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Determination of Optimal Excimer Laser Ablation Conditions Using Genetic Algorithm  

배창현 (부산대학교 지능기계공학과 생산자동화실험실)
최경현 (제주대학교 기계공학부)
이석희 (부산대학교 기계공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.11, no.6, 2002 , pp. 17-23 More about this Journal
Abstract
A new 3D micromachining method called Hole Area Modulation(HAM), has been introduced to enhance the current micromachining technology. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. This method can be applied for machining various kinds of microcavities in various materials. In this paper, a machematical model for excimer laser micromachining based on HAM and also determination of optimal laser ablation conditions(width hole radius, step size, path, etc.) is performed by Genetic Algorithm(GA).
Keywords
Excimer laser; Hole Area Modulation(HAM); Simulation; Genetic Algorithum(GA);
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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