• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권5호
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• pp.232-237
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• 2005

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1641-1642
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• 2006

본 연구에서는 NDIR(non dispersive infrared absorption) 가스센서의 소형화와 저가화를 목표로 2개의 오목 거울을 이용한 새로운 광 공동(optical cavity) 구조를 제안하고, 구조에 따른 광 출력 특성을 시뮬레이션하였다. Optical cavity는 광 경로증가 및 광 집속 구조로 설계하고, 각각의 출력단에서 검출되는 광 출력을 시뮬레이션한 결과 광 집속 구조의 팡 출력이 더 효율적임을 확인하였다. 집광구조에서의 광 출력을 최대로 하기 위해 광의 초점을 찾아보았다. 집광 구조를 사용하지 않는 단순 평행 광이 조사되는 경우, 적외선 센서부에 입사되는 광 출력은 최대 0.024W이다. 그러나 집광구조에서는 optical cavity의 광축에서 센서의 위치를 $15\sim20mm$까지 변화시켜 시뮬레이션한 결과 거리 18.83mm 일 때 조사되는 광 출력이 약 0.153W로 약 7배 증가됨을 확인하였다.

• 전자공학회논문지 IE
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• 제45권3호
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• pp.27-35
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• 2008

본 논문은 다중 가스 필터 휠 (multi gas filter correlation wheel: multi GFC wheel)을 갖는 비분산 적외선법(NDIR method : non-dispersive infrared method)을 이용하여 대기 중 다종환경오염물질(CO, $SO_2$, NOx 등)을 동시에 실시간 측정할 수 있는 광학분석장치 개발을 위한 미세신호 검출 알고리즘을 제안한다. MCT(mercury cadmium telluride) 센서를 통해 측정된 각각의 환경오염물질의 미세신호는 고유한 NDIR 흡수 특성을 갖는다. 제안한 방법은 임계값과 하나의 외부 동기신호를 사용하여 연속적으로 측정된 신호로부터 각각의 오염물질 특정농도에 해당하는 데이터를 분리 검출한다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2005년도 춘계학술발표대회 및 제8회 신소재 심포지엄 논문개요집
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• pp.125-125
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• 2005

• 센서학회지
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• 제30권4호
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• pp.250-254
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• 2021

A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 ㎛ and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

• 센서학회지
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• 제27권5호
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• pp.294-299
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• 2018

This article describes the output properties of non-dispersive infrared carbon dioxide($CO_2$) sensors resulting from the changes in ambient temperatures. After the developed sensor module was installed inside the gas chamber, the temperature was set to 267 K, 277 K, 300 K, and 314 K, and the concentrations of $CO_2$ gas were increased from 0 to 5,000 ppm. Then, the output voltage at each concentration was obtained. Through these experimental results, two observations were made. First, both the $CO_2$ sensor and the reference sensor showed an increase in the output voltages as the temperature rose from 0 ppm, Second, the full scale outputs of the $CO_2$ sensor grew as the temperature increased. The output characteristics were analyzed based on two factors: change in the radiant energy of the infrared light source and change in the absorptivity of $CO_2$ gas according to the ambient temperature. Additionally, temperature compensation methods were discussed.

• 센서학회지
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• 제30권6호
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• pp.446-450
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• 2021

Non-dispersive infrared (NDIR) gas sensors typically use an optical filter that transmits a discriminating 4.26 ㎛ wavelength band to measure carbon dioxide (CO2), as CO2 absorbs 4.26 ㎛ infrared. The filter performance depends on the transmittance and full width at half maximum (FWHM). This paper presents the fabrication, sensitivity, and selectivity characteristics of a distributed Bragg reflector (DBR)-based Fabry-Perot filter with a simple structure for CO2 detection. Each Ge and SiO2 films were prepared using the RF magnetron sputtering technique. The transmittance characteristics were measured using Fourier-transform infrared spectroscopy (FT-IR). The fabricated filter had a peak transmittance of 59.1% at 4.26 ㎛ and a FWHM of 158 nm. In addition, sensitivity and selectivity experiments were conducted by mounting the sapphire substrate and the fabricated filter on an NDIR CO2 sensor measurement system. When measuring the sensitivity, the concentration of CO2 was observed in the range of 0-10000 ppm, and the selectivity was measured for environmental gases of 1000 ppm. The fabricated filter showed lower sensitivity to CO2 but showed higher selectivity with other gases.

• 센서학회지
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• 제27권1호
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• pp.47-54
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• 2018

In this paper, we describe the thermal characteristics of the output voltages of ethanol gas sensor according to the amount of radiation incident on the infrared sensors located at each focal point of two elliptical waveguides. In order to verify the output characteristics of the gas sensor according to the amount of incident light on the infrared sensor, two combinations of sensor modules were fabricated. Hydrophobic thin film is deposited on one of the reflectors of sensor modules and one of the two infrared sensors was equipped with a hollow disk (10 Ø), and the temperature characteristics of the infrared sensor equipped with the hollow disk (10 Ø) and the infrared sensor without the disk were tested. The temperature was varied from 253 K to 333 K at 10 K intervals based on 298 K. The properties of ethanol gas sensor have been identified with respect to varying temperature for a range of ethanol concentration from 0 ppm to 500 ppm. In the case of an infrared sensor equipped with a hollow disk (10 Ø), the output voltage of the sensor decreased by 0.8 mV and 1 mV, respectively, as the temperature increased. Conversely, the output voltage of the diskless infrared sensor showed an average increase of 67 mV and 57 mV as the temperature increased. The ethanol concentrations estimated on the basis of results show an error of more than 10 % for less than 100 ppm concentration. However, if the ethanol concentration exceeds 100 ppm, the gas concentration can be estimated within the range of ${\pm}10%$.

• 한국전기전자재료학회논문지
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• 제21권11호
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• pp.1005-1009
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• 2008

A noble infrared $\lambda/4$ absorbing structure using metal reflector was studied for uncooled infrared sensors. This paper described the design and the fabrication of IR uncooled detectors which were composed of 21 by 21 elements using the surface micromachining technology. The characteristics of the array were investigated in the spectral region of 4.26 ${\mu}m$. The fabricated detectors exhibited the thermal mass of $9.75\times10^{-9}$ J/K, the thermal conductance of $1.31\times10^{-6}$ W/K, the thermal time constant of 7.4 ms, the responsivity of $1.07\times10^5$ V/W and the detectivity of $1.04\times10^9$ $cmHz^{1/2}/W$, at the chopper frequency of 10 Hz and the bias current of 9.22${\mu}A$. Finally the absorptance efficiency of $\lambda/4$ absorbing structure was about 23.2 % higher than that of absence absorbing structure.

• 한국가스학회지
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• 제12권4호
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• pp.63-68
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• 2008

본 논문은 적외선 센서의 광 강도 및 효율을 증가시키기 위해 새로운 오목한 반사 벽면(curved mirror surface)과 기존의 수직 반사 벽면(vertical mirror surface)구조와의 모의해석 및 실험 결과에 대해 기술하였다. 모의해석 결과 수직 반사 벽면을 사용했을 때 적외선 센서 필터 표면에 도달하는 광의 분포는 타원 형상으로 적외선 센서 표면에 도달함을 볼 수 있고, 오목한 반사 벽면을 사용하는 경우에는 광이 원형상으로 집광되는 것을 볼 수 있었다. 따라서 초기 평행광의 면적보다 작은 면적으로 집광됨으로 인해 단위면적당 광 강도는 향상되고, 이에 따라 광학적 센서의 출력전압은 향상될 것이라 예측되었다. 이 모의해석을 근간으로 하여 $25^{\circ}C$, 45%R.H.에서 이산화탄소를 0 ppm에서 2500 ppm까지 250 ppm 간격으로 주입시켰을 때, 오목한 반사 벽면의 광 공동이 수직 반사 벽면의 광 공동보다 출력전압이 약 200 mV 증가하였다.