• Title/Summary/Keyword: Mu-Scan

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A Study on Inspection Technology of PDP ITO Defect (PDP ITO 결함 검출기술에 관한 연구)

  • 송준엽;박화영;정연욱;김현종
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.191-195
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    • 2003
  • The formation degree of sustain (ITO pattern) decides quality of PDP (plasma display panel). For this reason. it makes efforts in search defects more than 30 ${\mu}{\textrm}{m}$. Now, the existing inspection process is dependent upon naked eye or SEM equipment in off-line PDP manufacturing process. In this study developed prototype inspection system of PDP ITO glass. This system creates information that detects and sorts kind of defect automatically. Design ed inspection technology adopts line-scan method by slip-beam formation for the minimum of inspection time and image processing algorithm is embodied in detection ability of developed system. Designed algorithm had to make good use of kernel matrix which draws up an approach to geometry. A characteristic of area-shaped defects, as pin hole, substance, protrusion et al, are extracted from blob analysis method. Defects, as open, short, spots, et al, are distinguished by line type inspection algorithm. In experiment results, we could have ensured ability of inspection that can be detected with reliability of up to 95% in about 60 seconds

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Analysis of a processed sample surface using SCM and AFM (공초점현미경과 원자현미경을 이용한 가공된 시료 표면의 형상측정)

  • Bae Han-Sung;Kim Kyeong-Ho;Moon Seong-Wook;Nam Gi-Jung;Kwon Nam-Ic;Kim Jong-Bae
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.4 s.181
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    • pp.52-59
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    • 2006
  • Surface qualities of a micro-processed sample with a pulse laser have been investigated by making use of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140{\times}120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to correctly measure the hight and width of ITO, and scribing depth and width of a wafer with a resolution less than 300nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from the surface is different for each material.

Precision measurement of a laser micro-processing surface using a hybrid type of AFM/SCM (하이브리드형 AFM/SCM을 이용한 레이저 미세 가공 표면 측정)

  • Kim, Jong-Bae;Kim, Kyeong-Ho;Bae, Han-Sung;Nam, Gi-Jung;Lee, Dae-Chul;Seo, Woon-Hak
    • Proceedings of the Korean Society of Laser Processing Conference
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    • 2006.11a
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    • pp.123-127
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    • 2006
  • Hybrid type microscope with a Scanning Confocal Microscope (SCM) and a shear-force Atomic Force Microscope (AFM) is suggested and preliminarily studied. A image of $120{\times}120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a X-axis and Y-axis are 1kHz and 1Hz, respectively. Shear-force AFM is able to correctly measure the hight and width of sample with a resolution 8nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. We have carried out the measurement of total image of a sample by SCM and an exact analysis of each image by shear-force AFM.

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A New SOI LDMOSFET Structure with a Trench in the Drift Region for a PDP Scan Driver IC

  • Son, Won-So;Kim, Sang-Gi;Sohn, Young-Ho;Choi, Sie-Young
    • ETRI Journal
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    • v.26 no.1
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    • pp.7-13
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    • 2004
  • To improve the characteristics of breakdown voltage and specific on-resistance, we propose a new structure for a LDMOSFET for a PDP scan driver IC based on silicon-on-insulator with a trench under the gate in the drift region. The trench reduces the electric field at the silicon surface under the gate edge in the drift region when the concentration of the drift region is high, and thereby increases the breakdown voltage and reduces the specific on-resistance. The breakdown voltage and the specific on-resistance of the fabricated device is 352 V and $18.8 m{\Omega}{\cdot}cm^2$ with a threshold voltage of 1.0 V. The breakdown voltage of the device in the on-state is over 200 V and the saturation current at $V_{gs}=5V$ and $V_{ds}$=20V is 16 mA with a gate width of $150{\mu}m$.

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Maskless etching of the PDP barrier rib using focused laser beam (집속 레이저 빔에 의한 PDP 격벽의 마스크레스 식각)

  • Ahn, Min-Young;Lee, Kyoung-Cheol;Lee, Hong-Kyu;Choi, Hoon-Young;Lee, Cheon
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1849-1851
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    • 1999
  • The PDP(Plasma Display Panel) barrier rib was fabricated by focused $Ar^+$ laser ($\lambda$=514nm) and Nd:YAG($\lambda$=532, 266 nm) laser irradiation. The depth of the etched groove increases with increasing a laser fluence. and decreasing a scan speed. Using the second harmonic of the Nd:YAG laser, the threshold laser fluence was $6.5mJ/cm^2$ for the sample of PDP barrier rib dried at $120^{\circ}C$. The thickness of $150{\mu}m$ of the sample on the glass was etched without any damage on the glass substrate by fluence of $19.5J/cm^2$. The barrier rib sample on hot plate was etched by Nd:YAG laser(532 nm) as increasing a temperature of the sample. In this case, the etch rate was $95{\mu}m/s$, $190{\mu}m/s$ at room temperature, $175^{\circ}C$ respectively.

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The Effects of Doctoring Process in Gravure Off-set Printing on Patterning of Electrodes with Ag Ink (은 잉크를 이용한 그라비아 오프셋의 전극인쇄에서 닥터링 공정의 영향)

  • Choi, Ki Seong;Park, Jin Seok;Song, Chung-Kun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.6
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    • pp.462-467
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    • 2013
  • In this paper, we analyzed the effects of doctoring process on the patterns of Ag ink in gravure off-set printing. The parameters of doctoring process were the angle and the pressure, which was represented by the depth of blade movement to the gravure roll, of doctor blade to the surface of gravure roll, and the angle of patterns engraved on the gravure roll to the doctor blade moving direction. The proper parameters were extracted for the fine patterns and they were 15 mm for the pressure, $60^{\circ}$ for the blade angle. And the angle of patterns with respect to the blade movement should be less than $40^{\circ}$ for the best results. The gravure off-set printing with the above parameters was carried out to print gate electrodes and scan bus lines of OTFT-backplane for e-paper. The line width of $50{\mu}m$ was successfully obtained. The thickness of electrodes was $2.5{\mu}m$ and the surface roughness was $0.65{\mu}m$ and the sheet resistance was $15.8{\Omega}/{\Box}$.

DNA Selective Immobilization on a Microcantilever with Nano-Interdigitated Electrodes (Nano-IDEs) Using Cyclic Voltammetry (맞물린 나노전극을 가지는 마이크로 캔틸레버의 제작 및 순환전압전류방법을 이용한 DNA의 선택적인 고정화)

  • Lee, Jung-A;Lee, Kwang-Cheol
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.6
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    • pp.459-464
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    • 2008
  • We present a novel microcantilever device with nano-interdigitated electrodes (nano-IDEs) and DNA selective immobilization on the nano-IDEs for biosensing applications. Using the nano-IDEs and cyclic voltammetric methods, we have achieved selective immobilization of DNA with submicrometer spatial resolution on a freestanding microcantilever. $70{\sim}500\;nm$-wide gold (Au) nano-IDEs are fabricated on a low-stress SiNx microcantilever with dimensions of $100{\sim}600\;{\mu}m$ in length, and $15{\sim}60\;{\mu}m$ in width, with a $0.5\;{\mu}m$ thickness using electron beam lithography and bulk micromachining. Streptavidin is selectively deposited on one side of the nano-IDEs using cyclic voltammetry at a scan rate of 0.1 V/s with a range of $-0.2{\sim}0.7\;V$ during $1{\sim}5$ cycles. The selective deposition of dsDNA is confirmed by fluorescence microscopy after labeling with YOYO-1 dye.

Magnetic Micro-Deflector for a Microcolumn System (초소형 전자칼럼을 위한 마이크로 자기장 디플렉터 연구)

  • Kim, Young-Chul;Kim, Dae-Wook;Ahn, Seung-Joon;Kim, Ho-Seob;Park, Seong-Soon;Park, Kyoung-Wan;Hwang, Nam-Woo
    • Korean Journal of Optics and Photonics
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    • v.18 no.6
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    • pp.426-431
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    • 2007
  • We have fabricated a magnetic micro-deflector for a microcolumn system and tested its performance by operating it in the low energy region. The micro-deflector is composed of Cu coils around cylindrical cores with $500{\mu}m$ diameter. The diameter of the Cu coil itself is $100{\mu}m$. Two pairs of deflectors designed for a 2-dimensional scan, that is X and Y deflection, are fixed on an insulating plate. The low power performance of a magnetic micro-deflector attached to a microcolumn system has been tested and the magnitude of deflection is measured to be ${\sim}100{\mu}m/A$, which offers the possibility for practical applications of the magnetic micro-deflector.

Effect of $Al^{3+}$ on Labeling Efficiency and Biodistribution of $^{99m}Tc$-MDP ($Al^{3+}$ 존재가 $^{99m}Tc$-MDP의 표지효율과 생체내 분포에 미치는 영향)

  • Chang, Young-Soo;Jeong, Jae-Min;Kim, Young-Ju;Kwark, Cheol-Eun;Lee, Dong-Soo;Chung, June-Key;Lee, Myung-Chul;Koh, Chang-Soon
    • The Korean Journal of Nuclear Medicine
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    • v.30 no.3
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    • pp.361-366
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    • 1996
  • This study was to determine the effect of $Al^{3+}$ in $^{99m}Tc$ eluate from $^{99}Mo-^{99m}Tc$ generator on labeling efficiency and biodistribution of $^{99m}Tc$-MDP. The chromatographic analysis of $^{99m}Tc$-MDP preparations containing $Al^{3+}(0-62.5{\mu}g/ml)$ showed decreased labeling efficiency $^{99m}Tc$ pertechnetate and hydrolyzed reduced $^{99m}Tc$ fraction increased with increasing concentrations of aluminum. However, the chromatography system could not discern between hydrolyzed reduced $^{99m}Tc$ and $^{99m}Tc$ labeled colloid. $^{99m}Tc$-MDP preparations containing aluminum were relatively stable. Chromatographic analysis also confirmed that no significant differences were observed in the radiochemical purity of the filtered and the unfiltered $^{99m}Tc$-MDP preparations containing aluminum by $0.22{\mu}m$ syringe filter. In biodistribution data of ICR-mice, blood and heart uptake were increasing with increasing concentrations of aluminum, because of decreasing labeling efficiency of $^{99m}Tc$-MDP and increasing of $^{99m}Tc$ pertechnetate. However, liver and bone uptake were not significantly increased. In rat images no difference were observed at $5{\mu}g/ml\;Al^{3+}$ compare with at $0{\mu}g/ml\;Al^{3+}$, but at $10{\mu}g/ml\;Al^{3+}$ lumbar uptake was increased. As a practical conclusion, a concentration below $10{\mu}g/ml\;Al^{3+}$($10{\mu}g/ml\;Al^{3+}$ is the maximum allowed in pertechnetate eluate from $^{99}Mo-^{99m}Tc$ generator by USP.) in $^{99m}Tc$-MDP radiopharmaceutical result in low labeling efficiency. Radiochemical purity 90% of $^{99m}Tc$-MDP is the minimum allowed by USP. Therefore, when soft tissue uptake is observed in $^{99m}Tc$-MDP bone scan and labeling efficiency is above 90%, we can expect that $Al^{3+}$ in pertechnetated eluate is not the cause of soft tissue uptake.

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Effect of abutment superimposition process of dental model scanner on final virtual model (치과용 모형 스캐너의 지대치 중첩 과정이 최종 가상 모형에 미치는 영향)

  • Yu, Beom-Young;Son, Keunbada;Lee, Kyu-Bok
    • The Journal of Korean Academy of Prosthodontics
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    • v.57 no.3
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    • pp.203-210
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    • 2019
  • Purpose: The purpose of this study was to verify the effect of the abutment superimposition process on the final virtual model in the scanning process of single and 3-units bridge model using a dental model scanner. Materials and methods: A gypsum model for single and 3-unit bridges was manufactured for evaluating. And working casts with removable dies were made using Pindex system. A dental model scanner (3Shape E1 scanner) was used to obtain CAD reference model (CRM) and CAD test model (CTM). The CRM was scanned without removing after dividing the abutments in the working cast. Then, CTM was scanned with separated from the divided abutments and superimposed on the CRM (n=20). Finally, three-dimensional analysis software (Geomagic control X) was used to analyze the root mean square (RMS) and Mann-Whitney U test was used for statistical analysis (${\alpha}=.05$). Results: The RMS mean abutment for single full crown preparation was $10.93{\mu}m$ and the RMS average abutment for 3 unit bridge preparation was $6.9{\mu}m$. The RMS mean of the two groups showed statistically significant differences (P<.001). In addition, errors of positive and negative of two groups averaged $9.83{\mu}m$, $-6.79{\mu}m$ and 3-units bridge abutment $6.22{\mu}m$, $-3.3{\mu}m$, respectively. The mean values of the errors of positive and negative of two groups were all statistically significantly lower in 3-unit bridge abutments (P<.001). Conclusion: Although the number of abutments increased during the scan process of the working cast with removable dies, the error due to the superimposition of abutments did not increase. There was also a significantly higher error in single abutments, but within the range of clinically acceptable scan accuracy.