• Title/Summary/Keyword: N170

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대면적 기판 위에서의 서브마이크로미터 주기와 크기를 갖는 홀 패턴 형성을 위한 포토리소그라피 공정 최적화

  • Kim, Do-Hyeong;Bae, Si-Yeong;Lee, Dong-Seon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.244-245
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    • 2010
  • 최근 광전자 분야에서는 미래 에너지 자원에 대한 관심과 함께 GaN 기반 발광다이오드 및 태양전지 연구가 활발히 진행되고 있다. GaN는 높은 전자 이동도와 높은 포화 속도 등의 광전자 소자에 유리한 특성을 가지고 있으나, 고 인듐 함유량과 막질의 우수한 특성을 동시에 구현하는 것은 매우 어렵다. 이를 극복하기 위한 방법으로써 선택 영역 박막 성장법(Selective Area Growth)은 마스크 패터닝을 통해 제한된 영역에서만 박막을 성장하는 방법으로써 GaN의 막질을 향상 시킬 수 있는 방법으로 주목받고 있다. 본 논문에서는 대면적 기판에서 GaN의 막질 향상뿐만 아니라 고인듐 InGaN 박막 성장을 위하여 서브마이크로미터 주기와 크기를 갖는 홀 패턴을 포토리소그라피 공정 최적화를 통해 구현할 수 있는 방법에 대해 논의한다. 그림. 1은 사파이어 기판 위에 선택 영역 박막 성장법을 이용하여 성장한 n-GaN/활성층/p-GaN의 구조를 나타낸 그림이다. 이를 통하여 서브마이크로미터 스케일의 반극성 InGaN면 위에 높은 인듐 함유량을 가지면서도 우수한 특성을 갖는 박막을 얻을 수 있다. 본 실험을 위하여 사파이어 기판 위에 SiO2를 증착한 후 포토레지스트(AZ5206)을 도포하고 포토리소그라피 공정을 진행하여 2um 크기 및 간격을 갖는 패턴을 형성했다. 그림. 2는 AZ5206에 UV를 조사(5초)하고 현상(23초)한 패턴을 윗면(그림. 2(a))과 $45^{\circ}$ 기울인 면(그림. 2(b)) 에서 본 SEM(Scanning Electron Microscope) 사진이다. 이를 통해 약 2.2um의 홀 패턴이 선명하게 형성 됨을 볼 수 있다. 그 후 수백나노 직경의 홀을 만들기 위해서 리플로우 공정을 수행한다. 그림. 3은 리플로우 온도에 따른 패턴의 홀 모양을 AFM(Atomic Force Microscope)을 이용하여 측정한 표면의 사진이다. 이를 통해 2차원 평면에서 리플로우 온도 및 시간에 따른 변화를 볼 수 있다. 그림.3의 (a)는 리플로우 공정을 진행하기 전 패턴이고, (b)는 $150^{\circ}C$에서 2분, (c)는 $160^{\circ}C$에서 2분 (d)는 $170^{\circ}C$에서 2분 동안 리플로우 공정을 진행한 패턴이다. $150^{\circ}C$$160^{\circ}C$에서는 직경에 큰 변화가 없었고, $160^{\circ}C$에서는 시료별 현상 시간 오차에 따라 홀의 크기가 커지는 경향이 나타났다. 그러나 $170^{\circ}C$에서 2분간 리플로우 한 시료 (그림. 3(d))의 경우는 홀의 직경이 ~970nm 정도로 줄어든 것을 볼 수 있다. 홀의 크기를 보다 명확히 표현하기 위해 그림.3에 대응시켜 단면을 스캔한 그래프가 그림.4에 나타나 있다. 그림.4의 (a) 및 (b)의 경우 포토레지스트의 높이 및 간격이 일정하므로, 리플로우에 의한 영향은 거의 없었다. 그림. 4(c)의 경우 포토레지스트의 높이가 그림.4(a)에 비해 ~25nm 정도 낮은 것으로 볼 때, 과도 현상 및 약간의 리플로우가 나타났을 가능성이 크다. 그림. 4(d)에서는 ~970nm의 홀 크기가 나타나서 본 연구에서 목표로 하는 나노 홀 크기에 가장 가까워짐을 확인할 수 있었다. 따라서, $170^{\circ}C$ 이상의 온도와 2분 이상의 리플로우 시간 조건에서 선택 영역 성장을 위한 나노 홀 마스크의 크기를 제어할 수 있음을 확인하였다.

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Friction, Wear and Scuffing Life of Piston Rings With Several Coating for Low Friction Diesel Enging (다양한 박막을 증착한 디젤 엔진용 피스톤링과 실린더 블록의 마찰 마멸 및 스커핑 수명 평가)

  • Ahn, Tae-Sik;Cho, Dae-Hyun;Oh, Chung-Soon;Lee, Young-Ze
    • Tribology and Lubricants
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    • v.23 no.4
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    • pp.170-174
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    • 2007
  • Wear and scuffing tests were conducted using friction and wear measurement of piston rings and cylinder blocks in low friction diesel engine. The frictional forces, wear amounts and cycles to scuffing in boundary lubricated sliding condition were measured using the reciprocating wear tester. The cylinder blocks were used as reciprocating specimens, and the piston rings with several coatings were used as fixed pin. Several coatings were used such as DLC, TiN, Cr-ceramic and TiAlN in order to improve the tribological characteristics. From the tests wear volume of piston ring surfaces applied various coatings were compared. During the tests coefficients of friction were monitored. Test results showed that DLC coatings showed good tribological properties. TiN and Cr-ceramic coated rings showed good wear resistance properties but produced high friction.

An Electronic Questionnaire Survey Evaluating the Perceived Prevalence and Practices of Lactose Intolerance in 1 to 5 Year Old Children in South East Asia

  • Tan, Michelle Li Nien;Muhardi, Leilani;Osatakul, Seksit;Hegar, Badriul;Vandenplas, Yvan;Ludwig, Thomas;Bindels, Jacques;Van der Beek, Eline M;Quak, Seng Hock
    • Pediatric Gastroenterology, Hepatology & Nutrition
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    • v.21 no.3
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    • pp.170-175
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    • 2018
  • Purpose: Lactose intolerance (LI) is perceived to be frequent in Asia and has been reported to have considerable impact on dietary intake, nutritional status and the quality of life. We aimed to gather information from healthcare professionals on the perceived incidence, diagnosis and management of LI in 1 to 5 year old children in Southeast Asia. Methods: An anonymous electronic survey was sent randomly among healthcare professionals registered in the database of the pediatric societies in Thailand, Indonesia, and Singapore between June and October 2016. Results: In total, 259 health care professionals responded of which 45.5% (n=118) were from Thailand, 37.4% (n=97) from Indonesia and 16.9% (n=44) from Singapore. Of the participants who responded (n=248), primary LI prevalence among children 1 to 3 years of age was estimated to be less than 5% by 56.8%. However, about 18.9% (n=47) answered they did not know/unsure. Regarding secondary LI, 61.6% of respondents (n=153) estimated the prevalence to be less than 15%. But again, 10.8% (n=27) answered they did not know or unsure. Rotavirus gastroenteritis was ranked as the top cause for secondary LI. There was considerable heterogeneity in the diagnostic methods used. The majority of respondents (75%) recommended lactose-free milk to manage primary and secondary LI. Conclusion: More education/training of pediatricians on this topic and further epidemiological studies using a more systematic approach are required.

Performance Test of Double-Bumped Air Foil Bearings (이중범프 공기포일베어링의 성능시험)

  • Kim, Young-Cheol;Lee, Dong-Hyun;Kim, Kyung-Woong
    • Tribology and Lubricants
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    • v.25 no.2
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    • pp.108-113
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    • 2009
  • This paper presents a experimental results for the performance evaluation of a double-bumped air foil bearing. The test results of a double-bumped AFB is compared with a single-bumped AFB at a heavily-loaded condition. The diameter of the test bearing is 50 mm, and the axial length is 50 mm. Nominal clearance of the single-bumped AFB is evaluated as $105{\mu}m$, and that of the double-bumped AFB is as $95{\mu}m$. The test of the AFBs are demonstrated at 3 test mode; the load variation mode, the speed variation mode, and start-stop mode. The single-bumped AFB demonstrated a upward load-carrying capacity of 95 N and a downward load-carrying capacity of 130 N at 20,000 rpm. The double-bumped AFB demonstrated a upward load-carrying capacity of 170 N and a downward load-carrying capacity of 170 N at 20,000 rpm. The single-bumped AFB demonstrated a downward lift-off speed of 16,300 rpm at 105 N. The double-bumped AFB demonstrated a downward lift-off speed of 15,400 rpm at 105 N. The start-stop test of the AFBs assure 5,000 cycle endurance life. The test results are compared with the theoretical calculation results. The test and theorectical results show thata double-bump air foil bearing provides a higher load-carrying capacity, stiffness and damping than a single-bump air foil bearing in a heavily-loaded condition.

Molecular Characterization of 170 New gDNA-SSR Markers for Genetic Diversity in Button Mushroom (Agaricus bisporus)

  • An, Hyejin;Jo, Ick-Hyun;Oh, Youn-Lee;Jang, Kab-Yeul;Kong, Won-Sik;Sung, Jwa-Kyung;So, Yoon-Sup;Chung, Jong-Wook
    • Mycobiology
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    • v.47 no.4
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    • pp.527-532
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    • 2019
  • We designed 170 new simple sequence repeat (SSR) markers based on the whole-genome sequence data of button mushroom (Agaricus bisporus), and selected 121 polymorphic markers. A total of 121 polymorphic markers, the average major allele frequency (MAF) and the average number of alleles (NA) were 0.50 and 5.47, respectively. The average number of genotypes (NG), observed heterozygosity (HO), expected heterozygosity (HE), and polymorphic information content (PIC) were 6.177, 0.227, 0.619, and 0.569, respectively. Pearson's correlation coefficient showed that MAF was negatively correlated with NG (-0.683), NA (-0.600), HO (-0.584), and PIC (-0.941). NG, NA, HO, and PIC were positively correlated with other polymorphic parameters except for MAF. UPGMA clustering showed that 26 A. bisporus accessions were classified into 3 groups, and each accession was differentiated. The 121 SSR markers should facilitate the use of molecular markers in button mushroom breeding and genetic studies.

Time-Resolved Photoluminescence Measurement of Frenkel-type Excitonic Lifetimes in InGaN/GaN Multi-quantum Well Structures

  • Kim, Keun-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.121-125
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    • 2003
  • Time-resolved photoluminescence from InGaN/GaN multi-quantum well structures was investigated for two different shapes of square- and trapezoidal wells grown by metal-organic chemical vapor deposition. To compare to the conventional square well structure with a radiative recombination lifetime of 0.170 nsec, the large value of lifetime of 0.540 nsec from trapezoidal well were found at room temperature. This value is similar to the value for GaN host material indicating no confinement effect of quantum well. Furthermore, the high resolution transmission electron microscopy image provides the In clustering effect in the trapezoidal well structure.

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Time-Resolved Photoluminescence Measurement of Frenkel-type Excitonic Lifetimes in InGaN/GaN Multi-quantum Well Structures

  • Shin, Gwi-Su;Hwang, Sung-Won;Kim, Keun-Joo
    • Transactions on Electrical and Electronic Materials
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    • v.4 no.5
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    • pp.19-23
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    • 2003
  • Time-resolved photoluminescence from InGaN/GaN multi-quantum well structures was investigated for two different shapes of square-and trapezoidal wells grown by metal-organic chemical vapor deposition. To compare to the conventional square well structure with a radiative recombination lifetime of 0.170 nsec, the large value of lifetime of 0.540 nsec from trapezoidal well were found at room temperature. This value is similar to the value for GaN host material indicating no confinement effect of quantum well. Furthermore, the high resolution transmission electron microscopy image provides the In clustering effect in the trapezoidal well structure.

Interventions Using Technologies for Older Adults in Long-term Care Facilities: A Systematic Review (장기요양시설 거주 노인 대상 테크놀로지 활용 중재에 관한 체계적 문헌고찰)

  • Kim, Da Eun;Kim, Hyang;Hyun, Junghee;Lee, Hyojin;Sung, Hyehyun;Bae, Soyoung;Tak, Sunghee H;Park, Yeon-Hwan;Yoon, Ju Young
    • Research in Community and Public Health Nursing
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    • v.29 no.2
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    • pp.170-183
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    • 2018
  • Purpose: Although innovative interventions using technologies have been introduced in long-term care settings, available evidence is still anecdotal. The purpose of this study is to investigate and synthesize the outcomes of interventions using technologies delivered to nursing home residents. Methods: Published clinical trials were identified through PubMed, CINHAL, Cochrane and PsycINFO databases and manually hand-searching. Eligible studies were articles published between 1997-2016 in English or Korean with a randomized controlled trial or quasi-experimental design in which interventions using technologies were delivered to nursing home residents. Results: A total of 20 studies were selected for this review. Types of interventions using technologies were classified into the electronic documentation technology (n=1), the clinical decision support system (n=1), the safety technology (n=1), the health and wellness technology (n=10), and the social connectedness technology (n=7). Overall resident outcomes indicated that interventions using technologies improved behavioral symptoms and psycho-social outcomes, but mixed results were shown in the aspects of physical function, cognitive function, social relationship and quality of service. Conclusion: This review demonstrates that incorporating technologies into nursing home care have positive effects on residents' psycho-social outcomes and behavioral symptoms. To disseminate the effectiveness of interventions using technologies, further research is needed to determine what mechanisms underlying such relationships exist.

Friction Behavior of High Velocity Oxygen Fuel (HVOF) Thermal Spray Coating Layer of Nano WC-Co Powder

  • Cho, T.Y.;Yoon, J.H.;Kim, K.S.;Fang, W.;Joo, Y.K.;Song, K.O.;Youn, S.J.;Hwang, S.Y.;Chun, H.G.
    • Journal of the Korean institute of surface engineering
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    • v.40 no.4
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    • pp.170-174
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    • 2007
  • High Velocity Oxygen Fuel (HVOF) thermal spray coating of nano size WC-Co powder (nWC-Co) has been studied as one of the most promising candidate for the possible replacement of the traditional hard plating in some area which causes environmental and health problems. nWC-Co powder was coated on Inconel 718 substrates by HVOF technique. The optimal coating process obtained from the best surface properties such as hardness and porosity is the process of oxygen flow rate (FR) 38 FMR, hydrogen FR 57 FMR and feed rate 35 g/min at spray distance 6 inch for both surface temperature $25^{\circ}C\;and\;500^{\circ}C$. In coating process a small portion of hard WC decomposes to less hard $W_2C$, W and C at the temperature higher than its decomposition temperature $1,250^{\circ}C$ resulting in hardness decrease and porosity increase. Friction coefficient increases with increasing coating surface temperature from 0.55-0.64 at $25^{\circ}C$ to 0.65-0.76 at $500^{\circ}C$ due to the increase of adhesion between coating and counter sliding surface. Hardness of nWC-Co is higher or comparable to those of other hard coatings, such as $Al_2O_3,\;Cr,\;Cr_2O_3$ and HVOF Tribaloy 400 (T400). This shows that nWC-Co is recommendable for durability improvement coating on machine components such as high speed spindle.

MO Studies on the Conformational Stabilities and the Rotational Barriers about C-N Bond in Amides (Amide류에서 형태안정화와 C-N결합의 회전장벽에 관한 분자궤도론적 연구)

  • Wang Ki Kim;Chang Kook Sohn;Ikchoon Lee
    • Journal of the Korean Chemical Society
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    • v.32 no.3
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    • pp.163-170
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    • 1988
  • The MNDO calculations were performed on the various rotamers of N-methyl formamide, N,N-dimethyl formamide, N-methyl acetamide, and N,N-dimethylacetamide in order to investigate the contribution of the one-electron and the steric effect on their rotational barriers about the C-N bond. Results show that while the conformational stabilities of formamides depend mainly on the one-electron factor, those of acetamides depend mainly on the steric factor. According to results obtained by calculations on the rotational barriers about C-N bond, for N-monosubstituted amides the steric effect is larger in the rotational ground state than in the transition state and for N,N-disubstituted amides the steric effect is larger in the rotational transition state.

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