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Fabrication of a Thermopneumatic Valveless Micropump with Multi-Stacked PDMS Layers  

Jeong, Ok-Chan (Post-Doctoral Fellow, Center for Promotion of the COE Program, Ritsumeikan University)
Jeong, Dae-Jung (Division of Electronics Engineering, AJOU University)
Yang, Sang-Sik (Division of Electronics Engineering, AJOU University)
Publication Information
KIEE International Transactions on Electrophysics and Applications / v.4C, no.4, 2004 , pp. 137-141 More about this Journal
Abstract
In this paper, a thermopneumatic PMDS (polydimethlysiloxane) micropump with nozzle/diffuser elements is presented. The micropump is composed of nozzle/diffuser elements as dynamic valves, an actuator consisting of a circular PDMS diaphragm and a Cr/Au heater on a glass substrate. Four PDMS layers are used for fabrication of an actuator chamber, actuator diaphragm by a spin coating process, spacer layer, and nozzle/diffuser by the SU-8 molding process. The radius and thickness of the actuator diaphragm is 2 mm and 30 ${\mu}{\textrm}{m}$, respectively. The length and the conical angle of the nozzle/diffuser elements are 3.5 mm and 20$^{\circ}$, respectively. The actuator diaphragm is driven by the air cavity pressure variation caused by ohmic heating and natural cooling. The flow rate of the micropump in the frequency domain is measured for various duty cycles of the square wave input voltage. When the square wave input voltage of 5 V DC is applied to the heater, the maximum flow rate of the micropump is 44.6 ${mu}ell$/min at 100 Hz with a duty ratio of 80% under the zero pressure difference.
Keywords
Flow rate; nozzle/diffuser Thermopneumatic PMDS (polydimethlysiloxane) micropump;
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  • Reference
1 K. H. Kim, 'Fabrication and Test of a microelectromagnetic actuator', Sensors and Actuators A, to be published
2 W. Y. Sim, 'A phase-change type micropump with aluminum flap valves', Journal of Micromechanics and Microengineering, Vol. 13, pp. 286-294, 2003
3 E. H. Yang, 'Fabrication and testing of a pair of bivalvular microvalves composed of p+ silicon diaphragms', Sensors and Actuators A 57, pp. 75-78, 1996
4 H. Jerman 'Electrically-activated, normally-closed diaphragm valves', Journal of Micromechanics and Microengineering, Vol. 4, pp. 210-216, 1994
5 O. C. Jeong, 'Fabrication and test of a thermopneumatic micropump with a corrugated p+diaphragm', Sensors and Actuators A 83, pp. 249255, 2000
6 D. Juncker, 'Soft and Rigid two-level Microfluidic Networks for Patterning Surfaces', Journal of Micromechanics and Microengineering, Vol. 11, pp. 532, 2001
7 L. Yobas, 'A novel integrable microvalve for refreshable Braille display system', Journal of microelectromechanical systems, Vol. 12, No.3, pp. 252-263, 2003   DOI   ScienceOn
8 T. Gerlach, 'Microdiffusers as dynamic passive valves for micropump', Sensors and Actuators A 70, pp. 81-87,1998
9 P. R. Scheeper, 'The Design, Fabrication and Dynamic Testing of Corrugated Silicon Diaphragm', Journal of Microelectromechanical Systems, Vol. 3, pp. 36, 1994
10 A. Y. Fu, 'A microfabricated fluorescence-activated cell sorter', Nature Biotechnol. Vol. 17, pp. 11091111, 1999
11 L. C. Waters, 'Microchip device for cell lysis, multiplex PCR amplification, and electrophoretic sizing', Anal. Chem. Vol. 70, pp. 158-162, 1998.
12 M. Esashi, 'Normally closed microvalve and micropump fabricated on a silicon wafer', Sensors and Actuators, Vol. 20, pp. 163-169, 1989
13 O. C. Jeong, 'Fabrication of a thermopneumatic microactuator with a corrugated p+ diaphragm', Sensors and Actuators A 80, pp. 62-67, 2000
14 D. C. S. Bien 'Fabrication and characterization of a micromachined passive valve', Journal of Micromechanics and Microengineering Vol. 13 pp. 557-562, 2003
15 X. Yang, 'A MEMS thermopneumatic silicone rubber membrane valve', Sensors and Actuators A 64, pp. 101-108,1998
16 A. T. Woolley, 'High-speed DNA genotyping using microfabricated capillary arrary electrophoresis chips', Anal. Chem. Vol. 69, pp. 2181-2186,1997