• 한국정밀공학회지
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• 제16권4호통권97호
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• pp.64-70
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• 1999

A new multi-beam optical system is presented on the grounds of tri-positioning systems in this paper. The system has been developed to improve the data transfer rate for the optical disk system. The actuating system is composed of a tracking and focusing actuating system basically and a newly developed beam rotating actuator. The beam rotating actuator is employed in a multi-beam optical system to trace more than one track simultaneously. The multi-beam optics is established through the optical simulation and several experimental trials. The differential phase tracking method is used in the tracking error signal detection based on the only one beam spot. We also analyze the characteristics of multi-beam optical system. The experimental result shows that the multi-beam positioning system has performance adequate to the multi-beam optical disk system.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집A
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• pp.553-560
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• 2001

Recently, ultrasonic testing simulation has becomes very important in the field of nondestructive evaluation due to its unique capability of providing testing signals without real inspection. The ultrasonic testing simulation requires three elementary models including the transducer beam radiation model, the flaw scattering model, and the reception model. In the present work, we briefly describe an approach to develop the ultrasonic testing model together with its elementary models with the multi-gaussian beam model. Based on this approach, we developed ultrasonic testing simulation program with MATLAB. The performance of the developed program is demonstrated by the predicting of ultrasonic signals from two types of flaws, circulars crack and spheres.

• 반도체디스플레이기술학회지
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• 제6권3호
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• pp.25-33
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• 2007

A computationally efficient and accurate Monte Carlo (MC) simulator of electron beam lithography process, which is named SCNU-EBL, has been developed for semiconductor nanometer pattern design and fabrication. The simulator is composed of a MC simulation model of electron trajectory into solid targets, an Gaussian-beam exposure simulation model, and a development simulation model of photoresist using a string model. Especially for the trajectories of incident electrons into the solid targets, the inner-shell electron scattering of an target atom and its discrete energy loss with an incident electron is efficiently modeled for multi-layer resists and heterogeneous multi-layer targets. The simulator was newly applied to the development profile simulation of ZEP520 positive photoresist for NGL(Next-Generation Lithography). The simulation of ZEP520 for electron-beam nanolithography gave a reasonable agreement with the SEM experiments of ZEP520 photoresist.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.53-56
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• 2002

We have developed a Monte Carlo (MC) simulator for electron beam lithography in multi-layer resists and multi-layer substrates in order to fabricate and develop high-speed PHEMT devices for millimeter- wave applications. For the deposited energy calculation to multi-layer resists by electron beam in MC simulation, we modeled newly for multi-layer resists and heterogeneous multi-layer substrates. Using this model, we simulated T-gate or r-gate fabrication process in PHEMT device and showed our results with SEM observations.

• 한국진공학회지
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• 제12권3호
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• pp.182-192
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• 2003

밀리미터파 대역용 고속 PHEMT 소자 제작 및 개발을 위하여 다층 리지스트 및 다원자 기판 구조에서 전자빔 리소그래피 공정을 분석할 수 있는 새로운 몬테 카를로 시뮬레이션 모델을 개발하였다. 전자빔에 의해 다층 다원자 타겟 기판 구조에 전이되는 에너지를 정확하고 효율적으로 계산하기 위하여 다층 리지스트 및 다층 다원자 기판 구조에서 시뮬레이션 가능하도록 새로이 모델링하였다. 본 논문에서 제안 개발된 모델을 사용하여 PHEMT 소자의 전자빔 리소그래피에 의한 T-게이트 형성 공정을 시뮬레이션하고 SEM측정 결과와 비교 분석하여 타당성을 검증하였다.

• 비파괴검사학회지
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• 제28권6호
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• pp.531-537
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• 2008

One of the fundamental features of time reversal acoustic (TRA) techniques is the ability to focus the propagating ultrasonic beam to a specific point within the test material. Therefore, it is important to understand the focusing properties of a TR device in many applications including nondestructive testing. In this paper, we employ an analytical scheme for the analysis of TR beam focusing in a homogeneous medium. More specifically, a nonparaxial multi-Gaussian beam (NMGB) model is used to simulate the focusing behavior of array transducers composed of multiple rectangular elements. The NMGB model is found to generate accurate beam fields beyond the nonparaxial region. Two different simulation cases are considered here for the focal points specified on and off from the central axis of the array transducer. The simulation results show that the focal spot size increases with increasing focal length and focal angle. Furthermore, the maximum velocity amplitude does not always coincide with the specified focal point. Simulation results for the off-axis focusing cases do demonstrate the accurate steering capability of the TR focusing.

• Advances in nano research
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• 제4권4호
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• pp.251-264
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• 2016

In this paper, a simple and refined nonlocal hyperbolic higher-order beam theory is proposed for bending and vibration response of nanoscale beams. The present formulation incorporates the nonlocal scale parameter which can capture the small scale effect, and it considers both shear deformation and thickness stretching effects by a hyperbolic variation of all displacements across the thickness without employing shear correction factor. The highlight of this formulation is that, in addition to modeling the displacement field with only two unknowns, the thickness stretching effect (${\varepsilon}_z{\neq}0$) is also included in the present model. By utilizing the Hamilton's principle and the nonlocal differential constitutive relations of Eringen, the equations of motion of the nanoscale beam are reformulated. Verification studies demonstrate that the developed theory is not only more accurate than the refined nonlocal beam theory, but also comparable with the higher-order shear deformation theories which contain more number of unknowns. The theoretical formulation proposed herein may serve as a reference for nonlocal theories as applied to the static and dynamic responses of complex-nanobeam-system such as complex carbon nanotube system.

• 한국정밀공학회지
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• 제20권10호
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• pp.199-207
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• 2003

The Timoshenko beam model has been known as the most accurate model for representing beam structures. However, the Timoshenko beam model may give rise to a significant error when it is applied to multi-stepped beam structures. This paper is intended to demonstrate the modeling error of Timoshenko beam based finite element model for multi-stepped beam structures and to suggest a new modeling method to improve the accuracy. A tentative bending spring is introduced into the stepped section to represent the softening effect due to the presence of step. This paper also proposes a finite element modeling method in the light with the tentative bending spring model for the step softening effect. The proposed method rigorously adapts computation results from a commercial finite element code. The validity of the proposed method is demonstrated through a series of simulation and experiment.

• Advances in nano research
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• 제8권4호
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• pp.293-305
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• 2020

In the current research, the free vibrational behavior of the FG nano-beams integrated in the hygro-thermal environment and reposed on the elastic foundation is investigated using a novel integral Timoshenko beam theory (ITBT). The current model has only three variables unknown and requires the introduction of the shear correction factor because her uniformed variation of the shear stress through the thickness. The effective properties of the nano-beam vary according to power-law and symmetric sigmoid distributions. Three models of the hygro-thermal loading are employed. The effect of the small scale effect is considered by using the nonlocal theory of Eringen. The equations of motion of the present model are determined and resolved via Hamilton principle and Navier method, respectively. Several numerical results are presented thereafter to illustrate the accuracy and efficiency of the actual integral Timoshenko beam theory. The effects of the various parameters influencing the vibrational responses of the P-FG and SS-FG nano-beam are also examined and discussed in detail.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 1998년도 춘계학술발표회논문집(2)
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• pp.951-956
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• 1998

The beam extraction system for the KOMAC[1] (Korea Multi-purpose Accelerator Complex) project is to be designed to partially extract H￣ beam at both 100 and 260 MeV This paper describes a simulation study of charge changing extraction with a stripper magnet and a possible design of a H$^{0}$ extractor by utilizing the simulation study The method consists of converting the negative hydrogen (H￣) ion beam from the linac to a chosen intensity (0-100%) of neutral hydrogen (H$^{0}$ ) beam having an acceptable omittance and drifting it directly onto a stripper foil followed by a downstream beamline.