annealing (PRA) showed that it was effective in decreasing the interface states generated by RTA processes and the electrical characteristic of SGOI wafer enhanced higher than initial state.

• Applied Chemistry for Engineering
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• v.21 no.5
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• pp.564-569
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• 2010

Highly anti-reflective optical property has been focussed in the field of thin film and display because of increasing demands to the high transparency and clearness of optical component. In this study, to obtain anti-reflective property, the formation of aluminium oxide with nanoscaled flowerlike frame structure was introduced as oxide material monolayer on the substrate by hydrothermal synthesis through sol-gel method. The properties of coating layer were measured by the means of UV-Vis spectroscopy, FT-IR spectroscopy, XRD, and FE-SEM. The morphology of coating layer in alumina-sol coated samples was controlled by hydrothermal temperature and time with aid of ultrasound. It was found that high transparency and anti-reflective optical properties were obtained the formation of flowerlike nanoframe structure.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.480-480
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• 2011

양극산화(anodization)는 금속을 전기화학적으로 산화시켜 금속산화물로 만드는 기술로서 최근 다양한 크기의 나노 구조를 제조하는 기술로 각광받고 있으며, 이러한 기술에 의하여 얻어지는 anodic aluminum oxide(AAO)는 magnetic data storage, optoelectronic device, sensor에 적용될 수 있는 nano device 뿐만 아니라 nanostructure를 제조하기 위한 template 및 mask로써 최근 광범위 하게 연구되고 있다. 또한, AAO는 Al2O3의 단단한 구조를 가진 무기재료이므로 solid mask로써 다른 porous materials 보다 뛰어난 특성을 갖고 있다. 또한 electron-beam lithography 및 block co-polymer 에 의한 patterning 과 비교하여 매우 경제적이며, 재현성이 우수할 뿐만 아니라 대면적에서 나노 구조의 크기 및 형상제어가 비교적 쉽기 때문에 널리 사용되고 있다. 그러나, AAO 형성 시 생기게 되는 반구형 모양의 barrier layer는 물질(substance)과 기판과의 direct physical and electrical contact을 방해하기 때문에 해결해야 할 가장 큰 문제점 중 하나로 알려져 있다. 따라서 본 연구에서는 실리콘 기판위의 형성된 AAO의 barrier layer를 Cl/BCl3 gas mixture에서 Neutral Beam Etching (NBE)과 Ion Beam Etching (IBE) 로 각각 식각한 후 그 결과와 비교하였다. NBE와 IBE 모두 Cl2/BCl3 gas mixture에서 BCl3 gas의 첨가량이 60% 일 경우 etch rate이 가장 높게 나타났고, optical emission spectroscopy (OES)로 Cl2/BCl3 플라즈마 내의 Cl radical density와 X-ray photoelectron spectroscopy (XPS)로 AAO 표면 위를 관찰한 결과 휘발성 BOxCly의 형성이 AAO 식각에 크게 관여함을 확인 할 수 있었다. 또한, NBE와 IBE 실험한 다양한 Cl2/BCl3 gas mixture ratio 에서 AAO가 식각이 되지만, 이온빔의 경우 나노사이즈의 AAO pore의 charging에 의해 pore 아래쪽의 위치한 barrier layer를 어떤 식각조건에서도 제거하지 못하였다. 하지만, NBE에서는 BCl3-rich Cl2/BCl3 gas mixture인 식각조건에서 AAO pore에 휘발성 BOxCly를 형성하면서 barrier layer를 제거할 수 있었다.

• Journal of Powder Materials
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• v.17 no.2
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• pp.148-153
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• 2010

Thermal barrier systems have been widely investigated over the past decades, in order to enhance reliability and efficiency of gas turbines at higher temperatures. Yttria-stabilized zirconia (YSZ) is one of the most leading materials as the thermal barriers due to its low thermal conductivity, thermodynamic stability, and thermal compatibility with metal substrates. In this work, rare-earth oxides with pyrochlore phases for thermal barrier systems were investigated. Pyrochlore phases were successfully formed via solid-state reactions started from rare-earth oxide powders. For the heat-treated samples, thermo-physical properties were examined. These rare-oxide oxides showed thermal expansion of $9{\sim}12{\times}10^{-6}/K$ and thermal conductivity of 1.2~2.4 W/mK, which is comparable with the thermal properties of YSZ.

• Journal of Powder Materials
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• v.20 no.6
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• pp.453-459
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• 2013

Lanthanum/gadolinium zirconate coatings are deposited via suspension plasma spray with suspensions fabricated by a planetary mill and compared with hot-pressed samples via solid-state reaction. With increase in processing time of the planetary mill, the mean size and BET surface area change rapidly in the case of lanthanum oxide powder. By using suspensions of planetary-milled mixture between lanthanum or gadolinium oxide and nano zirconia, dense thick coatings with fully-developed pyrochlore phases are obtained. The possibilities of these SPS-prepared coatings for TBC application are also discussed.

• Polymer(Korea)
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• v.33 no.3
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• pp.219-223
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• 2009

The nanofibers fabricated by using an electrohydrodynamic process has been used as various applications, such as nano-device, filtering system, protective clothes, wound dressing, and drug delivery system (DDS). Of these applications, the DDS should be needed to minimize side effects of drugs, maximize the properties of medicine, and efficiently deliver the required amount of drugs to the diseased area. In this paper, by using the electro spinning process, which is one of electrohydrodynamic processes, two different types, polycarprolactone and poly(ethylene oxide)/Rhodamine B, of electrospun mats were fabricated layer by layer and the release behavior of Rhodamine B was characterized with time. In addition, to show the feasibility of DDS of this type, we tested release behavior of a peptide of the nanofiber system, a PCL/(Peptide+PEO)/PCL nanofiber mat. The released peptide did not loss biological activities. From these results, we believe that the layered nanofiber mat as a DDS has enough function of a new drug delivery system.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.1
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• pp.8-14
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• 2014

In this study, we investigated synthesis and characteristics of gallium oxide ($Ga_2O_3$) powders prepared by precipitation method. $Ga_2O_3$ powders were synthesized using $Ga(NO_3)_3$ as a starting material and $NH_4OH$ as a precipitant. The oxidation temperature of $Ga(OH)_3$ and phase transition temperature of $Ga_2O_3$ was revealed using TG-DSC analysis. The crystal structural change of $Ga_2O_3$ powders was investigated by XRD analysis. The morphologies and size distributions of $Ga_2O_3$ particles were analyzed using SEM.

• Korean Chemical Engineering Research
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• v.49 no.6
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• pp.781-785
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• 2011

In this work, a nano-sized samaria-doped ceria(SDC) was prepared by a urea-based hydrothermal method and characterized by XRD, FESEM and TEM. It was observed that the increase in synthesis time and temperature gave rise to crystallity and particles size. Moreover, the synthesised powders had a excellent ion-conductivity(0.1 S/cm at 600~$800^{\circ}C$) which is suitable for electrolyte of intermediate temperature-solid oxide fuel cell(IT-SOFC). Subsequently for use as electrolyte for anode-supported IT-SOFC, we tried to deposit the SDC powder on a porous NiO-SDC substrate by electrophoretic deposition(EPD) method. From the FESEM observation, a compact

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.24.2-24.2
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• 2009

Nanostuctures such as nanodot and nanowire have been extensively studied as building blocks for nanoscale devices. However, the direct growth of the nanostuctures at the desired position is one of the most important requirements for realization of the practical devices with high integrity. Self-assembled nanotemplate is one of viable methods to produce highly-ordered nanostructures because it exhibits the highly ordered nanometer-sized pattern without resorting to lithography techniques. And selective epitaxial growth (SEG) can be a proper method for nanostructure fabrication because selective growth on the patterned openings obtained from nanotemplate can be a proper direction to achieve high level of control and reproducibility of nanostructucture fabrication. Especially, SiGe has led to the development of semiconductor devices in which the band structure is varied by the composition and strain distribution, and nanostructures of SiGe has represented new class of devices such nanowire metal-oxide-semiconductor field-effect transistors and photovoltaics. So, in this study, various shaped SiGe nanostructures were selectively grown on Si substrate through ultrahigh vacuum chemical vapor deposition (UHV-CVD) of SiGe on the hexagonally arranged Si openings obtained using nanotemplates. We adopted two types of nanotemplates in this study; anodic aluminum oxide (AAO) and diblock copolymer of PS-b-PMMA. Well ordered and various shaped nanostructure of SiGe, nanodots and nanowire, were fabricated on Si openings by combining SEG of SiGe to self-assembled nanotemplates. Nanostructure fabrication method adopted in this study will open up the easy way to produce the integrated nanoelectronic device arrays using the well ordered nano-building blocks obtained from the combination of SEG and self-assembled nanotemplates.

• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.105-113
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• 2010

One-dimensional nanostructures have been researched widely because of its unique physical properties such as optical, electrical, mechanical, and chemical properties in comparison with bulk structures. Especially nanotubular structures are able to provide larger surface area, capability to load purposeful materials, and unique mechanical modulus. We reviewed the oxide nanotube technology with focusing on the method of template-directed fabrication. We can easily control of physical dimensions of nanotubes by control of nanotemplate and fabrication condition. and template-directed fabrication is ideal tool to fabricate the amount of monodisperse nanotubes. They have potentials for application in solar cell, drug-delivery, Li-ion batteries and photocatalyst. We discussed these potential applications and research trends.