• Nanomaterials
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• 제12권24호
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• pp.4457-4467
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• 2022

SiO₂ etching characteristics were investigated in detail. Patterned SiO₂ was etched using radio-frequency capacitively coupled plasma with pulse modulation in a mixture of argon and fluorocarbon gases. Through plasma diagnostic techniques, plasma parameters (radical and electron density, self-bias voltage) were also measured. In this work, we identified an etching process window, where the etching depth is a function of the radical flux. Then, pulse-off time was varied in the two extreme cases: the lowest and the highest radical fluxes. It was observed that increasing pulse-off time resulted in an enhanced etching depth and the reduced etching depth respectively. This opposing trend was attributed to increasing neutral to ion flux ratio by extending pulse-off time within different etching regimes.

• Journal of Advanced Marine Engineering and Technology
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• 제26권4호
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• pp.464-471
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• 2002

Porosity formation in partial penetration welds by high power lasers is a serious problem in industry. There are two main causes that induce porosity formation. One form of porosity is due to gases (e.g. hydrogen, oxygen) dissolving into the weld pool because of the high temperature and then the rapid solidification traps gases as a bubble in the weld metal. The second problem is voids formed by the keyhole collapsing due to unstable keyhole fluid dynamics. The voids that form at the bottom of the keyhole are relatively large and irregular in shape compared to the gas bubbles; this void formation is the primary concern in this paper. The reduction of voids formed by keyhole collapse is achieved by improving the stability of keyhole. Two methods to improve keyhole stability are discussed in this paper: pulse modulation and beam incident angle. Pulse modulation of the laser beam was performed between 100 Hz and 500 Hz to find out the optimum frequency for the keyhole dynamics. The incident beam angle changed the impact angle of the laser beam to the work surface in a range of 0 to 25 degrees. Glycerin in a semi-solidified state is used as a medium for performing the welding because its transparency allows of visualization of the keyhole.

• Current Optics and Photonics
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• 제7권4호
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• pp.398-407
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• 2023

We explored a method to evaluate imaging performance for the optimal assembly of an endoscopic miniature lens and a sensor constituting an imaging module at the distal end of gastrointestinal endoscopy. For the assembly of the imaging module, the image sensor was precisely located at the focal plane when collimated light passed through the endoscopic lens. As another method, the distance between the lens and sensor was adjusted to obtain the highest focus index from images measured the star chart of the International Organization for Standardization (ISO) standard at various positions. We analyzed the slanted-edge modulation transfer function (MTF), corresponding depth of field, and number of line pairs for MTF 50% and 20% at each working distance within the range of 5-100 mm for imaging modules assembled in different ways. Assembly conditions of the imaging module with better MTF performance were defined for each working distance range of 5-30 mm and 30-100 mm, respectively. In addition to the MTF performance, the focus index of each assembled module was also compared. In summary, we examined the performance of imaging modules assembled with different methods within the suggested working distance and tried to establish the optimal assembly protocol.

• Journal of Electrical Engineering and Technology
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• 제9권6호
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• pp.2168-2180
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• 2014

In this paper, a generalized power loss algorithm for multilevel neutral-point clamped (NPC) PWM inverters is presented, which is applicable to any level number of multilevel inverters. In the case of three-level inverters, the conduction loss depends on the MI (modulation index) and the PF (power factor), and the switching loss depends on a switching frequency, turn-on and turn-off energy. However, in the higher level of inverters than the three-level, the loss of semiconductor devices cannot be analyzed by conventional methods. The modulation depth should be considered in addition, to find the different conducting devices depending on the MI. In a case study, the power loss analysis for the three- and five-level NPC inverters has been performed with the proposed algorithm. The validity of the proposed algorithm is verified by simulation for the three-and five-level NPC inverters and experiment for three-level NPC inverter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1076-1079
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• 1997

A new 3D micromachining method, called Hole Area Modulation(HAM), has been introduced and experimentally confirmed its feasibility. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. This method can be applied for machining various kinds of microcavities in various materials. In this paper, a mathematical model for excimer laser micromachining based on HAM and also determination of the optimal laser ablation conditions(width, Hole radius, step size, path, etc.) is completed by employing using Genetic Algorithm(GA).

• 한국공작기계학회논문집
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• 제11권6호
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• pp.17-23
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• 2002

A new 3D micromachining method called Hole Area Modulation(HAM), has been introduced to enhance the current micromachining technology. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. This method can be applied for machining various kinds of microcavities in various materials. In this paper, a machematical model for excimer laser micromachining based on HAM and also determination of optimal laser ablation conditions(width hole radius, step size, path, etc.) is performed by Genetic Algorithm(GA).

• 한국자기공명학회논문지
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• 제6권1호
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• pp.20-37
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• 2002

MnAPSO-34 and Mn-impregnated SAPO-34(Mn-SAPO-34) sample were prepared with various manganese contents and studied by electron spin resonance(ESR) and electron spin echo modulation(ESEM). Electron spin echo modulation analysis of 0.07mo1 ％ Mn(relative to p) in MnAPSO-34 with adsorbed D$_{2}$O shows two deuteriums at 0.26 nm and two at 0.36 nm from Mn. This suggests that two waters hydrate an MnO$_{4}$ configuration with a D-O bond orientation for the waters as expect for a negatively charged site at low manganese content (0.1 mol％), the ESR spectra of MnAPSO-34 and MnH-SAPO-34 exhibit the same parameters(g 2.01 and A 89 G), but the spectra obtained from MnAPSO-34 samples are better resolved. The decomposition temperature of as-synthesized MnAPSO-34 were in the range of 200-600 $^{\circ}C$ of the morpholine which is 12 $^{\circ}C$ higher than that in as-synthesized MnH-SAPO-34. Infrared spectra showed that the position of a band at 3450 $cm^{-1}$ / shifted about 15 $cm^{-1}$ / toward higher energy in MnAPSO-34 versus MnH-SAPO-34. The modulation depth of the two-pulse ESE of MnAPSO-34 with adsorbed D$_{2}$O is deeper than that of MnH-SAPO-34 with adsorbed D$_{2}$O. Three-pulse ESEM of MnAPSO-34 and MnH-SAPO-34 with adsorbed deuterium oxide shows that the local environments of manganese in the hydrated samples are different, suggesting that Mn(II) is framework substituted in MnAPSO-34 since it obviously occupies an extraframework position in MnH-SAPO-34.

• 한국자기공명학회:학술대회논문집
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• 한국자기공명학회 2002년도 International Symposium on Magnetic Resonance
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• pp.80-80
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• 2002

MnPSO-34 and Mn-impregnated SAPO-34 (Mn-SAPO-34) sample were prepared with various manganese contents and studied by electron spin resonance (ESR) and electron spin-echo modulation (ESEM). Electron spin-echo modulation analysis of 0.07mol ％ Mn(relative to p) in MnAPSO-34 with adsorbed D$_2$O shows two deuteriums at 0.25 nm and two at 0.36 nm from Mn. This suggests that two waters hydrate an MnO4 configuration with a D-O bond orientation for the waters as expect for a negatively charged site at low manganese content (0.07 mol％), the ESR spectra of MnAPSO-34 and MnH-SAPO-34 exhibit the same parameters (g 2.02 and A 87 G), but the spectra obtained from MnAPSO-34 samples are better resolved. TGA of as-synthesized MnAPSO-34 shows that the decomposition temperature in the range 200-$600^{\circ}C$ of the morpholine is 12$^{\circ}C$ higher than that in as-synthesized MnH-SAPO-34. Infrared spectra shows that the position of a band at about 15 cm-1 toward higher energy in MnAPSO-34 versus MnH-SAPO-34. The modulation depth of the two-pulse ESE of MnAPSO-34 with absorbed D$_2$O is deeper than that of MnH-SAPO-34 with absorbed D$_2$O. Three-pulse ESEM of MnAPSO-34 and MnH-SAPO-34 with absorbed deuterium oxide shows that the local environments of manganese in the hydrated samples are different, suggesting that Mn(II) is framework substituted in MnAPSO-34 since it obviously occupies an extra-framework position in MnH-SAPO-34

• 한국의학물리학회지:의학물리
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• 제18권4호
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• pp.221-225
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• 2007

움직이는 자기장을 이용한 팬텀 속 선량 변조에 관한 몬테칼로 계산을 수행하였다. 본 연구의 목적은 빔 축을 따라 이동하는 횡 자기장을 이용하여 특정감이 영역에 균일한 선량을 얻는 것이다. 이를 위해 두 가지 구성 즉, 깊이 방향으로 일정한 속도 그리고 점차 감소하는 속도를 가지는 자기장에 대해 깊이 선량율을 구하였다. 연속적 움직임에 대한 근사로서 단계별 이동과 시간인자를 도입하였다. 위치별 정지한 자기장 대한 김이 선량율 자료에 최소제곱법을 적용하여 자기장 위치에 따른 최적의 시간인자를 구하였다. 몬테칼로 계산결과를 통하여 자기장의 속도를 변화시킴으로써 평탄한 선량 분포를 얻을 수 있음을 확인하였다. 이 때 3 T 자기장 세기에 대한 계산결과 평탄 영역의 선량은 자기장이 없을 때에 비해 약 10.1% 증가하는 것으로 나타났다.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.264-268
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• 1990

A guided-wave electro-optic Mach-Zehnder interferometric modulator was fabricated on X-cut LiNbO3 . The channel waveguides were formed by proton diffusion with self-aligned SiO2-cladding. A mach-Zehnder interferometric modulator with arm lengths of 7mm has been fabricated and tested at 0.6328${\mu}{\textrm}{m}$. Its modulation depth with V$\pi$ of only 3.5V was 85% and the 3dB bandwidth was 1.6KHz. For high speed operation, the electrode dimension should be reduced to have smaller R, L, and C.