A Study on Cooling of Piezoelectric Element of Multifunction Equipment for Vacuum Exhaust and Ultrasonic Joining (진공 배기 및 초음파 접합 복합기 진동자 냉각에 관한 연구)
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- Journal of the Korea Academia-Industrial cooperation Society
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- v.13 no.4
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- pp.1511-1517
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- 2012