• Title/Summary/Keyword: Nano Metrology

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Assembly of diameter 300 mm optical beam director (직경 300 mm 광집속장치의 광학정렬)

  • Yang, Ho-Soon;Lee, Yun-Woo;Kim, Jeong-Ju;Eum, Hae-Dong;Lee, Soo-Sang;Kim, Yeon-Soo;Kim, Hyun-Sook
    • Korean Journal of Optics and Photonics
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    • v.16 no.6
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    • pp.521-526
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    • 2005
  • We assembled the optical beam director with diameter 300 mm. This consists of primary, secondary mirrors and 5 folding mirrors. Among them, the primary mirror is the most important component so that we measure any possible deformation on it at every step of assembly. Also, we developed the systematic alignment algorithm, which is essential because the number of mirrors is 7. The final wavefront error of the system is 1.9 wave rms (wave=633 nm) which is 7 times larger than we expected. The main source is the deformation of the 131ding mirrors. We expect that what we have learned from the assembly of this system would be helpful when we deal with a larger system in the future.

Atomic Force Microscope for Standard Length Metrology (직교 스캐너와 레이저 간섭계를 사용한 교정용 원자현미경)

  • Lee, Dong-Yeon;Kim, Dong-Min;Gweon, Dae-Gab
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.12 s.255
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    • pp.1611-1617
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    • 2006
  • A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nano-metrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

Infrared Multiphoton Dissociation of $CHCl_2F$: Reaction Mechanisms and Product Ratio Dependence on Pressure and Laser Pulse Energy

  • Song, Nam-Woong;Lee, Won-Chul;Kim, Hyong-Ha
    • Journal of Photoscience
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    • v.12 no.2
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    • pp.101-107
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    • 2005
  • Infrared multiphoton dissociation of $CHCl_2F$ was studied using $CO_2$ laser excitation. Three products, $C_2Cl_2F_2$, $C_2ClF_3$, and $C_2HClF_2$, were identified by the analysis of the gas mixture from the photoreaction of $CHCl_2F$. The dependence of the reaction probability on added Ar gas pressure and excitation laser pulse energy was investigated. At low pressure (< 10 torr), the reaction probability increased as Ar pressure increased due to the rotational hole-filling effect, while it diminished with the increase of Ar pressure at high pressure (> > 20 torr) due to the collisional deactivation. The ratio of two products $(C_2ClF_3/C_2Cl_2F_2)$ decreased at low pressure (< 10 torr) and increased at high pressure (> 20 torr) with the increase of Ar pressure. The log-log plot of the reaction probability vs. laser pulse energy (${\\phi}$) was found to have a linear relationship, and its slope decreased as the added Ar pressure was increased. The reaction mechanisms for product formation have been suggested and validated by experimental evidences and considering the energetics. Fluorine-chlorine exchange reaction in the intermediate complex has been suggested to explain the formation of $C_2ClF_3$.

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Performance Evaluation of Mid-IR Spectrometers by Using a Mid-IR Tunable Optical Parametric Oscillator (중적외선 광 파라메트릭 발진기를 이용한 중적외선 분광기 성능 평가)

  • Nam, Hee Jin;Kim, Seung Kwan;Bae, In-Ho;Choi, Young-Jun;Ko, Jae-Hyeon
    • Korean Journal of Optics and Photonics
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    • v.30 no.4
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    • pp.154-158
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    • 2019
  • We have used a mid-IR (mid-infrared) continuous-wave (cw) optical parametric oscillator (OPO), developed previously and described in Ref. 12, to build a performance-evaluation setup for a mid-IR spectrometer. The used CW OPO had a wavelength tuning range of $ 2.5-3.6{\mu}m$ using a pump laser with a wavelength of 1064 nm and a fan-out MgO-doped periodically poled lithium niobate (MgO:PPLN) nonlinear crystal in a concentric cavity design. The OPO was combined with a near-IR integrating sphere and a Fourier-transform IR optical spectrum analyzer to build a performance-evaluation setup for mid-IR spectrometers. We applied this performance-evaluation setup to evaluating a mid-IR spectrometer developed domestically, and demonstrated the capability of evaluating the performance, such as spectral resolution, signal-to-noise ratio, spectral stray light, and so on, based on this setup.

Multimodal Nonlinear Optical Microscopy for Simultaneous 3-D Label-Free and Immunofluorescence Imaging of Biological Samples

  • Park, Joo Hyun;Lee, Eun-Soo;Lee, Jae Yong;Lee, Eun Seong;Lee, Tae Geol;Kim, Se-Hwa;Lee, Sang-Won
    • Journal of the Optical Society of Korea
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    • v.18 no.5
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    • pp.551-557
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    • 2014
  • In this study, we demonstrated multimodal nonlinear optical (NLO) microscopy integrated simultaneously with two-photon excitation fluorescence (TPEF), second-harmonic generation (SHG), and coherent anti-Stokes Raman scattering (CARS) in order to obtain targeted cellular and label-free images in an immunofluorescence assay of the atherosclerotic aorta from apolipoprotein E-deficient mice. The multimodal NLO microscope used two laser systems: picosecond (ps) and femtosecond (fs) pulsed lasers. A pair of ps-pulsed lights served for CARS (817 nm and 1064 nm) and SHG (817 nm) images; light from the fs-pulsed laser with the center wavelength of 720 nm was incident into the sample to obtain autofluorescence and targeted molecular TPEF images for high efficiency of fluorescence intensity without cross-talk. For multicolor-targeted TPEF imaging, we stained smooth-muscle cells and macrophages with fluorescent dyes (Alexa Fluor 350 and Alexa Fluor 594) for an immunofluorescence assay. Each depth-sectioned image consisted of $512{\times}512$ pixels with a field of view of $250{\times}250{\mu}m^2$, a lateral resolution of $0.4{\mu}m$, and an axial resolution of $1.3{\mu}m$. We obtained composite multicolor images with conventional label-free NLO images and targeted TPEF images in atherosclerotic-plaque samples. Multicolor 3-D imaging of atherosclerotic-plaque structural and functional composition will be helpful for understanding the pathogenesis of cardiovascular disease.

Direct Measurement of Distortion of Optical System of Lithography (노광 광학계의 왜곡수차 측정에 관한 연구)

  • Joo, WonDon;Lee, JiHoon;Chae, SungMin;Kim, HyeJung;Jung, Mee Suk
    • Korean Journal of Optics and Photonics
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    • v.23 no.3
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    • pp.97-102
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    • 2012
  • In general, one of the methods used to measure distortion is to use the full image of the regular pattern. However, because of low accuracy, this method is mainly used for an optical system such as a camera.. In order to measure distortion with high accuracy less than 1um, one can use the method of measuring the exact position of a mask image. In this case, a high accuracy stage with a laser encoder is required. In this paper, we investigate measurement of the distortion of high accuracy with a simple manual stage. The main idea is that we split and measure the mask image with the overlapping area by using CCD or CMOS, and then we get an exact position of the mask image by integrating the adjacent split images. We use the Canny Edge Detection method to get the position information of the mask image and we researched the process to exactly calculate distortion by using coordinate transformations and a least square method.

The Study of the Fabrication of the Ultra-Precision Cylinder by the Compensation Process (보정 가공을 통한 초정밀 원통 가공에 대한 연구)

  • Lee, Jung-Chul
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.5
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    • pp.122-128
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    • 2013
  • This paper describes the on-machine surface form evaluation of an ultra-precision cylinder for the fabrication by the compensation process. In this study, the surface form error of an ultra-precision cylinder, which was fabricated by the ultra-precision diamond turning machine with a single diamond cutting tool, was evaluated by using two capacitance-type displacement probes. Based on the measurement results, the compensation process was conducted. Since the measurement was carried out on the machine without re-mounting of the workpiece, additional fabrication for compensation process can be conducted precisely.

What Is Nano-Force Metrology? (나노 힘이란 무엇인가?)

  • 김민석;최인묵;박연규;김종호;강대임
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.9
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    • pp.12-19
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    • 2004
  • 수십 MN(10/sup 6/ N) 이상의 하중을 다루는 건설산업 및 중공업으로부터 수십 kN- 수 MN의 힘을 사용하는 재료시험기, 프레스, 및 공장 자동화설비 그리고 수십 N-수 kN 용량의 상업용 저울까지 힘 측정은 산업의 근간이 되는 기술이며 우리 실생활에 폭 넓게 이용되고 있다. 제품을 생산하고 대형 구조물을 건설하는 공장이나 건축현장에서 힘을 정확히 측정한다는 것은 공정을 일정하게 유지 관리하고 있다는 표시이므로 제품의 품질관리나 건축물의 안전관리의 척도가 된다. (중략)

Mechanical Properties of the Laminated Glass Fiber-Reinforced Plastic Composites for Electromagnet Structure System (전자석 구조물용 적층 유리섬유강화 복합재료의 기계적 특성)

  • Park, Han Ju;Kim, Hak Kun;Song, Jun Hee
    • Korean Journal of Metals and Materials
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    • v.49 no.8
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    • pp.589-595
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    • 2011
  • Laminated glass fiber-reinforced plastic (GFRP) composites were applied to an insulating structure of a magnet system for a nuclear fusion device. Decreased inter-laminar strength by a strong repulsive force between coils which is induced a problem of structural integrity in laminated GFRPs. Therefore, it is important to investigate the inter-laminar characteristics of laminated GFRP composites in order to assure more reliable design and better structural integrity. Three types of the laminated GFRP composites using a high voltage insulating materials were fabricated according to each molding process. To evaluate the grade of the fabricated composites, mechanical tests, such as hardness, tensile and compressive tests,were carried out. The autoclave molding composites satisfied almost of the mechanical properties reguested at the G10 class standard, but the vacuum impregnation (VPI) and Prepreg composites did not.

Optimal design of a flexure hinge-based XY AFM scanner for minimizing Abbe errors and the evaluation of pitch measuring uncertainty of a nano-accuracy AFM system (XY 스캐너의 아베 오차 최소화를 위한 최적 설계 및 나노 정밀도의 원자 현미경 피치 측정 불확도 평가)

  • Kim Dong-Min;Lee Dong-Yeon;Gweon Dae-Gab
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.6 s.183
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    • pp.96-103
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    • 2006
  • To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.