• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.970-976
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• 1997

The ultra-precision machining is widely used for final machining process of precision parts, so in this study, mirror surface finishing systems using the micro abrasive film, one of ultra-precision machining method, have to examine mirror surface characteristics of the cylindrical workpiece(SM45) such as surface roughness, workpiece removal and evaluated under the condition varing film feed rate, applied pressure, grinding speed after fixing other condition. It was found that varrious machining condition have significant influences on workpiece removal, surface roughness.

• 대한기계학회논문집
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• 제14권6호
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• pp.1515-1522
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• 1990

본 연구에서는 천연다이아몬드의 인선형상을 R형과 S형으로 구분하여 제작하 고 미세이송과 절삭속도 변화를 주어 이에 얻어지는 표현거칠기, 칩 생성기구 및 경면 성을 검토하였다.

• 비파괴검사학회지
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• 제33권2호
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• pp.154-159
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• 2013

본 논문은 마운트의 형상 정밀도와 볼트의 체결력에 따라 마운트에 고정되는 반사경에 발생되는 응력과 변형량에 대해 연구하였다. 일반적인 반사광학계에 사용되는 고정밀 반사경은 볼트나 접착제로 마운트에 조립되는데 이러한 경우 볼트의 체결력과 접착제의 접착력으로 인해 발생하는 장력이 반사경면을 뒤틀리게 한다. 또한 반사경과 마운트를 조립한 후 반사경에 접촉되는 마운트의 표면 형상 정밀도에 따라 반사경면이 뒤틀려서 형상 정밀도가 변한다. 본 논문에서는 유한요소법을 이용한 구조 해석을 통해 반사경과 접촉되는 마운트의 형상 정밀도와 볼트의 체결력에 의해 고정밀 반사경의 반사경면에 발생되는 응력분포와 뒤틀림 변형량에 대해 연구하였다.

• Journal of Astronomy and Space Sciences
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• 제31권4호
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• pp.341-346
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• 2014

A prototype of the GMT FSM has been developed to acquire and to enhance the key technology - mirror fabrication and tip-tilt actuation. The ellipsoidal off-axis mirror has been designed, analyzed, and fabricated from light-weighting to grinding, polishing, and figuring of the mirror surface. The mirror was tested by using an interferometer together with CGHs, which revealed the surface error of 13.7 nm rms in the diameter of 1030 mm. The SCOTS test was employed to independently validate the test results. It measured the surface error to be 17.4 nm rms in the diameter of 1010 mm. Both tests show the optical surface of the FSMP mirror within the required value of 20 nm rms surface error.

• 한국세라믹학회지
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• 제47권4호
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• 한국공작기계학회논문집
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• 제11권5호
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• pp.58-64
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some finding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipment with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6 nm in Ra.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.946-949
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• 2001

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of the grinding wheel in the in-feed machining method. In this study, some grinding experiments by the rotary surface grinding machine with straight type wheels were conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametral silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpiece are varied, and grinding machine used in this experiment is rotary type surface grinding m/c equipped with an ELID unit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2~6nm in Ra.

• 정보저장시스템학회논문집
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• 제1권2호
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• pp.182-187
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• 2005

A large area micro mirror is an optical element that functions as changing an optical path by reflection in integrated optical system. We fabricated the large area silicon mirror by anisotropic etching using MEMS for implementation of integrated optical pickup. In this work, we report the optimum conditions to better fabricate and design, greatly improve mirror surface quality. To obtain mirror surface of $45^{\circ},\;9.74^{\circ}$ off-axis silicon wafer from (100) plane was used in etching condition of $80^{\circ}C$ with 40wt.% KOH solution. After wet etching, polishing process by MR fluid was applied to mirror surface for reduction of roughness. In the next step, after polymer coating on the polished Si wafer, the Si mirror was fabricated by UV curing using a trapezoid bar-type way structure. Finally, we obtained peak to valley roughness about 50 nm in large area of $mm^2$ and it is applicable to optical pickup using blu-ray wavelength as well as infrared wavelength.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1522-1526
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• 2005

In this study, the fabrication of large area silicon mirror is accomplished by anisotropic etching using MEMS for implementation of integrated optical pickup and the process condition is also established for improving the mirror surface roughness. Until now, few results have been reported about the production of highly stepped $9.74^{\circ}$ off-axis-cut silicon wafer using wet etching. In addition rough surface of the mirror is achieved in case of long etching time. Hence a novel method called magnetorheolocal finishing is introduced to enhancing the surface quality of the mirror plane. Finally, areal peak to valley surface roughness of mirror plane is reduced about 100nm in large area of $mm^2$ and it is applicable to optical pickup using infrared wavelength.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.397-401
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• 2003

In this work, diamond turning process is used to produce mirror surface on a Al cone. The Al cone as used as a mirror which can reflect a laser beam without scattering and, hence, it is critical to minimize the surface roughness of a Al cone. During diamond turning, feedrate and tool nose radius are changed to investigate characteristics of the ultra precision machined surface of a Al cone. A laser beam of 633 nm is applied to examine the effect of surface roughness on the characteristics of reflectivity. It is found that surface roughness is not significantly affected by feedrate. The main factor influencing surface roughness is tool nose radius. The line patterns of reflected laser beams show that the minimum surface roughness of 0.08 $\mu\textrm{m}$ (Ra) is required to avoid scattering phenomena of reflectivity.