• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.7
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• pp.261-266
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• 2001

The flexural vibration of laminated composite beams with active and passive constrained layer damping has been investigated to design a structure with maximum possible damping capacity. The equations of motion are derived fro flexural vibrations of symmetrical,. multi-layer laminated beams. The damping ratio and model damping of the first bending mode are calculated by means of iterative complex eigensolution method. The direct negative velocity feedback control is used for the active constrained layer damping. It is shown that the flexible laminated beam is more effective in the vibration control for both active and passive constrained layer damping. and this paper addresses a design strategy of laminated composite under flexural vibrations with constrained layer damping.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.137-141
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• 2004

In this paper, a thermopneumatic PMDS (polydimethlysiloxane) micropump with nozzle/diffuser elements is presented. The micropump is composed of nozzle/diffuser elements as dynamic valves, an actuator consisting of a circular PDMS diaphragm and a Cr/Au heater on a glass substrate. Four PDMS layers are used for fabrication of an actuator chamber, actuator diaphragm by a spin coating process, spacer layer, and nozzle/diffuser by the SU-8 molding process. The radius and thickness of the actuator diaphragm is 2 mm and 30 ${\mu}{\textrm}{m}$, respectively. The length and the conical angle of the nozzle/diffuser elements are 3.5 mm and 20$^{\circ}$, respectively. The actuator diaphragm is driven by the air cavity pressure variation caused by ohmic heating and natural cooling. The flow rate of the micropump in the frequency domain is measured for various duty cycles of the square wave input voltage. When the square wave input voltage of 5 V DC is applied to the heater, the maximum flow rate of the micropump is 44.6 ${mu}ell$/min at 100 Hz with a duty ratio of 80% under the zero pressure difference.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.11
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• pp.2415-2420
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• 2002

In the present study, a new anchor design was proposed to minimize the initial deflection of micro multi-layer cantilever beam with step-up structure, which is a key component of thin film micro-mirror array. It is important to minimize the initial deflection, caused by residual stress, because it reduces the performance of the actuation. Theoretical and experimental studies were conducted to examine the cause of the initial bending deflection. It was found that the bending deflection at the anchor of the cantilever beam was the primary source of initial deflection. Various anchor designs were proposed and the initial deflections for each design were calculated by finite element analysis. The analysis results were compared with experiments. To reduce the initial deflection a secondary support was added to the conventional structure. The optimal shapes were obtained by simulation and experiment. It was found from the analysis that the ratio or horizontal and vertical dimensions of secondary support was the governing factor, which affected the initial deflection.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2000.04b
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• pp.271-276
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• 2000

Optimal neuro-control algorithm is extended to the control of a multi-degree-of-freedom structure. An active mass driver(AMD) system on the top roof used as a controller. The control signals are made by a multi-layer perceptron(MLP) which is trained by minimizing a sub-optimal performance index. The performance index is a function of both the output responses and the control signals. Structure having nonlinear hysteretic behavior is also trained and controlled by using proposed control algorithm. Bothe the time delay effect and the dynamics of hydraulic actuator are included in the simulation. Example shows that optimal neuro-control algorithm can be applicable to the multi-degree of freedom structures.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.286-290
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• 2000

Optimal neuro-control algorithm is extended to the control of a multi-degree-of-freedom structure. An active mass driver(AMD) system on the top roof is used as an exciter. The control signals are made by a multi-layer perceptron(MLP) which is trained by minimizing a sub-optimal performance index. The performance index is a function of both the output responses and the control signals. Structure having nonlinear hysteretic behavior is also trained and controlled by using proposed control algorithm. In training neuro-controller, emulator neural network is not used. Instead, sensitivity-test data are used. Therefore, only one neural network is used for the control system. Both the time delay effect and the dynamics of hydraulic actuator are included in the simulation. Example shows that optimal neuro-control algorithm can be applicable to the multi-degree of freedom structures.

• Journal of KSNVE
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• v.8 no.6
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• pp.1093-1102
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• 1998

The success of controllability of smart structures depends on the quality of the bonding along the interface between the main structure and the attached sensing and acuating elements. Generally, the analysis procedures neglect the effect of the interfacial bond layer or assume that this bond layer behaves like viscoelastic material. Three different bond layers. two modified epoxy adhesives, and one isocyanate adhesive were prepared for their toughness and moduli. Bond layer of the chosen adhesive provides an almost perfect bonding condition between the composite structure and the PZT while bended significantly like arrow-shape. The perfect bonding condition is tested by considering various material properties of the bond layers. and based on this perfect bonding condition, the effects of the interfacial bond layer on the dynamic behavior and controllability of the test structure is experimentally studied. Once the perfect bonding condition is achieved. dynamic effects of the bond layer itself on the dynamic characteristics of the main structure is negligible. but the contribution of the attached PZT elements on the stiffness of the multi-layered structure becomes significant when the thickness of the bond layer increased.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.762-769
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• 2003

본 연구에서는 적층형 압전소자를 이용하여 초소형 및 슬림형 광디스크 드라이브용 광픽업 구동기를 개발하였다. 최근에 휴대용 정보기기의 급격한 발달로 인해 다양한 형태의 초소형 정보저장기기가 사용되고 있으며 착탈식 형태의 초소형 광디스크를 사용하는 ODD가 개발 중에 있다. 적층 형태의 압전소자와 유연 힌지 형태의 변위 확대기구를 사용하여 구동기의 출력 힘과 허용 변위를 증가시키도록 설계하였다. 압전형 구동기의 동특성을 고려한 모델링과 이론적 해석을 통해 목표 변위와 성능을 만족하도록 설계 변수를 최적화하였고 이를 ANSYS를 이용한 해석과 비교하였다. 상용화된 적층형 압전소자를 이용한 prototype 올 제작하여 실험을 수행하였으며 이론적인 예상 값과 잘 일치함을 보였다. 이와 같은 이론적 해석과 실험 결과를 토대로 높이가 2.5mm이며 15V 에서 $\pm$400$\mu\textrm{m}$의 변위를 갖는 슬림형 및 초소형 ODD에 적합한 압전형 구동기를 설계하였다.

• Journal of Sensor Science and Technology
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• v.12 no.6
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• pp.265-272
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• 2003

This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.4
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• pp.37-42
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• 2001

Active vibration control of laminated composite plates has been carried out to design structure with maximum possible damping capacity, using piezoceramic sensor/actuators and passive constrained-layer damping treatment. The equations of motion are derived for symmetrical, multi-layer laminated plates. The damping ratio(ζ) and modal damping(2ζ$\omega$) of the first bending and torsional modes are calculated by means of iterative complex eigensolution method for both passive and active vibration control. This paper addresses a design strategy of laminated composite plate under structural vibrations.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.10
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• pp.3173-3185
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• 1996

Multi-model vibration control of laminated composites plates for various fiver orientations has been carried out by making use of piezolectric materials(PZT) as sensors and actuators. Cantilever plate is used as a specimen to test multi-modal vibration supression under random exitation. Impulse technique is applied to determine the natural frequency, the damping ratio(.zeta.) and the modal damping(2.zeta..omega.) of the first bending and the trosion modes. Two independent controllers are implemented to control the two modes simultaneously and established digitally on the basis of the direct negative velocity feedback control with collocated sensor/actuator. Experimental results for various fiber orientations and feedback gains are compared with finite element analysis considering stiffnesses and dampings of piezoeletiric sensors, actuators and bonding layer.