Fabrication of Mach-Zehnder Interferometric Modulator Using Proton-Diffused Channel Waveguide

양자확산 LiNbO$_3$ 광도파로를 이용한 Mach-Zehnder 간섭계 구조의 광변조기 제작

A guided-wave electro-optic Mach-Zehnder interferometric modulator was fabricated on X-cut LiNbO3 . The channel waveguides were formed by proton diffusion with self-aligned SiO2-cladding. A mach-Zehnder interferometric modulator with arm lengths of 7mm has been fabricated and tested at 0.6328${\mu}{\textrm}{m}$. Its modulation depth with V$\pi$ of only 3.5V was 85% and the 3dB bandwidth was 1.6KHz. For high speed operation, the electrode dimension should be reduced to have smaller R, L, and C.