• Title/Summary/Keyword: MoSi

검색결과 934건 처리시간 0.03초

열적으로 강인한 Molybdenium 게이트-PMOS Capacitor의 분석 (Analysis of PMOS Capacitor with Thermally Robust Molybdenium Gate)

  • 이정민;서현상;홍신남
    • 한국전기전자재료학회논문지
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    • 제18권7호
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    • pp.594-599
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    • 2005
  • In this paper, we report the properties of Mo metal employed as PMOS gate electrode. Mo on $SiO_2$ was observed to be stable up to $900^{\circ}C$ by analyzing the Interface with XRD. C-V measurement was performed on the fabricated MOS capacitor with Mo Bate on $SiO_2$. The stability of EOT and work-function was verified by comparing the C-V curves measured before and after annealing at 600, 700, 800, and $900^{\circ}C$. C-V hysteresis curve was performed to identify the effect of fired charge. Gate-injection and substrate-injection of carrier were performed to study the characteristics of $Mo-SiO_2$ and $SiO_2-Si$ interface. Sheet resistance of Mo metal gate obtained from 4-point probe was less than $10\;\Omega\Box$ that was much lower than that of polysilicon.

AlGaN/GaN-on-Si Power FET with Mo/Au Gate

  • Kim, Hyun-Seop;Jang, Won-Ho;Han, Sang-Woo;Kim, Hyungtak;Cho, Chun-Hyung;Oh, Jungwoo;Cha, Ho-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제17권2호
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    • pp.204-209
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    • 2017
  • We have investigated a Mo/Au gate scheme for use in AlGaN/GaN-on-Si HFETs. AlGaN/GaN-on-Si HFETs were fabricated with Ni/Au or Mo/Au gates and their electrical characteristics were compared after thermal stress tests. While insignificant difference was observed in DC characteristics, the Mo/Au gate device exhibited lower on-resistance with superior pulsed characteristics in comparison with the Ni/Au gate device.

급랭응고한 Al-Fe 합금계 리본을 고온에 노출시킴에 따른 미세석출물의 성장거동 (Coarsening Behavior of Fine Precipitates in Rapidly Quenched Al-Fe Based Alloy Ribbons by In-situ Heat Treatment)

  • 백남익
    • 한국주조공학회지
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    • 제15권3호
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    • pp.252-261
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    • 1995
  • The purposes of this study were to investigate the microstructural changes in alloy ribbons of Al-Fe-Mo-Si quarternary system at $450{\sim}500^{\circ}C$, and to study the coarsening mechanism of fine precipitates. Using the hot stage in TEM, in situ microstructural changes in Al-4Fe-0.5Mo-1.5Si alloy ribbon and Al-8Fe-2Mo-1.5Si alloy ribbon have been examined successively up to 60 hours at $450^{\circ}C$ and $500^{\circ}C$. Cell structure in zone B of Al-4Fe-0.5Mo-1.5Si alloy ribbon was observed to collapse even in 10 minutes by in-situ heating at $450^{\circ}C$ and the size of precipitates in zone B increased twice in 60 hours. The precipitates in zone A of Al-4Fe-0.5Mo-1.5Si alloy ribbon showed slower coarsening rate than those in zone B by in-situ heating at $450^{\circ}C$. The precipitates in zone A of Al-8Fe-2Mo-1.5Si alloy ribbon increased 50% by in-situ heating at $500^{\circ}C$ in 50 hours compared to the initial precipitates while any microstructual change in zone B was not observed by in-situ heating at $500^{\circ}C$ up to 50 hours. Only the precipitates in zone A of Al-4Fe-0.5Mo-1.5Si alloy ribbon satisfied $r^3{\propto}t$ relationship of coarsening mechanism.

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$Fe_{68.5}Co_5M_3Cu_1Si_{13.5}B_9(M=Nb, Mo, Mn, Cr)$계 초미세결정립합금의 결정립 크기에 따른 자기적 특성의 변화 (Grain Size Dependence of Soft Magnetic Properties in $Fe_{68.5}Co_5M_3Cu_1Si_{13.5}B_9(M=Nb, Mo, Mn, Cr)$ Nanocrystalline Alloys )

  • 조용수;김택기
    • 한국자기학회지
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    • 제1권2호
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    • pp.37-41
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    • 1991
  • 초급냉법중 단롤법으로 제작한 비정질 Fe/sub 68.5/Co/sub 5/M/sub 3/Cu/sub 1/Si/sub 13.5/ B/sub 9/(M=Nb, Mo, Mn, Cr)계 합금을 결정화온도 이상의 온도에서 열처리하여 결정화 시킨 후, 결정립 크 기에 따른 항자력, 투자율 및 교류자기이력손실을 조사 하였다. Fe/sub 68.5/Co/sub 5/M/sub 3/Cu/sub 1/ Si/sub 13.5/B/sub 9/(M=Nb, Mo, Mn, Cr)합금중 M=Mo, Nb조성에서 초미세결정립이 형성되며 약 10nm의 결정립 크기에서 가장 우수한 연자기적 특성을 나타낸다. 그러나 결정립의 크기가 10nm보다 작거나 16nm이 상 커지면 연자기 특성이 열화된다. 결정립크기가 10nm이하에서 연자기특성이 열화되는 것은 결정화 초기 결 정립계에 존재하는 것으로 판단되는 Fe rich 비정질상에 의한 것으로 고찰된다.

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MODELING OF INTERACTION LAYER GROWTH BETWEEN U-Mo PARTICLES AND AN Al MATRIX

  • Kim, Yeon Soo;Hofman, G.L.;Ryu, Ho Jin;Park, Jong Man;Robinson, A.B.;Wachs, D.M.
    • Nuclear Engineering and Technology
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    • 제45권7호
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    • pp.827-838
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    • 2013
  • Interaction layer growth between U-Mo alloy fuel particles and Al in a dispersion fuel is a concern due to the volume expansion and other unfavorable irradiation behavior of the interaction product. To reduce interaction layer (IL) growth, a small amount of Si is added to the Al. As a result, IL growth is affected by the Si content in the Al matrix. In order to predict IL growth during fabrication and irradiation, empirical models were developed. For IL growth prediction during fabrication and any follow-on heating process before irradiation, out-of-pile heating test data were used to develop kinetic correlations. Two out-of-pile correlations, one for the pure Al matrix and the other for the Al matrix with Si addition, respectively, were developed, which are Arrhenius equations that include temperature and time. For IL growth predictions during irradiation, the out-of-pile correlations were modified to include a fission-rate term to consider fission enhanced diffusion, and multiplication factors to incorporate the Si addition effect and the effect of the Mo content. The in-pile correlation is applicable for a pure Al matrix and an Al matrix with the Si content up to 8 wt%, for fuel temperatures up to $200^{\circ}C$, and for Mo content in the range of 6 - 10wt%. In order to cover these ranges, in-pile data were included in modeling from various tests, such as the US RERTR-4, -5, -6, -7 and -9 tests and Korea's KOMO-4 test, that were designed to systematically examine the effects of the fission rate, temperature, Si content in Al matrix, and Mo content in U-Mo particles. A model converting the IL thickness to the IL volume fraction in the meat was also developed.

첨가제 변화에 따른 $MoSi_2$ 고온발열체의 전기적 특성 (A Study on Electrical $MoSi_2$ High Temperature Heating Elements by Additives)

  • 이후인;한상옥;구경완
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1405-1407
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    • 2001
  • It was studied to prepare high temperature heating elements using molybdenum disilicide($MoSi_2$). Molybdenum disilicide is widely used as material for manufacturing high temperature heating elements. $MoSi_2$ heating elements could be used at 1700-1900$^{\circ}C$. However, it is relatively expensive, and its demand depends on import. $MoSi_2$ powders was mixed with 4-5wt% of montmorillonites type bentonite as plasticizer and a small amount of $Si_3N_4$, $ThO_2$, and B as additives to prepare specimen of heating elements. Then, it was extruded, dried, sintered and machined followed by heating test. Effects of sintering conditions and amount of additives were investigated, It was sintered effectively at 1,350$^{\circ}C$ for five hours. Electrical resistivity was decreased with increasing of sintering temperature and time, and related with apparent density of the specimens. It was linealy decreased with increasing of sintered density. The heating elements thus prepared was stable at 1700$^{\circ}C$ and the physical properties such as specific electrical resistivity, hardness, apparent density, thermal expansion coefficient, and bending strength were almost identical with those of commercial heating elements.

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In-Process합성에 의한 고기능 금속간화합물의 복합성형 (Complex Forming of the High-Functional Intermetallic Compound by the In Process Synthesis)

  • 한정현;박성갑;박용호
    • 한국분말재료학회지
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    • 제13권6호
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    • pp.408-414
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    • 2006
  • [ $MoSi_2$ ] alloys with Al, B or Nb were prepared by an advanced consolidation process that combined mechanical alloying with pulse discharge sintering (complex forming) to improve the mechanical properties. Their microstructure and mechanical properties were investigated. The $MoSi_2$ alloys fabricated by complex forming method showed very fine microstructure when compared with the sample sintered from commercial $MoSi_2$ powders. Alloys made from powders milled in Ar gas had fewer silica or alumina phases as compared to their counterparts sintered from powders milled in air. In densification of the sintered body, addition of B was more effective than Al or Nb. Both Victors hardness and tensile test indicated that the alloy fabricated by the complex forming method showed better properties than the sample sintered from commercial $MoSi_2$ powders. The Al added alloy sintered from the powders milled in air had the superior mechanical properties due to the suppression of $SiO_2$ and formation of fine $Al_2O_3$ particles.

확산코팅기법에 의하여 Si 코팅된 TZM 합금의 산화시 코팅층의 확산거동

  • 김민호;김태완;박준식;김정민;이성
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 추계학술발표대회
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    • pp.40.1-40.1
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    • 2011
  • TZM합금은 융점이 높은 Mo 기지에 미세한 (Zr,Ti)C의 석출물이 분산되어 있어 고온에서 다양한 부품에 응용가능하다. 하지만, TZM합금이 대기중 고온에 노출될 경우, 초기 산화물이며 약 $600^{\circ}C$부터 기화가 시작되는 $MoO_3$상이 형성됨으로써 물성에 치명적인 영향을 미친다. 이러한 산화거동을 막기 위하여 표면보호 코팅을 필요로 한다. 본 연구에서는 복잡한 형상과 대량생산이 가능하며 표면 코팅층과 모재의 접합성이 가장 강하다고 알려진 확산코팅법을 이용하여 Si을 TZM 합금에 코팅하였으며, 코팅층의 형성 속도론을 이해하기 위하여 온도별 및 시간별로 코팅을 수행하여 시간과 온도에 따른 코팅층의 형성 기구를 고찰하고자 하였다. Si의 확산코팅결과, $MoSi_2$층은 $1350^{\circ}C$에서 산화시에 두께가 감소하였으며, $Mo_5Si_3$상은 두께가 성장하였다. 코팅층의 확산거동을 속도론적 분석을 통하여 규명하고 논의하고자 한다.

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