• 센서학회지
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• 제30권6호
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• pp.456-460
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• 2021

In this study, a Non-Dispersive Infrared (NDIR) Carbon Dioxide (CO₂) sensor with an externally exposed optical cavity is proposed for improving sensitivity. NDIR CO₂ sensors with high performance must use a lamp-type infrared (IR) source with a strong IR intensity. However, a lamp-type IR source generates high thermal energy that induces thermal noise, interfering with the accuracy of the CO₂ concentration measure. To solve this problem, the optical cavity of the NDIR CO₂ sensor is exposed to quickly dissipate heat. As a result, the proposed NDIR CO₂ sensor has a shorter warm-up time and a higher sensitivity compared to the conventional NDIR CO₂ sensor.

• 센서학회지
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• 제30권5호
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• pp.331-336
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• 2021

The Non-dispersive Infrared (NDIR) gas sensor has high selectivity, measurement reliability, and long lifespan. Thus, even though the NDIR gas sensor is expensive, it is still widely used for carbon dioxide (CO₂) detection. In this study, to reduce the cost of the NDIR CO₂ gas sensor, we proposed the new optical waveguide structure design based on ready-made gas pipes that can improve the sensitivity by increasing the initial light intensity. The new optical waveguide design is a structure in which a part of the optical waveguide filter is inclined to increase the transmittance of the filter, and a parabolic mirror is installed at the rear end of the filter to focus the infrared rays passing through the filter to the detector. In order to examine the output characteristics of the new optical waveguide structure design, optical simulation was performed for two types of IR-source. As a result, the new optical waveguide structure can improve the sensitivity of the NDIR CO₂ gas sensor by making the infrared rays perpendicular to the filter, increasing the filter transmittance.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1065-1066
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• 2011

• 센서학회지
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• 제30권6호
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• pp.446-450
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• 2021

Non-dispersive infrared (NDIR) gas sensors typically use an optical filter that transmits a discriminating 4.26 ㎛ wavelength band to measure carbon dioxide (CO2), as CO2 absorbs 4.26 ㎛ infrared. The filter performance depends on the transmittance and full width at half maximum (FWHM). This paper presents the fabrication, sensitivity, and selectivity characteristics of a distributed Bragg reflector (DBR)-based Fabry-Perot filter with a simple structure for CO2 detection. Each Ge and SiO2 films were prepared using the RF magnetron sputtering technique. The transmittance characteristics were measured using Fourier-transform infrared spectroscopy (FT-IR). The fabricated filter had a peak transmittance of 59.1% at 4.26 ㎛ and a FWHM of 158 nm. In addition, sensitivity and selectivity experiments were conducted by mounting the sapphire substrate and the fabricated filter on an NDIR CO2 sensor measurement system. When measuring the sensitivity, the concentration of CO2 was observed in the range of 0-10000 ppm, and the selectivity was measured for environmental gases of 1000 ppm. The fabricated filter showed lower sensitivity to CO2 but showed higher selectivity with other gases.

• 전자공학회논문지SC
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• 제46권2호
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• pp.36-40
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• 2009

본 연구에서는 비분산 적외선 방식을 이용한 일산화탄소, 이산화탄소 듀얼 센서 모듈을 실현한다. 비분산 적외선 방식은 가스분자가 특정 파장의 적외선을 흡수하는 특성을 이용하여 가스의 적외선 흡수도를 측정하여 농도로 환산하는 방식이다. 비분산 적외선 방식은 수명이 길고 정밀도가 높아 기존의 접촉식(화학식) 센서에 비해 우수한 특성을 가지고 있다. 중요한 기술은 NDIR의 핵심 부분인 광공동의 설계 기술과 센서의 성능을 최종 결정짓는 농도-온도 교정 기술이다. 현재까지 개발된 광 공동 기술은 CO2센서의 단일 센서 방식이었다. 본 연구에서는 이 기술을 접목한 일산화탄소까지 동시에 측정할 수 있는 광공동기술과 교정기술을 연구 개발하여 하나의 광 공동으로 이산화탄소와 일산화탄소를 동시에 측정 할 수 있는 고기능 센서를 실현하는 것이다.

• 센서학회지
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• 제10권5호
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• pp.279-285
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• 2001

본 논문에서는 동맥혈중 이산화탄소 분압을 실시간으로 추정하는 capnograph 시스템에 상용되는 대부분 NDIR 흡수식(non-dispersive infrared absorption) 광챔버와 신호처리회로를 설계 및 구현하였다. 광챔버 설계시 일반 정상인의 capnogram을 주파수 분석하여 적합한 광쵸핑 주파수를 결정한 뒤, 이에 근거하여 시간응답을 고려한 광챔버를 설계하였으며, 열잡음에 대한 영향을 줄이기 위해 2광원 1센서 방식의 $CO_2$ 농도 신호처리회로를 구현하였다. 구현된 광챔버에 대한 가스배출시간을 조사하였으며 신호처리회로를 외부 온도 변화 실험에 적용한 결과 2광원 1센서 방식이 안정된 출력 신호를 얻을 수 있음을 확인하였고, 실제 사람의 호흡에 대한 실험결과 정상적인 capnogram 형태의 $CO_2$ 농도 변화 곡선을 보였다.

• 센서학회지
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• 제30권4호
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• pp.250-254
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• 2021

A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 ㎛ and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

• 산업기술연구
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• 제32권A호
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• pp.35-38
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• 2012

We present a novel non-dispersive infrared (NDIR) $CO_2$ gas sensor with a light source emitting collimated light. Using this thermopile, we also have successfully developed a small, sensitive NDIR $CO_2$ detector module for accurate air quality monitoring systems in energy-saving building and automotive applications. The novel sample cavity comprising specular reflectors around the light bulb is configured to uniformly emit collimated light into the entrance aperture of the cavity in order to enhance the sensitivity of NDIR $CO_2$ detector.

• 전자공학회논문지 IE
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• 제45권3호
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• pp.27-35
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• 2008

본 논문은 다중 가스 필터 휠 (multi gas filter correlation wheel: multi GFC wheel)을 갖는 비분산 적외선법(NDIR method : non-dispersive infrared method)을 이용하여 대기 중 다종환경오염물질(CO, $SO_2$, NOx 등)을 동시에 실시간 측정할 수 있는 광학분석장치 개발을 위한 미세신호 검출 알고리즘을 제안한다. MCT(mercury cadmium telluride) 센서를 통해 측정된 각각의 환경오염물질의 미세신호는 고유한 NDIR 흡수 특성을 갖는다. 제안한 방법은 임계값과 하나의 외부 동기신호를 사용하여 연속적으로 측정된 신호로부터 각각의 오염물질 특정농도에 해당하는 데이터를 분리 검출한다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1470-1471
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• 2008

We present a front-side micromachined thermopile with high sensitivity in the 3-5${\mu}m$ window, and discuss its application to a novel non-dispersive infrared (NDIR) $CO_2$ gas sensor with a light source emitting collimated light. The micromachined thermopile shows a measured sensitivity of 30 mV/W and a $D^*$ of $0.3{\times}10^8cm^{\surd}Hz/W$. Using this newly fabricated thermopile, we also have successfully developed a small, sensitive NDIR $CO_2$ detector module for accurate air quality monitoring systems in energy-saving building and automotive applications. The novel sample cavity comprising specular reflectors around the light bulb is configured to uniformly emit collimated light into the entrance aperture of the cavity in order to enhance the sensitivity of NDIR $CO_2$ detector.