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http://dx.doi.org/10.5139/JKSAS.2007.35.4.302

Design, fabrication and characterization of a flap valve mircopump using an ionic polymer-metal composite actuator  

Nguyen, Thanh Tung (건국대학교 항공우주공학과 대학원)
Nguyen, Vinh Khanh (건국대학교 신소재공학과)
Yoo, Young-Tai (건국대학교 신소재공학과)
Goo, Nam-Seo (건국대학교 신기술융합학과 지능형 마이크로시스템 전공)
Publication Information
Journal of the Korean Society for Aeronautical & Space Sciences / v.35, no.4, 2007 , pp. 302-307 More about this Journal
Abstract
In this paper, a flap valve micropump with an ionic polymer-metal composite (IPMC) actuator was designed, fabricated, and experimentally characterized. A multilayered IPMC based on Nafion/layered silicate and Nafion/silica nanocomposites was fabricated for the actuation section of the micropump. The IPMC diaphragm, a key element of the mircopump, was designed so that the IPMC actuator was supported by a flexible polydimethylsiloxane (PDMS) structure at its perimeter. This design feature enabled a significantly high displacement of the IPMC diaphragm. The overall size of the micropump is $20{\times}20{\times}5$ ${mm}^3$. Water flow rates of up to 760 ${\mu}l$/min and a maximum backpressure of 1.5 kPa were recorded. A significant advantage of the proposed micropump is its low driven voltage from only 1-3 V. In addition, a simple and effective design, and an ease of manufacturing are other advantages of the present micropump.
Keywords
Micropump; Ionic polymer-metal composite; Micro-electo-mechanical system(MEMS);
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