• 한국전기전자재료학회논문지
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• 제36권4호
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• pp.362-368
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• 2023

Multilayered actuators using Pb(Mg_1/3Nb_2/3)O₃-Pb(In_1/2Nb_1/2)O₃-PbTiO₃ (PMN-PIN-PT) crystals have demonstrated excellent properties, but are costly and lack mechanical strength. Textured PMN-PIN-PT ceramics exhibit robust mechanical strength and comparable properties to their single crystals form. However, the development of multilayered actuators using textured PMN-PIN-PT ceramics has not been achieved until now. This study presents the development of a multilayered actuator using textured 0.37PMN-0.29PIN-0.34PT ceramics with an Ag_0.9/Pd_0.1 inner electrode, co-fired at 950℃. A random 0.37PMN-0.29PIN-0.34PT ceramics multilayered actuator was also developed for comparison. The multilayered actuator consisted of 9 ceramic layers (36 ㎛ thickness) with an overall actuator thickness of 0.401 mm. The textured and random 0.37PMN-0.29PIN-0.34PT ceramics-based multilayered actuators achieved displacements of 0.61 ㎛ (0.15% strain) and 0.23 ㎛ (0.057% strain) at a low applied peak voltage of 100 V. These results suggest that the developed multilayered actuator using high-performance textured 0.37PMN-0.29PIN-0.34PT ceramics has the potential to replace expensive single crystal-based actuators cost-effectively.

• 전자공학회논문지A
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• 제31A권3호
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• pp.10-18
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• 1994

In this paper, the single round type and the multilayered type actuator using PZT powders were manufactured and their piezoelectric, displacement and time response characteristics were investigated. In the single round type actuator, the piezoelectric coefficient and the displacement increased with sintering temperature. In the multilayered actuator, the piezoelectric coefficient and the displacement increased with the layered number. In ten layered case, the piezoelectric coefficient and the displacement were higher over three times and six times than those of the single round type, respectively. At the voltage applied, the response velocity of the multilayered type was higher over two times than that of the single round type.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.93-94
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• 2010

• 한국전기전자재료학회논문지
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• 제18권3호
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• pp.248-252
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• 2005

The effects of electric field strength and mechanical compressive stress on the displacement of multilayered ceramic actuator, stacked alternatively 0.2 (PbM $n_{1}$3/N $b_{2}$3/ $O_3$)-0.8(PbZ $r_{0.475}$ $Ti_{0.525}$ $O_3$) ceramic thin films and 70Ag-30Pd electrodes were investigated. Because the actuators were designed to stack ceramic layer and electrode layer alternatively, the ceramic-electrode interfaces may act as a resistance to motion of domain wall. so the polarization and strain were affected by the amount of 180$^{\circ}$domain, electric field strength and mechanical compressive stress. Consequently, the change of polarization, displacement with respect to field strength, and mechanical compressive stress were likely to be caused by readiness of the domain wall movement around the ceramic-electrode interfaces.ces.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1993년도 춘계학술대회 논문집
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• pp.15-18
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• 1993

Piezoelectric Actuator and electrostrictive Actuator samples were fabricated using PMN-PT-PZ system ceramics with Barium substitution, and the strain properties of them investigated. The largest Piezoelectric coefficient and electromechanical coupling coefficient were observed at sintering temperature $1250^{\circ}C$, Barium 0.05 mol %. The strain of poled samples is observed twice highly then unpoled ones, and the former showed larger hysteresis in strain then the latter, too. Poled multilayered actuator samples showed considerable strain.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2003년도 추계학술발표대회 논문집
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• pp.167-170
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• 2003

In this paper, the electromechanical displacements of curved actuators using laminated composites are calculated by finite element method to design the optimal configuration of curved actuators. To predict the pre-stress in the device due to the mismatch in coefficients of thermal expansion, the carbon-epoxy and glass- epoxy as well as PZT ceramic is also numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers causes the numbers of degree of freedom to increase, large-scale structural analyses are performed in a cluster system in this study. The curved shape and pre-stress in the actuator are obtained by the cured curvature analysis. The displacement under the piezoelectric force by an applied voltage is also calculated to compare the performance of curved actuator. The thickness of composite is chosen as design factor.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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• pp.162-162
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• 2007

• 한국전기전자재료학회논문지
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• 제36권3호
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• pp.214-225
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• 2023

Piezoelectric actuators, which utilize piezoelectric crystals or ceramics, are commonly used in precision positioning applications, offering high-speed response and precise control. However, the use of low-performance ceramics and expensive single crystals is limiting their versatile use in the actuator market, necessitating the development of both high-performance and cost-effective piezoelectric materials capable of delivering higher forces and displacements. The use of textured Pb (lead)-based piezoelectric ceramics formed by so-called templated grain growth method has been identified as a promising strategy to address the performance and cost issue. This review article provides insights into recent advances in texturing Pb-based piezoelectric ceramics for improved performance in actuation applications. We discussed the relevant issues in detail focusing on current challenges and emerging trends in the textured piezoelectric ceramics for their reliability and performance in actuator applications. We discussed in detail focusing on current challenges and emerging trends of textured piezoelectric ceramics for their reliability and performance in actuator applications. In conclusion, the article provides an outlook on the future direction of textured piezoelectric ceramics in actuator applications, highlighting the potential for further success in this field.

• 한국전기전자재료학회논문지
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• 제18권5호
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• pp.445-449
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• 2005

Aging phenomena of 0.2PMN-0.8PZT multilayered ceramic actuators(MCA) have been investigated at the room temperature. The piezoelectric materials were synthesized as conventional ceramic process, and MCA were fabricatedby tape casting methods. The crystalline structures and lattice parameters were investigated by X-ray diffraction analysis, showing the structure was tetragonal and c/a was about 1.01. And, the effective electromechanical coupling coefficient keff and pseudo-piezoelectric constant $d_{33}$were measured. Variable unipolar electric fields, $2{\sim}4kV/mm$, were applied to MCh to investigate the aging characteristics. After 2 kV/mm unipolar electric field, keff and $d_{33}$ were 0.454 and 4.44 respectively. The measured and simulated values using for aging phenomena analysis, had a good fit to the linear logarithmic stretched exponential law.

• 한국항공우주학회지
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• 제35권4호
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• pp.302-307
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• 2007

본 연구에서는 이온성 폴리머-금속 복합재료 (IPMC) 작동기를 사용한 플랩 밸브 마이크로 펌프의 설계, 제작 및 실험적 특성 규명을 수행하였다. 나피온/실리케이트 층과 나피온/실리카 나노복합재료를 기반으로 한 다층형 IPMC를 마이크로 펌프의 작동층으로 사용하였다. 마이크로 펌프의 핵심 요소인 IPMC 다이아프램의 주위를 유연한 폴리디메틸실옥산(PDMS)을 사용하여 지지하도록 함으로써 상당히 큰 작동 변위를 내도록 설계하였다. 이렇게 개발된 마이크로 펌프의 크기는 $20{\times}20{\times}5$ ${mm}^3$ 이고, 최대 유량은 760 l/min, 최대 배압은 1.5 kPa이었다. 본 연구에서 개발한 마이크로 펌프는 간단하고 효율적인 설계를 수행하여 제작이 용이할 뿐 아니라, 동작 전압이 1-3V라는 장점이 있다.