• 수산해양기술연구
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• 제50권2호
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• pp.162-168
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• 2014

The friction and wear characteristics of the rubber matrix composites filled with nano sized silica particles were investigated at ambient temperature by pin-on-disc friction test. The volume fraction of silica particles was 19%. The cumulative wear volume and wear rate of these materials on counterpart roughness were determined experimentally. The major failure mechanisms were lapping layers, deformation of matrix, ploughing, debonding of particles, fracture of particles and microcracking by scanning electric microscopy photograph of the tested surface. The cumulative wear volume showed a tendency to increase with increase of sliding distance. The wear rate of these composites tested indicated low value as increasing the sliding distance.

• 한국산업융합학회 논문집
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• 제15권4호
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• pp.103-109
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• 2012

To enhance the cutting performance of high speed steel(HSS) endmill, single and multilayer coating is applied on the substrated of the HSS endmill. Coating material reduces cutting force and enhances resistance against abrasive wear. This paper presents the physical vapour deposition(PVD) coating technology and evaluate the PVD coated HSS endmill. The performance of coated HSS endmills are fifteen times better than uncoated HSS endmill on proposed cutting conditions. The TiAlN monolayer coated endmills(futura nano coating) are better than those of multilayer coated endmills(futura coating) on machined surface and tool wear.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.956-959
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• 2002

In this work, a new non-lithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photo-lithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.92-96
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• 2004

In this paper, polishing method using bonded magnetic abrasive particle has been applied to the micro mold polishing. Through process control using the Run-to-Run control, it tried to form the surface roughness In order to grasp the influence of the surface roughness which is reached by selection of control factor and the factor, a design of experiment was been processed. The study is processed with a purpose of to embody and to maintain the surface roughness of nano scale by the basis of an influence between a control factor and the factors which has been selected in this way. As a result, the result of the process control converged at a target value of surface roughness Ra 10nm and Rmax 50nm

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.64-64
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• 2003

고집적화된 시스템 LSI 반도체 소자 제조 공정에서 소자의 고속화 및 고성능화에 따른 배선층수의 증가와 배선 패턴 미세화에 대한 요구가 갈수록 높아져, 광역평탄화가 가능한 STI CMP(Shallow Trench Isolation Chemical-Mechanical-Polishing)공정의 중요성이 더해가고 있다. 이러한 STI CMP 공정에서 세리아 슬러리에 첨가되는 계면활성제의 농도에 따라 산화막과 질화막 사이의 연마 선택비를 제어하는 것이 필수적 과제로 등장하고 있다. 일반적인 CMP 공정에서 압력 증가에 따른 연마 제거량이 Prestonian 거동을 나타내는 반면, 연마 입자의 크기를 변화시켜 계면활성제의 농도를 달리 하였을 경우, 압력 변화에 따라 Non-Prestonian 거동이 나타나는 것을 고찰할 수 있었다. 따라서 본 연구에서는 세리아 슬러리 내에 첨가되는 계면활성 제의 농도와 연마입자의 크기를 달리한 후, 압력을 변화시킴으로 나타나는 non-Prestonian 거동에 미치는 영향에 대하여 연구하였다.

• International Journal of Precision Engineering and Manufacturing
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• 제5권2호
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• pp.32-38
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• 2004

The electrorheological(ER) fluid has been used to the ultraprecision polishing of single crystal silicon as new polishing slurry whose properties such as yield stress and particle structure changed with the application of an electric field. In this work, it is aimed to find the effective parameters in the ER fluid on material removal in the polishing system whose structure is similar to that of the simple hydrodynamic bearing. The generated pressure in the gap between a moving wall and a workpiece, as well as the electric field-induced stress of the mixture of ER fluid-abrasives, is evaluated experimentally, and their influence on the polishing of single crystal silicon is analyzed. Moreover, the behavior of abrasive and ER particles is described.

• 한국산업융합학회 논문집
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• 제16권4호
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• pp.119-125
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• 2013

To enhance the cutting performance of high speed steel(HSS) endmill, single and multilayer coating is applied on the substrated of the HSS endmill. Coating material reduces cutting force and enhances resistance against abrasive wear. This paper presents the physical vapour deposition(PVD) coating technology and evaluate the PVD coated HSS endmill. The performance of coated HSS endmills are fifteen times better than uncoated HSS endmill on proposed cutting conditions. The TiAlN monolayer coated endmills(futura nano coating) are better than those of multilayer coated endmills(futura coating) on machined surface and tool wear.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.631-632
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• 2006

Cr-C-Ni composites were synthesized in situ from elemental powders of Cr, Ni and C by high energy milling followed by reactive sintering. The milled powders with the grain size in nano-scale were pressed to compacts and sintered. During the following thermal treatment at first the chromium carbide was formed and then the $Cr_3C_2-Ni$ cermets were sintered in one cycle. The interface between the binder phase and the carbide grains of the in situ composite has a good bonding strength as it is not contaminated with oxidation films or other detrimental surface reactions.

• Tribology and Lubricants
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• 제33권5호
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• pp.220-227
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• 2017

In this work, carbon nanotube and nano-size alumina particle are exploited as additive for lubrication experiment. We used pin-on-disk type tribometer to investigate the tribological characteristics of lubricants with respect to additives and rotational speed. We conducted more than 15 trials of tribotests for two hours for each specimen to obtain stable and accurate frictional force and to create measurable wear track on the substrate. We conducted tests at the boundary/mixed lubrication regime to evaluate the influence of additives on the tribological characteristics. We found that the friction coefficient decreased as the rotational speed increased and as additives were added. In particular, the reduction of friction by adding additives was more significant at low rotational speed than at high rotational speed. We speculate that the additives helped to separate and protect the two contacting surfaces at low speed, while the influence of additives was not significant at high speed since sufficiently thick lubricant film was formed. The wear of the substrate was also reduced by adding additives to the lubricant. However, in contrast to friction, the amount of wear at high rotational speed was less when alumina particles were added to the lubricant than the amount of wear at low speed. We speculate that the increased wear at low rotational speed is as a result of the intermittent abrasive wear caused by alumina particles with uneven shape, while the reduced wear at high speed is as a result of sufficient film thickness which prevented the abrasive wear.

• 유기물자원화
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• 제32권1호
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• pp.21-29
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• 2024

본 연구에서는 반도체 패키징의 몰딩 공정에서 발생하는 EMC 폐기물을 재활용하여 실리카 나노입자를 성공적으로 제조하였으며, 이를 CMP 공정용 슬러리의 연마재 물질로 응용하였다. 상세히는, EMC 폐기물을 암모니아 용액과 소니케이터를 활용하여 열과 에너지를 가하는 에칭 과정을 통해 실리카 나노입자를 제조하기 위한 실라놀 전구체를 추출하였다. 이후 실라놀 전구체를 활용하여 졸-겔법을 통해 약 100nm를 나타내는 균일한 구형의 실리카 나노입자(e-SiO₂, experimentally synthesized SiO₂)를 합성하였다. 제조한 e-SiO₂는 물리화학적 분석을 통해 상용화된 실리카 입자(c-SiO₂, commercially SiO₂)와 동일한 형상과 구조를 지니고 있음을 확인할 수 있었다. 최종적으로, e-SiO₂를 연마재로 사용하여 CMP 공정용 슬러리를 제조하여 실제적인 반도체 칩의 연마 성능을 확인하였다. 그 결과, 반도체 칩의 표면에 존재하던 스크래치가 성공적으로 제거되어 매끈한 표면으로 바뀌게 된 것을 확인하였다. 본 연구 결과는 물질의 재활용법에 대한 설계를 통해 EMC 폐기물의 부가가치를 향상시키기 위하여 반도체 공정에서 대표적으로 활용되는 고부가가치 소재인 실리카 입자로 성공적으로 제조하고 이를 응용하는 방법에 대해 제시하였다.