• Korean Journal of Environmental Agriculture
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• v.16 no.4
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• pp.327-332
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• 1997

This study was conducted to find out the effect for removal of $NH_3$ gas, one of the offensive odor. The removal efficiencies of $NH_3$ gas through zeolie column increased with the decreased percolation velocity. The effect of zeolite colum in removing $NH_3$ gas was influenced by the water content of zeolite and the added amount of zeolite, but was not influenced by the setting method of zeolite. The $NH_3$ gas removing sequence of saturated cation species on zeolite was in order of Ca->Na->$NH_4$ ->Natural->K-zeolite. Consequently the effect of zeolite on $NH_3$ gas removal efficiency is consided by the water content, added amount and saturated cation of the zeolite.

• Journal of the Korean Institute of Gas
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• v.26 no.5
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• pp.35-40
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• 2022

PCVD (Plasma Chemical Vapor Deposition), a solar cell manufacturing facility, is a facility that deposits plasma generated in a chamber (NH₃, SIH₄, O₂ on a wafer. In the PCVD facility, gas movement and injection is performed in the gas cabinet, and there are many leak points inside because MFC, regulator, valve, pipe, etc. are intricately connected. In order to prevent explosion in case of leakage of NH₃ with an upper explosive limit (UEL) of 33.6% and a lower explosive limit (LEL) of 15%, the dilution capacity must be capable of allowing the concentration of NH₃ to be out of the explosive range. This study was analyzed using the CFD analysis technique, which can confirm the dilution ability in 3D and numerical values when NH₃ gas leaks from the existing PCVD gas cabinet. As a result, it was concluded that it corresponds to medium dilution and that testicular ventilation is possible through facility improvement.

• Journal of Sensor Science and Technology
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• v.13 no.6
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• pp.424-429
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• 2004

$Cr_{2}O_{3}$ thick films were fabricated by screen printing method on alumina substrates and annealed at $700^{\circ}C$, $800^{\circ}C$, and $900^{\circ}C$ in air, respectively. Structural properties examined by XRD and SEM showed (116) dominant $Cr_{2}O_{3}$ peak and increased grain sizes with the annealing. The resistance of the films decreased with increasing the annealing temperature. Gas sensing characteristics to $NH_{3}$, CO, $C_{4}H_{10}$, and NO gases showed sensitivity only to $NH_{3}$ gas. $Cr_{2}O_{3}$ thick films annealed at $700^{\circ}C$ had the sensitivity of about 15 % for 100 ppm $NH_{3}$ gas at the working temperature of $300^{\circ}C$. The thick films had good selectivity to the $NH_{3}$ gas. The response time to $NH_{3}$ gas was about 10 seconds.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.66 no.2
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• pp.370-378
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• 2017

A fluid model of 2D axis-symmetry based on inductively coupled plasma (ICP) reactor using $N_2/NH_3/SiH_4$ gas mixture has been developed for hydrogenated silicon nitride ($SiN_x:H$) deposition. The model was comprised of 62 species (electron, neutral, ions, and excitation species), 218 chemical reactions, and 45 surface reactions. The pressure (10~40 mTorr) and gas mixture ratio ($N_2$ 80~96 %, $NH_3$ 2~10 %, $SiH_4$ 2~10 %) were considered simulation variables and the input power fixed at 1000 W. Different distributions of electron, ions, and molecules density were observed with pressure. Although ionization rate of $SiH_2{^+}$ is higher than $SiH_3{^+}$ by electron direct reaction with $SiH_4$, the number density of $SiH_3{^+}$ is higher than $SiH_2{^+}$ in over 30 mTorr. Also, number density of $NH^+$ and $NH_4{^+}$ dramatically increased by pressure increase because these species are dominantly generated by gas phase reactions. The change of gas mixture ratio not affected electron density and temperature. With $NH_3$ and $SiH_4$ gases ratio increased, $SiH_x$ and $NH_x$ (except $NH^+$ and $NH_4{^+}$) ions and molecules are linearly increased. Number density of amino-silane molecules ($SiH_x(NH_2)_y$) were detected higher in conditions of high $SiH_x$ and $NH_x$ molecules density.

• Applied Chemistry for Engineering
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• v.25 no.2
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• pp.193-197
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• 2014

The electrode for gas sensor was prepared by using pitch-based activated carbon fibers and polyvinyl alcohol (PVA) to investigate the toxic gas sensing characteristics. The physicochemical properties of activated carbon fibers electrode for gas sensor were analyzed with SEM and BET. Toxic gases sensing property of the electrode was also identified by different toxic gases such as $NH_3$, NO and $CO_2$. The specific surface area of activated carbon fibers electrode for gas sensor was decreased by 33% owing to PVA used as a binder compared with the activated carbon fibers. However, its pore size distribution of the ACF electrode was not greatly influenced by PVA. The activated carbon fibers electrode for gas sensor responded to toxic gases by electron hopping unlike semiconductor based gas sensors. In this study, activated carbon fibers electrode was decreased to 7.5% in resistance for the NH3 gas of the 100 ppm concentration and its $NH_3$ gas sensing property was confirmed the most excellent compared with other toxic gases.

• Proceedings of the Materials Research Society of Korea Conference
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• 1992.05b
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• pp.57-58
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• 1992

The NH$_3$oxidation, which forms thermal oxide layer on silicon substrate with pure $O_2$gas added with small amounts of NH$_3$gas, has good interface sates due to activated gettering effect during oxidation. The superiority of interfae state in NH$_3$ oxidation method is not affected by preprocess but by gettering during oxidation. The dramatec reduction fo interface state is conformed with observing OSF when NH$_3$ oxide is annealed in NH$_3$ atmosphere.

• Journal of Environmental Science International
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• v.9 no.5
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• pp.389-392
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• 2000

In this study a packed tower was selected for the treatment apparatus of $NH_3$ gas produced in industry. Formerly latticework packing has been used in preventive facility of treatment of $NH_3$ gas. However recently metallic Ralu-Pack 250YC. structured packing is usually being used in petrochemical production plant. This study is for the application the packing to the $NH_3$ gas treatment in wet scrubbing process. In Air/water system hydraulic pressure drop dependent of specific liquid load and gas capacity factor was continuous and parallel from graph. The tower height can be determuined by the number of transfer unit and the height of transfer unit influenced on liquid distribution.

• Korean Journal of Organic Agriculture
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• v.8 no.2
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• pp.89-96
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• 2000

To reduce loss of nitrogen and generation of ammonia gas during composting, poultry manure and sawdust were mixed at the equivalent ratio and calcium chloride, fused superphosphate and vermiculite were added. Ammonia and sulfurous gas during composting, and NH4-N and NO3-N contents of composts were periodically measured. With the treatments of 0.5∼3% calcium chloride and 3% fused superphosphate, ammonia and sulfurous gas during composting significantly decreased, and especially generation of gases sharply reduced and a increase of calcium chlorde. Extractable NH4-N content in composts treasted with calcium chloride and fused superphosphate were high but extractable NO3-N markedly decreased. In conclusion, the results suggest that it is necessary the additon of 1∼3% calcium chloride or 3% fused superphosphate to reduce loss of nirogen and generation of offensive odor during composting of poultry manure mixed with sawdust.

• Journal of the Korean Institute of Gas
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• v.26 no.5
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• pp.22-27
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• 2022

Atomic Layer Deposition (ALD) is a facility that deposits an atomic layer on a wafer by causing a chemical reaction after decomposition using heat or plasma by inputting two or more gases during the semiconductor process. The main gas used at this time is NH₃ (Ammonia). NH₃ has a relatively narrow explosive range with an upper limit (UFL) of 33.6% and a lower limit (LEL) of 15%, but it can explode if a large amount suddenly gathers in one place. It is Velocity and fatal if inhaled or in contact with the skin. NH₃ (Ammonia) of ALD (Atomic Layer Deposition) facility is supplied to the chamber through the gas inlet and discharged after the reaction.

• Clean Technology
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• v.13 no.2
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• pp.122-126
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• 2007

When ammonia ($NH_3$) gas was supplied to a biofilter packed with bio-carrier made of waste polyurthane and worm cast. No odor gases were detected at the outlet of the biofilter when $NH_3$ gas was supplied to the biofilter at the space velocity(SV) of $50\;h^{-1}$ until the inlet $NH_3$ concentration increased to $4\;{\sim}\;454\;ppmv$. The gradual inlet $NH_3$ concentration was set and the removal efficiency of $NH_3$ gas was measured at each condition, while the SV of $NH_3$ increased step by step from 100 to $400\;h^{-1}$. The maximum possible inlet $NH_3$ loading was $11.38\;g-NH_3{\cdot}m^{-3}{\cdot}h^{-1}$ and $34.42\;g-NH_3{\cdot}m^{-3}{\cdot}h^{-1}$ while maintaining the removal efficiency of 100% when the SV was $50\;h^{-1}$ and $100 \;h^{-1}$, respectively. The maximum $NH_3$ loading was $71.28 \;g-NH_3{\cdot}m^{-3}{\cdot}h^{-1}$ with the $NH_3$ removal efficiency of 99.85% at SV $300\;h^{-1}$.