• 제목/요약/키워드: Mo electrode

검색결과 236건 처리시간 0.023초

정전분무증착법에 의한 중온형 고체산화물 연료전지를 위한 Sm0.5Sr0.5CoO3 양극막의 제조 (Fabrication of Sm0.5Sr0.5CoO3 cathode films for intermediate temperature SOFCs by electrostatic spray deposition)

  • 박인유;임종모;정영글;신동욱
    • 한국결정성장학회지
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    • 제20권2호
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    • pp.69-73
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    • 2010
  • 정전분무증착 기술에 의해 증착된 고체산화물 연료전지(SOFC) 양극재료인 SSC 양극막의 미세구조적 변화에 대해 연구하였다. Samarium chloride hexahydrate$(SmCl_3{\cdot}6H_2O)$, strontium chloride hexahydrate$(Co(No_3)_2{\cdot}6H_2O)$, cobalt nitrate hexahydrate$(Co(No_3)_2{\cdot}6H_2O)$의 출발 물질과 용매로써 메탄올이 전구체 용액을 제조하는데 사용되었다. SOFC의 양극을 위해 적합한 다공성의 SSC 막을 제조하였으며, 그 미세구조가 증착시간, 기판온도, 인가전압 등과 같은 공정변수들에 의존한다는 것을 관찰하였다. 주사전자현미경과 X-ray 회절 패턴이 미세구조와 결정성 분석을 위해 사용되었다. 본 연구를 통해, ESD 기술이 요구하는 상의 합성과 다공성의 미세구조를 갖는 SOFC의 양극막을 제조하는데 효과적인 방법임을 입증하였다.

TBM 현장에서 전기비저항 탐사의 적용성에 관한 연구 (A Study on Applicability of Electrical Resistivity Survey in Mechanized Tunnelling Job-sites)

  • 이강현;박진호;박지호;이인모
    • 한국지반환경공학회 논문집
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    • 제19권3호
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    • pp.35-45
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    • 2018
  • 터널을 굴착할 때 터널 막장 전방의 지반 상태를 예측하는 것은 중요하다. 따라서 국내외에서 TBM 현장에 적용 가능한 터널 막장 전방의 지반조건을 예측할 수 있는 기법에 대한 다양한 연구가 수행되었다. 본 연구에서는 TBM 현장에서 적용되는 막장전방 예측기법에 대한 사례를 조사하였다. TBM 현장에서 필요한 막장전방 예측기법과 탐사심도에 대한 요구사항을 결정하기 위하여 10년 경력 이상의 TBM 오퍼레이터들을 대상으로 설문조사를 수행하였다. 설문조사 결과를 바탕으로 TBM 현장에 적용 가능한 막장전방 예측기법들을 제안하였다. 그중 TBM 현장에 적용 가능한 막장전방 예측기법 중 한 가지는 커터헤드에 위치한 디스크 커터를 전극으로 이용하여 전기비저항 탐사를 수행하는 것이다. 따라서 본 연구에서는 TBM 현장에서 전기비저항 탐사를 통한 막장전방 예측기법의 적용성을 평가하기 위해 실내 시험을 수행하였다. 그 결과, TBM 직경의 0.3배까지 막장 전방의 지반상태를 예측할 수 있는 것으로 나타났다.

New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition

  • Jung, Eun Ae;Han, Jeong Hwan;Park, Bo Keun;Jeon, Dong Ju;Kim, Chang Gyoun;Chung, Taek-Mo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.363-363
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    • 2014
  • Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

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고체전해질형 연료전지용 Pr1-xMxMnO3(M-Ca, Sr) 산소극 재료의 특성 (Characteristics of Pr1-xMxMnO3(M=Ca, Sr) as a Cathode Material of Solid Oxide Fuel Cell)

  • 임형렬;정순기;이주성
    • 공업화학
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    • 제7권6호
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    • pp.1125-1131
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    • 1996
  • 고체전해질형 연료전지의 산소극 재료로서 페롭스카이트 구조를 갖는 $PrMnO_3$에 Ca과 Sr을 도핑시켜 도핑량에 따른 전기전도도, 산소환원과전압 등의 전기화학적 특성과, 전해질인 yttria stabilized zirconia와의 반응성 그리고 열 팽창률 등을 살펴 보았다. 합성된 페롭스카이트 분말은 대략 $2{\sim}5{\mu}m$의 평균입자 크기를 나타내었는데 이때 입자크기 및 비표면적은 도핑량과 무관하였다. Ca이 30mo1% 도핑되었을 때 전기전도도는 $1000^{\circ}C$에서 $266S{\cdot}cm^{-1}$로 가장 높은 값을 나타내었고, 분극을 통해 살펴 본 산소환원특성도 Ca이 30mol% 도핑되었을 때 가장 우수한 특성을 나타내었다. 전극물질과 전해질인 YSZ를 $1200^{\circ}C$에서 100시간 동안 반응시킨 결과 $PrMnO_3$에 Sr을 도핑시켰을 때보다 Ca을 도핑시킨 것이 반응성이 훨씬 약한 결과를 나타내었다. $Pr_{0.7}Ca_{0.3}MnO_3$의 열팽창계수는 $300{\sim}1000^{\circ}C$의 영역에서 $1.19{\times}10^{-5}K^{-1}$로 측정되었고 이 값은 YSZ의 열팽창계수 $1.15{\times}10^{-5}K^{-1}$과 유사한 값이었다.

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Synthesis of Binuclear Bismacrocyclic Iron(II) Complex by the Aerobic Oxidation of Iron(II) Complex of 1,4,8,11-Tetraazacyclotetradecane

  • Myunghyun Paik Suh;Gee-Yeon Kong;Il-Soon Kim
    • Bulletin of the Korean Chemical Society
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    • 제14권4호
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    • pp.439-444
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    • 1993
  • The aerobic oxidation of the Fe(II) complex of 1,4,8,11-tetraazacyclotetradecane, [Fe(cyclam)$(CH_3CN)_2](ClO_4)_2$, in MeCN in the presence of a few drops of $HClO_4$ leads to low spin Fe(III) species [Fe(cyclam)$(CH_3CN)_2](ClO_4)_3$. The Fe(III) cyclam complex is further oxidized in the air in the presence of a trace of water to produce the deep green binuclear bismacrocyclic Fe(II) complex $[Fe_2(C_{20}H_{36}N_8)(CH_3CN)_4](ClO_4)_4{\cdot}2CH_3CN$. The Fe(II) ions of the complex are six-coordinated and the bismacrocyclic ligand is extensively unsaturated. $[Fe_2(C_{20}H_{36}N_8)(CH_3CN)_4](ClO_4)_4{\cdot}2CH_3CN$ crystallizes in the monoclinic space group $P2_1/n$ with a= 13.099 (1) ${\AA}$, b= 10.930 (1) ${\AA}$, c= 17.859 (1) ${\AA}$, ${\beta}$= 95.315 $(7)^{\circ}$, and Z= 2. The structure was solved by heavy atom methods and refined anisotropically to R values of R= 0.0633 and $R_w$= 0.0702 for 1819 observed reflections with F > $4{\sigma}$ (F) measured with Mo K${\alpha}$ radiation on a CAD-4 diffractometer. The two macrocyclic units are coupled through the bridgehead carbons of ${\beta}$-diimitie moieties by a double bond. The double bonds in each macrocycle unit are localized. The average bond distances of $Fe(II)-N_{imine}$, $Fe(II)-N_{amine}$, and $Fe(II)-N_{MeCN}$ are 1.890 (5), 2.001 (5), and 1.925 (6) ${\AA}$, respectively. The complex is diamagnetic, containing two low spin Fe(II) ions in the molecule. The complex shows extremely intense charge transfer band in the near infrared at 868 nm with ${\varepsilon}$= 25,000 $M^{-1}cm^{-1}$. The complex shows a one-electron oxidation wave at +0.83 volts and two one-electron reduction waves at -0.43 and-0.72 volts vs. Ag/AgCl reference electrode. The complex reacts with carbon monoxide in $MeNO_2$ to form carbonyl adducts, whose $v_{CO}$ value (2010 $cm^{-1}$) indicates the ${\pi}$-accepting property of the present bismacrocyclic ligand.

다층 소결메쉬 확산체를 이용한 알칼라인 수전해 셀 (Multi-Layered Sintered Porous Transport Layers in Alkaline Water Electrolysis)

  • 염상호;윤영화;최승욱;권지희;이세찬;이재훈;이창수;김민중;김상경;엄석기;김창희;조원철;조현석
    • 한국수소및신에너지학회논문집
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    • 제32권6호
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    • pp.442-454
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    • 2021
  • The porous transport layer (PTL) is essential to effectively remove oxygen and hydrogen gas from the electrode surface at high current density operation conditions. In this study, the effect of PTL with different characteristics such as pore size, pore gradient, interfacial coating was investigated by multi-layered sintered mesh. A water electrolysis single cell of active area of the 34.56 cm2 was constructed, and IV performance and impedance analysis were conducted in the range of 0 to 2.0 A/cm2. It was confirmed that the multi-layered sintered mesh PTL, which have an average pore size of 25 to 57 ㎛ and a larger pore gradient, removed bubbles effectively and thus seemed to improve IV performance. Also, it was confirmed that the catalytic metals such as Ni, NiMo coating on the PTL reduced activation overpotential, but increased mass transport overpotential.