• Title/Summary/Keyword: Multi-coupled

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Capacitively Coupled Plasma Simulation for Low-k Materials Etching Process Using $H_2/N_2$ gas (저 유전 재료의 에칭 공정을 위한 $H_2/N_2$ 가스를 이용한 Capacitively Coupled Plasma 시뮬레이션)

  • Shon, Chae-Hwa
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.12
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    • pp.601-605
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    • 2006
  • The resistance-capacitance (RC) delay of signals through interconnection materials becomes a big hurdle for high speed operation of semiconductors which contain multi-layer interconnections in smaller scales with higher integration density. Low-k materials are applied to the inter-metal dielectric (IMD) materials in order to overcome the RC delay. Relaxation continuum (RCT) model that includes neutral-species transport model have developed to model the etching process in a capacitively coupled plasma (CCP) device. We present the parametric study of the modeling results of a two-frequency capacitively coupled plasma (2f-CCP) with $N_2/H_2$ gas mixture that is known as promising one for organic low-k materials etching. For the etching of low-k materials by $N_2/H_2$ plasma, N and H atoms have a big influence on the materials. Moreover the distributions of excited neutral species influence the plasma density and profile. We include the neutral transport model as well as plasma one in the calculation. The plasma and neutrals are calculated self-consistently by iterating the simulation of both species till a spatio-temporal steady state profile could be obtained.

Calculation of the coupled free, transverse vibrations of the multi-supported shaft system by transfer matrix method (전달매트릭스법에 의한 다점지지축계의 연성자유횡진동계산에 관한 연구)

  • 안시영;전효중
    • Journal of Advanced Marine Engineering and Technology
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    • v.7 no.1
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    • pp.49-63
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    • 1983
  • Coupled transverse shaft vibrations have become the target of great concern in high powered ships such as container ships. Due to increasing ship's dimensions and high propulsive power, resonance frequencies of the propeller shaft system tend to decrease and can appear in some cases within the operating speed range of engine. In this connection, the coupled free transverse vibrations of shaft system in two planes are theoretically investigated. This shaft system carries a number of discs and is flexibly supported by a number of bearing stiffness are considered for the calculation. Transfer matrix method is applied to calculate the shaft responses in both planes. A digital computer program is developed to calculate the shaft responses of the coupled transverse vibrations in two planes. An experimental model shaft system is made. It is composed of a disc, shafts, ball bearings thrust bearings and flexible bearing supports. The shaft system is excited by an electrical magnet, and shaft vibration responses in two planes are measured with the strain gage system. From these measurements, the natural frequencies of the shaft system in both planes are found out. The developed program is also used to calculate the shaft vibration responses of experimental model shaft system. From the results of these calculations, the natural frequencies of shaft system in two planes are derived. Theoretical predictions of model shaft natural frequencies show good agreements with its esperimental measurements.

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A Study on the Environmental-Based Turning Characteristics of Multi-Purpose Agricultural Robots (다목적 농업 로봇의 농작업 환경 기반 선회 특성 연구)

  • Lee, Ji-Won;Kang, Minsu;Park, Huichang;Cho, Yongjun;Oh, Jangseok;Kim, Min-Gyu;Seo, Kap-Ho;Park, Min-Ro
    • The Journal of Korea Robotics Society
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    • v.16 no.4
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    • pp.319-326
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    • 2021
  • To improve the driving performance and work efficiency of the multi-purpose agricultural robot, this paper conducted a study on the turning and steering characteristics of the robot platform according to the characteristics of the working machine coupled to the multi-purpose agricultural robot considering the agricultural environment. First, the size and characteristics of the developed multi-purpose agricultural robot platform and working machine, and the targeted field farming work environment are analyzed. And based on this analysis, the problems that arise in multi-purpose robots with conventional turning methods are quantitatively presented. And to overcome this problem, an improved turning and steering method for multi-purpose agricultural robots is proposed considering the characteristics of various workstations and the agricultural working environment. Finally, by applying the proposed method, the turning characteristics of the multi-purpose agricultural robot according to the working machine are analyzed and the effectiveness of the proposed method is verified.

Graph Connectivity-free Consensus Algorithm for State-coupled Linear Multi-agent Systems: Adaptive Approach (적응 제어를 이용하여 그래프 연결성을 배제시킨 선형 다개체 시스템의 상태변수 일치 알고리듬)

  • Kim, Ji-Su;Kim, Hong-Keun;Shim, Hyung-Bo;Back, Ju-Hoon
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.7
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    • pp.617-621
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    • 2012
  • This paper studies asymptotic consensus problem for linear multi-agent systems. We propose a distributed state feedback control algorithm for solving the problem under fixed and undirected network communication. In contrast with the conventional algorithms that use global information (e.g., graph connectivity), the proposed algorithm only uses local information from neighbors. The principle for achieving asymptotic consensus is that, for each agent, a distributed update law gradually increases the coupling gain of LQR-type feedback and thus, the overall stability of the multi-agent system is recovered by the gain margin of LQR.

Target Trackings Using x-y Coupled Confidence Region in Multi-target Tracking System (x-y축이 결합된 신뢰구간을 이용한 다중표적 추적시스템의 설계)

  • Lee, Yeon-Seok;Jo, Jang-Lae;Jeon, Chil-hwan
    • Journal of Institute of Control, Robotics and Systems
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    • v.7 no.1
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    • pp.1226-1230
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    • 2001
  • Multi-target tracking systems need to tracking several targets simultaneously. To track a target among the measurements of several targets, data association is needed. In this paper, a method using the cou-pled confidence region of predicted target position is proposed. The proposed method shows good performance in simulations of multi-target tracking systems.

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AC/DC Converter Design of The Korean Type Multi-Propulsion System (한국형 다중추진시스템의 주전력변환기 설계)

  • Jho Jeong-Min;Jung Byung-Su;Cho Heung-Jae;Kim Su-Yong;Sung Ho-Kyung
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.54 no.3
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    • pp.127-133
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    • 2005
  • Korean multi-propulsion system consists of a synchronous alternator driven by a gas turbine driving synchronous alternator coupled to a rectifier - DC link - DC/DC converter and traction system based on modification of the G7 high-speed train. The simulation modules include turbine engine system, alternator, rectifier, DC/DC converter and power management module. Simulation for the multi-propulsion system such as a modular is presented in order to confirm the system stability for loads with uncertain input impedances and control loop speeds. This paper deals with various simulation modules with a specific control loop to help the development of the real lame-scaled system.

Bond graph modeling and multivariable control of maglev system with a combined lift and guidance (편심배치방식 자기부상 시스템의 본드선도 모델링 및 다변수 제어)

  • 박전수;김종식
    • 제어로봇시스템학회:학술대회논문집
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    • 1991.10a
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    • pp.1091-1097
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    • 1991
  • A logical and systematic procedure to derive a mathematical model for magnetically levitation(maglev) systems with a combined lift and guidance is developed by using and graph. First, bond graph is constructed for the energy-feeding system with magnetic leakage flux. And, the overall maglev system in which lift and guidance dynamics are coupled is modeled by using the concept of multi-port field in bond notations. Finally, the LQG/LTR control systems are designed for single-input single-output and for multi-input multi-output maglev systems. In this paper, it has been shown that the bond graph is an excellent method for modeling multi-energy domain systems such as maglev systems and the multivariable control system is required to improve the performance of the maglev system with a combined lift and guidance.

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The Single Step Prediction of Multi-Input Multi-Output System using Chaotic Neural Networks (카오틱 신경망을 이용한 다입력 다출력 시스템의 단일 예측)

  • 장창화;김상희
    • Proceedings of the IEEK Conference
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    • 1999.06a
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    • pp.1041-1044
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    • 1999
  • In This paper, we investigated the single step prediction for output responses of chaotic system with multi Input multi output using chaotic neural networks. Since the systems with chaotic characteristics are coupled between internal parameters, the chaotic neural networks is very suitable for output response prediction of chaotic system. To evaluate the performance of the proposed neural network predictor, we adopt for Lorenz attractor with chaotic responses and compare the results with recurrent neural networks. The results demonstrated superior performance on convergence and computation time than the predictor using recurrent neural networks. And we could also see good predictive capability of chaotic neural network predictor.

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Large Eddy Simulation of a Lifted Methane/Air Flame using FGM-based Multi-Environment PDF Approach (FGM기반 Multi-Environment PDF 모델을 이용한 메탄/공기 부상화염장의 Large Eddy Simulation)

  • Kim, Namsu;Kim, Jaehyun;Kim, Yongmo
    • 한국연소학회:학술대회논문집
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    • 2015.12a
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    • pp.265-266
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    • 2015
  • The multi-environment PDF model coupled with flamelet generated manifolds(FGM) has been developed for a large eddy simulation of turbulent partially premixed lifted flame. This approach has a capability to realistically account for the transport and evolution of probability density function for mixture fraction and progress variable with the manageable computational burden. Using the tabulated chemistry, it is possible to track radical distributions which is important to predict autoignition process with the vitiated coflow environment. Numerical results indicate that the present yields the good agreement with experimental data in terms of mixture fraction, temperature, and species mass fractions.

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Viscoplasticity model stochastic parameter identification: Multi-scale approach and Bayesian inference

  • Nguyen, Cong-Uy;Hoang, Truong-Vinh;Hadzalic, Emina;Dobrilla, Simona;Matthies, Hermann G.;Ibrahimbegovic, Adnan
    • Coupled systems mechanics
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    • v.11 no.5
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    • pp.411-438
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    • 2022
  • In this paper, we present the parameter identification for inelastic and multi-scale problems. First, the theoretical background of several fundamental methods used in the upscaling process is reviewed. Several key definitions including random field, Bayesian theorem, Polynomial chaos expansion (PCE), and Gauss-Markov-Kalman filter are briefly summarized. An illustrative example is given to assimilate fracture energy in a simple inelastic problem with linear hardening and softening phases. Second, the parameter identification using the Gauss-Markov-Kalman filter is employed for a multi-scale problem to identify bulk and shear moduli and other material properties in a macro-scale with the data from a micro-scale as quantities of interest (QoI). The problem can also be viewed as upscaling homogenization.