• 한국정밀공학회지
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• 제19권2호
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• pp.187-194
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• 2002

For the fine grinding process development of semiconductor monocrystalline silicon, wheel rotational speed, chuck rotational speed, feed rate and hysteresis force were controlled. Magic mirror system was used for grinding wheel pattern analysis. Curvature of wheel pattern was measured by fitting equation. The modeling of surface wheel pattern was related to wheel and chuck rotational speed. The calculated curvature of the model was well matched with the measured curvature. The statistical analysis indicated wheel and chuck rotational speed were significantly effective on.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.435-440
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• 2000

In this study, we aims to develop the machining technology for the ultra precision surface and profile accuracy. For this purpose, we construct the electrolytic in process grinding system (ELID grinding) and apply to the cylindrical and internal grinding. Through the various machining experiments such as SCM steel., ceramics, tungsten carbide etc., we have obtained nanometer surface roughness. And we have applied this mirror grinding technique to hydraulic manual valve and mold core of mini disk optical pick-up base. For the development of fine mechanical part machining technology, e have made multi fiber optical connector using fine grinding technology. And constructed micro drilling system with process monitoring system which is possible to drill 50${\mu}{\textrm}{m}$ diameter hole.

• 한국정밀공학회지
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• 제20권7호
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• pp.56-62
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• 2003

The precision fabrication of glass is increasingly demanded for the latest industrial applications of spherical lenses, micro-optical components, and so on. In many cases, the surface roughness of glass is required to be minute for improving the optical characteristics. In this paper, machining characteristics of SF-5 glass and quarts glass are studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with air spindle was used for the experiments. Mitutoyo surface tester and AFM were also used to measure the grinded surface of glass. As the results of experiments, they showed that the surface roughness (Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 m using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.

• 한국광학회지
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• 제24권6호
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• pp.331-337
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• 2013

대형 광학 거울은 연삭, 연마, 최종연마의 단계를 거쳐 가공된다. 이 가운데 가장 진행이 빠르고 가공량이 많은 연삭 단계에서 정밀하고 신속한 측정이 가능하다면 가공 공정의 효율성을 높일 수 있다. 그런데 연삭 단계의 광학면은 거칠고 광택이 없기 때문에 빛을 이용한 측정이 매우 어렵다. 따라서 간섭계를 사용할 수 없으며 기계적인 방법을 이용하여 면을 측정해야 한다. 레이저트래커는 이동이 가능한 3차원 좌표 측정기로, 이를 이용한 측정 방법이나 데이터 분석을 연구하면 연삭 단계의 광학 거울을 정밀하게 측정할 수 있다. 본 논문에서는 레이저트래커를 이용하여 직경 1 m의 구면 거울의 형상오차를 측정하고, 이 측정 결과를 간섭계로 측정한 것과 비교하였다. 레이저트래커를 이용한 측정법은 형상오차 rms $0.2{\mu}m$, PV $2.7{\mu}m$의 측정 결과를 얻는 것으로 파악되어 연삭 단계 광학면의 정밀한 측정이 가능할 것으로 보인다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.205-208
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• 2005

Fabrication of large scaled mirror for the telescope application is the most challenging technology in recent year. Sophisticate technologies and know-how in fabrication and measurement are required to overcome the technological obstacles. KRISS(Korea Research Institute for Standards and Science) is now developing a large scaled mirror fabrication facility and KARI(Korea Aerospace Research Institute) is supporting the development. High precision interferometric test is required during the grinding and polishing of mirror to identify the surface profile precisely. The required fabrication accuracy of the mirror surface profile is $\lambda$/50 ms($\sim$10 nm for visible wave length). Thus the measurement accuracy should be far less than 10 m. To get this requirement, it is necessary to provide vibration free environment for the interferometer system and mirror under test. Thus the vibration responses on the mirror supporting table due to external vibration should be minimized by using a special isolation system. And the responses on the top of the tower, which hold the interferometer during test, should be minimized simultaneously. In this paper, we propose the concept design of vibration suppression system for the KRISS mirror fabrication facility.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 춘계학술대회 논문집
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• pp.1-8
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• 1995

This paper proposed a simple method for measuring surface roughness of ground surface. utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens a detecting unit with polygon mirror and CCD array sensor. and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultanilusly monitor the state of the grind wheel. The experimental results, showed that the increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min. the feed rate is 0.2m/min-0.9m/min, the dressing speed is 0.2mm/rev-0.4mm/rev, the stylus method and the in-process method can be obtained the same results. thus under limited working conditions. using the proposed system. the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

• 천문학회보
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• 제39권2호
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• pp.103-103
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• 2014

Manufacturing of lens and mirror using Diamond Turning Machine (DTM) offers distinct advantages including short fabrication time and low cost as compared to grinding or polishing process. However, the DTM process can leave mid-frequency error in the optical surface which generates an undesirable diffraction effect and stray light. The mid-frequency error is expected to be eliminated by mechanical polishing after the DTM process, but polishing of soft surface of ductile aluminum is extremely difficult because the polishing process inevitably degrades the surface form accuracy. In order to increase its surface hardness, we performed electroless nickel plating on the surface of diamond-turned aluminum (Al-6061T6) off-axis mirrors, which was followed by the 6-hour-long baking process at $200^{\circ}C$ for improving its hardness. Then we polished the nickel plated off-axis mirrors to remove the mid-frequency error and measured polished mirror surfaces using the optical surface profilometer (NT 2000, Wyko Inc.). Finally, we ascertained that the mid-frequency error on the mirror surface was successfully removed. During the whole processes of nickel plating and polishing, we monitored the form accuracy using the ultra-high accurate 3-D profilometer (UA3P, Panasonic Corp.) to maintain it within the allowable tolerance range (< tens of nm). The polished off-axis mirror was optically tested using a visible laser source and a pinhole, and the airy pattern obtained from the polished mirror was compared with the unpolished case to check the influence of mid-frequency error on optical images.

• 한국기계가공학회지
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• 제7권3호
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• pp.41-46
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• 2008

Generally optical components are fabricated by grinding, lapping and polishing processes. Those processes take long time to obtain optical high surface quality. In the case of large optical components, the on-machine measurement is strongly recommended because the workpiece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm mechanism which can be used for on-machine measurement of a surface profile with a sensing probe end-effect, and also for grinding or lapping the surface with a corresponding tool. The measuring accuracy and uncertainty using a swing arm type profilometer have been studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $5{\mu}m$. Those inspection data are provided for correcting the residual figuring error in next processes.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 춘계학술대회 논문집
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• pp.108-113
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• 1993

The material for the machine tool structure should have high static stiffiness and damping in its property to improve both the static and dynamic performances. The static stiffness of a machine tool can be inceased by using either higher modulus material in the structure of a machine tool. However, the machine tool structrue with high stiffness but low damping is vulnerable to vibration at the resonance frequencies of the structure . For the high precision and highsped machine tool structure, therefore, the high damping capacity is most important in order to suppress vibration. The damping of a machine tool can not be increased by increasing the static stiffness. The best way to increase the damping capacity of the machine tool structure is to use a composite material which is composed of on material with high stiffness with low damping and another material with low stiffness with high damping. Therefore, in this paper, the bed of the ultra high precision grinding machine for mirror surface machining of brittle materials such as ceramics and composite materials was designed and manufactured with the epoxy concrete material. The epoxy concrete material was prepared by mixing epoxy resin with different size sands and gravels. The modulus, compressive strength, coefficient of thermal expansion, specific heat, and damping factor were measured by varying the compaction ratio, sizes and contents of the ingredients to assess the effect of the processing parameters on the mechanical properties of the material. Based of the measured properties, the prototype epoxy resin concrete bed for the mirror surface CNC grinding machine was designed and manufactured.

• 한국정밀공학회지
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• 제29권12호
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• pp.1285-1289
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• 2012

This study has been focused on application of ELID lapping process for mirror-surface machining of sapphire wafer. Sapphire wafer is a superior material with optic properties of high performance as light transmission, thermal conductivity, hardness and so on. High effective surface machining technology is necessary to use sapphire as various usages. The interval ELID lapping process has been set up for lapping of the sapphire material. According to the ELID lapping experimental results, it shows that 12.5 kg of load for lapping is most pertinent to ELID lapping. the surface of sapphire can be eliminated by metal bonded wheel with micron abrasives and the surface roughness of 60 nmRa can be gotten using grinding wheel of 2,000 mesh in 4.5 um, depth of cut. In this study, the chemical experiments after ELID grinding also has been conducted to check chemical reaction between workpiece and grinding wheel on ELID grinding process. It shows that the chemical reaction has not happened as the results of the chemical experiments.