• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.620-623
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• 2003

Non-linear behaviors of multilayer piezoelectric ceramic actuator (MCA) were investigated under electrical and mechanical stress. DC 100 V bias was applied to the MCA to obtain displacement. Laser vibrometer, which using Doppler effect, was employed to characterize displacement caused by $d_{33}$ mode of MCA. To understand this non-linear behavior of MCA, displacement was measured and compared under different load states. By increasing load, electric field-induced strain and piezoelectric constant($d_{33}$) of MCA was decreased. We attribute this phenomenon to the domain wall motion and depoling of MCA under heavy load.

• Transactions on Electrical and Electronic Materials
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• 제18권3호
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• pp.144-147
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• 2017

In this study, two- and three-layer ceramic piezoelectric actuators were designed and simulated according to SUS316 thickness, actuator width, and mass using ATILA software in order to develop a piezoelectric actuator for haptic application. Numerical modelling based on the finite element method was performed to find the resonance frequencies and modal shapes of the actuator. The resonance frequency was affected by the thickness of the SUS316 plate and mass. On the other hand, the width of the actuator did not have a significant impact. Maximum displacements were generated at the center of a haptic three-layer ceramic piezoelectric actuator. The two-layer ceramic piezoelectric actuator with a mass of 2.6 g was suitable as $16.28{\mu}m$ at 265 Hz for haptic sensation application.

• 한국전기전자재료학회논문지
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• 제13권1호
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• pp.33-38
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• 2000

In this study, multilayer piezoelectric actuators were fabricated with 75 layers by a conventional multi-layer capacitor (MLC) techniques, using 70Ag/30Pd paste as an internal electrode which can be sintered at low temperature and have cost down effect in mass productions. The multilayer piezoelectric actua-tors had no defects such as diffusions of internal electrode to ceramic bodies and shortages of internal electrodes. The multilayer piezoelectric actuators did not show the crack in the ceramics parts and the gapping phenomena in the external eletrodes when Ag paste was used as external electrodes. The multilayer piezoelectric actuators showed a maximum displacement of 4${\mu}{\textrm}{m}$ at 100V dc voltage and kept the maximum displacement constant for 300 seconds. The multilayer piezoelectric actuators showed good matching properties between ceramic bodies and AgPd internal electrodes. We confirmed the possibility of large-scaled production of the multilayer piezoelectric actuators with superior electrical properties and cost down effect using 70Ag/30Pd paste as an internal electrodes.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.104.2-104
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• 2003

• 센서학회지
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• 제15권1호
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.556-560
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• 2002

The rheological characteristics of PNN-PZT ceramics with high electromechanical coupling factor and electricstrictive constant was investigated. Green sheets of piezoelectric PNN-PZT ceramics were made by tape-casting method with controlling the mixing ratio of a dispersant, an organic binder, and a plasticizer. When the dispersant content was 1 wt.%, the slurry showed the best rheological characteristics for tape casting. The amounts of the plasticizer and the binder was simultaneously varied in the ranges of 1.5~18 and 3~9 wt.%, respectively. When both the plasticizer and binder of 6 wt.% mixed in the solution, respectiveley, the highest green density of the sheet was obtained without macrodefects. Multilyered structures of PNN-PZT/Ag-Pd were successfully fabricated using the optimized tape casting condition. The polarization behavior of these actuators seemed to similar to typical electricstrictive polarization behavior. The multilayer ceramic actuator is about $0.6{\times}10^{-3}$ of strain.

• 한국전기전자재료학회논문지
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• 제17권5호
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• 한국전기전자재료학회논문지
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• 제20권11호
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• pp.953-958
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• 2007

In this paper, multilayer actuator structured-ultrasonic nozzle and resonant inverter driving circuit were manufactured, respectively. Its electrical properties were investigated. Multilayer actuator structured ultrasonic nozzle was fabricated using PMN-PNN-PZT ceramics showing excellent piezoelectric characteristics. In order to drive ultrasonic nozzle, resonant PWM inverter was used. The purpose of this study is to find the optimal driving condition of ultrasonic nozzle. Accordingly, electrical and temperature characteristic of multilayer ultrasonic driving system were investigated by experiments as a function of the series resonance inductance. The driving current of ultrasonic nozzle showed the maximum current of 27 mA. Also, the surface temperature of ceramic vibrator showed $44^{\circ}C$ at driving time for 20 min. The ultrasonic nozzle was stably operated in the case of driving for more than 20 min.

• 한국전기전자재료학회논문지
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• 제11권11호
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• pp.963-968
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• 1998

The stress distribution in multilayer piezoelectric ceramic actuators was investigated by Finite element analysis. The y direction stress was concentrated at electrode tip. The y direction maximum stress was decreased to 4.9$\times10^ 7 N/m^2$ with internal electrode gap(a) until 0.4 mm and was not much difference with external electrode thickness(c). The stress distribution with internal layers was almost same and the stress distribution of load condition was higher than that of no load condition The y direction maximum stress increased with the number of layer and saturated at 260 layers. In the case of defective actuator, the stress distribution was disconnected around the defect and larger than that of normal actuator.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.253-256
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• 2003

This study presents the combined effect of electric field application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking alternatively $0.2(PbMn_{1/3}Nb_{2/3}O_3)-0.8(PbZr_{0.475}Ti_{0.525}O_3)$ ceramics and Ag-Pd electrode. The deformation behaviors were thought to be attributed to relative $180^{\circ}$domain quantities which is determined by pre-loaded stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.