• Title/Summary/Keyword: N-doping

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Threshold Voltage Control through Layer Doping of Double Gate MOSFETs

  • Joseph, Saji;George, James T.;Mathew, Vincent
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.10 no.3
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    • pp.240-250
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    • 2010
  • Double Gate MOSFETs (DG MOSFETs) with doping in one or two thin layers of an otherwise intrinsic channel are simulated to obtain the transport characteristics, threshold voltage and leakage current. Two different device structures- one with doping on two layers near the top and bottom oxide layers and another with doping on a single layer at the centre- are simulated and the variation of device parameters with a change in doping concentration and doping layer thickness is studied. It is observed that an n-doped layer in the channel reduces the threshold voltage and increases the drive current, when compared with a device of undoped channel. The reduction in the threshold voltage and increase in the drain current are found to increase with the thickness and the level of doping of the layer. The leakage current is larger than that of an undoped channel, but less than that of a uniformly doped channel. For a channel with p-doped layer, the threshold voltage increases with the level of doping and the thickness of the layer, accompanied with a reduction in drain current. The devices with doped middle layers and doped gate layers show almost identical behavior, apart from the slight difference in the drive current. The doping level and the thickness of the layers can be used as a tool to adjust the threshold voltage of the device indicating the possibility of easy fabrication of ICs having FETs of different threshold voltages, and the rest of the channel, being intrinsic having high mobility, serves to maintain high drive current in comparison with a fully doped channel.

플라즈마 도핑 후 급속열처리법을 이용한 n+/p 얕은 접합 형성

  • Do, Seung-U;Seo, Yeong-Ho;Lee, Jae-Seong;Lee, Yong-Hyeon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.50-50
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    • 2009
  • In this paper, the plasma doping is performed on p-type wafers using $PH_3$ gas(10 %) diluted with He gas(90 %). The wafer is placed in the plasma generated with 200 W and a negative DC bias (1 kV) is applied to the substrate for 60 sec under no substrate heating. the flow rate of the diluted $PH_3$ gas and the process pressure are 100 sccm and 10 mTorr, respectively. In order to diffuse and activate the dopant, annealing process such as rapid thermal annealing (RTA) is performed. RTA process is performed either in $N_2$, $O_2$ or $O_2+N_2$ ambient at $900{\sim}950^{\circ}C$ for 10 sec. The sheet resistance is measured using four point probe. The shallow n+/p doping profiles are investigated using secondary ion mass spectromtry (SIMS). The analysis of crystalline defect is also done using transmission electron microscopy (TEM) and double crystal X-ray diffraction (DXRD).

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Anion co-doped Titania for Solar Photocatalytic Degradation of Dyes

  • Lee, Young-Seak;Kim, Sang-Jin;Venkateswaran, P.;Jang, Jeen-Seok;Kim, Hyuk;Kim, Jong-Gyu
    • Carbon letters
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    • v.9 no.2
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    • pp.131-136
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    • 2008
  • In order to investigate the effect of doping C, N, B and F elements on $TiO_2$ for reducing the band gap, the heat treatment of $TiO_2$ was carried out with tetraethylammonium tetrafluoroborate. Through XRD and XPS analysis, the C, N, B and F doped anatase $TiO_2$ was confirmed. According to the increase of temperature during treatment, the particle size was increased due to aggregation of $TiO_2$ with elements (B, C, N and F). To investigate the capacity of photocatalyst for degradation of dye under solar light, the degradation of acridine orange and methylene blue was conducted. The degradation of dyes was carried out successfully under solar light indicating the effect of doping elements (B, C, N and F) on $TiO_2$ for reducing the band gap effectively.

The Effects of Work Function of Metal in Graphene Field-effect Transistors

  • Bae, Giyoon;Park, Wanjun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.382.1-382.1
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    • 2014
  • Graphene field-effect transistors (GFET) is one of candidates for future high speed electronic devices since graphene has unique electronic properties such as high Fermi velocity (vf=10^6 m/s) and carrier mobility ($15,000cm^2/V{\cdot}s$) [1]. Although the contact property between graphene and metals is a crucial element to design high performance electronic devices, it has not been clearly identified. Therefore, we need to understand characteristics of graphene/metal contact in the GFET. Recently, it is theoretically known that graphene on metal can be doped by presence of interface dipole layer induced by charge transfer [2]. It notes that doping type of graphene under metal is determined by difference of work function between graphene and metal. In this study, we present the GFET fabricated by contact metals having high work function (Pt, Ni) for p-doping and low work function (Ta, Cr) for n-doping. The results show that asymmetric conductance depends on work function of metal because the interfacial dipole is locally formed between metal electrodes and graphene. It induces p-n-p or n-p-n junction in the channel of the GFET when gate bias is applied. In addition, we confirm that charge transfer regions are differently affected by gate electric field along gate length.

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Synthesis of Nitrogen-doped Carbon Nanofibers for Oxygen Reduction Reaction (산소환원반응 촉매용 질소 도핑된 탄소나노섬유의 제조)

  • An, Geon-Hyoung;Lee, Eun-Hwan;Ahn, Hyo-Jin
    • Journal of Powder Materials
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    • v.23 no.6
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    • pp.420-425
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    • 2016
  • N-doped carbon nanofibers as catalysts for oxygen-reduction reactions are synthesized using electrospinning and carbonization. Their morphologies, structures, chemical bonding states, and electrochemical performance are characterized. The optimized N-doped carbon nanofibers exhibit graphitization of carbon nanofibers and an increased nitrogen doping as well as a uniform network structure. In particular, the optimized N-doped carbon nanofibers show outstanding catalytic activity for oxygen-reduction reactions, such as a half-wave potential ($E_{1/2}$) of 0.43 V, kinetic limiting current density of $6.2mAcm^{-2}$, electron reduction pathways (n = 3.1), and excellent long-term stability after 2000 cycles, resulting in a lower $E_{1/2}$ potential degradation of 13 mV. The improvement in the electrochemical performance results from the synergistic effect of the graphitization of carbon nanofibers and the increased amount of nitrogen doping.

A Study on Characteristics of column fails in DDI DRAM (DDI DRAM에서의 Column 불량 특성에 관한 연구)

  • Chang, Sung-Keun;Kim, Youn-Jang
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.9 no.6
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    • pp.1581-1584
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    • 2008
  • In dual-polycide-gate structure with butting contact, net doping concentration of polysilicon was decreased due to overlap between $n^+$ and $p^+$ and lateral dopant diffusion in silicide/polysilicon layers. The generation of parasitic Schottky diode in butting contact region is attributed both to the $CoSi_2$-loss due to $CoSi_2$ agglomeration and to the decrease in net doping concentration of polysilicon layer. Parasitic Schottky diode reduces noise margin of sense amplifier in DDI DRAM, which causes column fail. The column fail could be reduced by physical isolation of $n^+/p^+$ polysilicon junction or suppressing $CoSi_2$ agglomeration by using nitrogen implantation into $p^+$ polysilicon before $CoSi_2$ formation.

Design of Chlorine-resistant layer for stable electrode in seawater-based electrochemical devices (해수 기반 전기화학소자의 안정적인 전극을 위한 내염소층 설계)

  • Suyeon Kim;Aye Myint Myat Kyaw;Chaeun Kim;Yewon Jang;Youri Han;Li Oi Lun
    • Journal of the Korean institute of surface engineering
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    • v.57 no.4
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    • pp.325-330
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    • 2024
  • When seawater is used in electrochemical devices, issues arise such as the adsorption of chloride ions blocking the active sites for Oxygen reduction reactions (ORR) in seawater batteries, and the occurrence of Chlorine evolution reactions (ClER) in seawater electrolysis due to chloride anions (Cl-) competing with OH- for catalytic active sites, potentially slowing down Oxygen evolution reactions (OER). Consequently, the performance of components used in seawater battery and seawater electrolysis may deteriorate. Therefore, conventional alloys are often used by coating or plating methods to minimize corrosion, albeit at the cost of reducing electrical conductivity. This study thus designed a corrosion-resistant layer by doping carbon with Nitrogen (N) and Sulfur (S) to maintain electrical conductivity while preventing corrosion. Optimal N,S doping ratios were developed, with corrosion experiments confirming that N,S (10:90) carbon exhibited the best corrosion resistance performance.

Electrical Properties of Single Crystal CdTe by Impurity (불순물에 의한 CdTe단결정의 전기적 특성)

  • 박창엽
    • 전기의세계
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    • v.20 no.2
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    • pp.9-14
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    • 1971
  • N type single crystal CdTe is grown by doping Gallium as 0.01 percent, by using zone melting method. And also p type CdTe is grown by doping Ag, Sb, and Te as 0.01%. Resistivity and Concentration of the n.p type single crystal are measured. And then Li ions are implanted on the n type CdTe by high voltage accellerator with different amount of impurity. Indium is evaporated on the p type in high vacuum condition. These sample are heated so as to make P-N Junction in Argon gas flow. Electrical properties for solar cell are investigated. Photovoltage and current are found to be varyed according to following factor: 1) amount of impurity 2) diffusion thickness 3) temperature and time for making P-N junction. Efficiency of the P-N Junction evaporated Indium is 6.5 when it is heated at 380.deg. C for 15 minutie.

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Properties of N doped ZnO grown by DBD-PLD (DBD-PLD 방법을 이용하여 N 도핑된 ZnO 박막의 특성 조사)

  • Leem, Jae-Hyeon;Kang, Min-Seok;Song, Wong-Won;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.15-16
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    • 2008
  • We have grown N-doped ZnO thin films on sapphire substrate by employing dielectric barrier discharge in pulsed laser deposition (DBD-PLD). DBD guarantees an effective way for massive in-situ generation of N-plasma under the conventional PLD process condition. Low-temperature photoluminescence spectra of the N-doped ZnO film provided near band-edge emission after thermal annealing process. The emission peak was resolved by Gaussian fitting and showed a dominant acceptor-bound exciton peak ($A^0X$) that indicated the successful p-type doping of ZnO with N.

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Substrate Doping Concentration Dependence of Electron Mobility Enhancement in Uniaxial Strained (110)/<110> nMOSFETs

  • Sun, Wookyung;Choi, Sujin;Shin, Hyungsoon
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.5
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    • pp.518-524
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    • 2014
  • The substrate doping concentration dependence of strain-enhanced electron mobility in (110)/<110> nMOSFETs is investigated by using a self-consistent Schr$\ddot{o}$dinger-Poisson solver. The electron mobility model includes Coulomb, phonon, and surface roughness scattering. The calculated results show that, in contrast to (100)/<110> case, the longitudinal tensile strain-induced electron mobility enhancement on the (110)/<110> can be increased at high substrate doping concentration.