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http://dx.doi.org/10.4313/JKEM.2008.21.11.1005

Fabrications and Characteristics of Infrared Sensor Composed of λ/4 Absorbing Structure for the Application of NDIR CO2 Gas Sensor  

Lee, Sung-Hyun (한양대학교 금속재료공학과)
Nam, Tae-Woon (한양대학교 금속재료공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.21, no.11, 2008 , pp. 1005-1009 More about this Journal
Abstract
A noble infrared $\lambda/4$ absorbing structure using metal reflector was studied for uncooled infrared sensors. This paper described the design and the fabrication of IR uncooled detectors which were composed of 21 by 21 elements using the surface micromachining technology. The characteristics of the array were investigated in the spectral region of 4.26 ${\mu}m$. The fabricated detectors exhibited the thermal mass of $9.75\times10^{-9}$ J/K, the thermal conductance of $1.31\times10^{-6}$ W/K, the thermal time constant of 7.4 ms, the responsivity of $1.07\times10^5$ V/W and the detectivity of $1.04\times10^9$ $cmHz^{1/2}/W$, at the chopper frequency of 10 Hz and the bias current of 9.22${\mu}A$. Finally the absorptance efficiency of $\lambda/4$ absorbing structure was about 23.2 % higher than that of absence absorbing structure.
Keywords
$\lambda/4$ absorbing structure; Micromachining; Microbolometer; Absorptance efficiency;
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