Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Determination of Optimal Excimer Laser Ablation Conditions Using Genetic Algorithm

유전자 알고리즘을 이용한 엑시머 레이저가공의 최적조건 선정

  • 배창현 (부산대학교 지능기계공학과 생산자동화실험실) ;
  • 최경현 (제주대학교 기계공학부) ;
  • 이석희 (부산대학교 기계공학부)
  • Published : 2002.12.01
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Abstract

A new 3D micromachining method called Hole Area Modulation(HAM), has been introduced to enhance the current micromachining technology. In this method, information on the depth of machining is converted to the sizes of small holes in the mask. The machining is carried out with a simple 2D movement of the workpiece. This method can be applied for machining various kinds of microcavities in various materials. In this paper, a machematical model for excimer laser micromachining based on HAM and also determination of optimal laser ablation conditions(width hole radius, step size, path, etc.) is performed by Genetic Algorithm(GA).

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References

  1. Part of the SPIE Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing Ⅳ v.3618 Excimer laser Micromachining : A 15 year perspective M.C. Gower https://doi.org/10.1117/12.352688
  2. Journal of Applied Physics v.71 A Computer simulation method for studying the ablation of polymer surface by ultraviolet laser rediation H.Gai;G.A. Voth https://doi.org/10.1063/1.351263
  3. Proceedings of the 2nd Korean MEMS Conference 레이저 어블레이션을 이용한 준삼차원 미소형상 가공 모델링 방세윤;신귀성;윤경구;황경현
  4. Optics & Laser Technology v.33 Simulation study and experiment on laser-ablation surface cleaning X. Zhou;K. Imasaki;H. Furukawa https://doi.org/10.1016/S0030-3992(01)00016-0
  5. Part of the Symposium on Design, Test, and Microfabrication of MEMS and MOEMS SPIE v.3680 Production of novel 3D microstructures using excimer laser mask projection techniques N.H. Rizvi https://doi.org/10.1117/12.341245
  6. Journal of Applied Physics v.86 Eximer laser ablation of Microstructures-A numerical model C. Paterson;A.S. Holmes;R.W. Smith https://doi.org/10.1063/1.371816
  7. 2001년 추계정밀학회 논문집 엑시머 레이저를 이용한 3차원 마이크로가공 최경현;배창현;이석희;Masuzawa
  8. 2000년 춘계한국공작기계학회 논문집 반경오차 보정을 위한 최적파라미터 튜닝 김민석;정성종