The Study of the Fabrication of the Ultra-Precision Cylinder by the Compensation Process

보정 가공을 통한 초정밀 원통 가공에 대한 연구

  • Lee, Jung-Chul (Department of Nano-Metrology and Control Laboratory, Research Center for Precision Nanosystems Department of Nanomechanics, Tohoku University)
  • Published : 2013.10.31

Abstract

This paper describes the on-machine surface form evaluation of an ultra-precision cylinder for the fabrication by the compensation process. In this study, the surface form error of an ultra-precision cylinder, which was fabricated by the ultra-precision diamond turning machine with a single diamond cutting tool, was evaluated by using two capacitance-type displacement probes. Based on the measurement results, the compensation process was conducted. Since the measurement was carried out on the machine without re-mounting of the workpiece, additional fabrication for compensation process can be conducted precisely.

Keywords

References

  1. Wang, M., W., and Tseng, C., C., "Analysis and fabrication of a prism film with roll-to-roll fabrication process," Optics Express, Vol. 17, pp. 4718-4725, 2009. https://doi.org/10.1364/OE.17.004718
  2. Gao, W., Tano, M., Araki, T., Kiyono, S., and Park, C., H., "Measurement and compensation of error motions of a diamond turning machine," Precision Engineering, Vol. 31, pp. 310-316, 2007. https://doi.org/10.1016/j.precisioneng.2006.06.003
  3. Kono, D., Matsubara, A., Yamaji, I., and Fujita, T., "High-precision machining by measurement and compensation of motion error," International Journal of Machine Tools and Manufacture, Vol. 48, pp. 1103-1110, 2008. https://doi.org/10.1016/j.ijmachtools.2008.02.005
  4. Whitehouse, D., J., "Some theoretical aspects of error separation techniques in surface metrology," Journal of Physics E: Scientific Instruments, Vol. 9, pp. 531-536, 1976. https://doi.org/10.1088/0022-3735/9/7/007
  5. Evans, C., J., Hocken, R., J., and Estler, W., T., "Self-calibration: reversal, redundancy, error separation and 'Absolute Testing'," Annals of the CIRP, Vol. 45, pp. 617-634, 1996. https://doi.org/10.1016/S0007-8506(07)60515-0
  6. Lee, J., C., Noh, Y., J., Arai, Y., Gao W., and Park, C., H., "Precision measurement of cylinder surface profile on an ultra-precision machine tool," Measurement Science Review, Vol. 9, pp. 49-52, 2009.
  7. Lee, J., Gao, W., Shimizu, Y., Hwang, J., Oh, J., S., and Park, C., H., "Precision measurement of carriage slide motion error of a drum roll lathe," Precision Engineering, Vol. 36, pp. 244-251, 2012. https://doi.org/10.1016/j.precisioneng.2011.10.005
  8. Gao, W., Lee, J., C.,, Arai, Y., Noh, Y., J., Hwang, J., H., and Park, C., H., "Measurement of slide error of an ultra-precision diamond turning machine by using a rotating cylinder workpiece," International Journal of Machine Tools and Manufacture, Vol. 50, pp. 404-410, 2010. https://doi.org/10.1016/j.ijmachtools.2009.10.011
  9. Guidelines for Evaluating and Expressing the Uncertainty of NIST Measurement Results, 1994.