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http://dx.doi.org/10.7842/kigas.2022.26.5.35

Analysis of Ventilation Performance of PCVD Facility for Solar Cell Manufacturing (Explosion Prevention Aspect)  

Lee, Seoung-Sam (Dept. of Safety Engineering, Korea national University of Transportation)
An, Hyeong-hwan (Dept. of Safety Engineering, Korea national University of Transportation)
Publication Information
Journal of the Korean Institute of Gas / v.26, no.5, 2022 , pp. 35-40 More about this Journal
Abstract
PCVD (Plasma Chemical Vapor Deposition), a solar cell manufacturing facility, is a facility that deposits plasma generated in a chamber (NH3, SIH4, O2 on a wafer. In the PCVD facility, gas movement and injection is performed in the gas cabinet, and there are many leak points inside because MFC, regulator, valve, pipe, etc. are intricately connected. In order to prevent explosion in case of leakage of NH3 with an upper explosive limit (UEL) of 33.6% and a lower explosive limit (LEL) of 15%, the dilution capacity must be capable of allowing the concentration of NH3 to be out of the explosive range. This study was analyzed using the CFD analysis technique, which can confirm the dilution ability in 3D and numerical values when NH3 gas leaks from the existing PCVD gas cabinet. As a result, it was concluded that it corresponds to medium dilution and that testicular ventilation is possible through facility improvement.
Keywords
PCVD; CFD; explosion range; explosive limits - LEL & UEL; degree of dilution; MFC;
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