• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.199-199
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• 2009

Recently, polymeric microlens arrays have become important elements in many applications. Microlens arrays have been used to enhance luminance efficiency and luminance power efficiency of light-emitting diodes (LEDs) and organic LEDs. Many processes for fabrication of microlens array are studied. Though the MLA has been fabricated by electroformed mold, LIGA process and reflow method, these methods were required masks, multiple process steps and post processing. In this paper, we proposed rapid and direct UV laser direct fabrication process using colorless liquid photopolymer, NOA60 for polarization activated microlens. The microlens arrays are formed on the NOA60 on glass, after the focused laser energy was irradiated to the material. The diameter of MLA was varied from 42 to 88 ${\mu}m$, and the height from 0.9 to 1.6 ${\mu}m$. The MLA fabricated using NOA60 shows more then 85% transmittance as well as good hardness for optical module.

• 한국산업융합학회 논문집
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• 제26권4_1호
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• pp.517-527
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• 2023

Many techniques have been proposed and investigated for microlens array manufacturing in three-dimensional (3D) structures. We present fabricating a microlens array using selective laser etching and a CO₂ laser. The femtosecond laser was employed to produce multiple micro-cracks that comprise the predesigned 3D structure. Subsequently, the wet etching process with a KOH solution was used to produce the primary microlens array structures. To polish the nonoptical surface to the optical surface, we performed reflow postprocessing using a CO₂ laser. We confirmed that the micro lens array can be manufactured in three primary shapes (cone, pyramid and hemisphere). Compared to our previous study, the processing time required for laser processing was reduced from approximately 1 hour to less than 30 seconds using the proposed processing method. Therefore, micro lens arrays can be manufactured using our processing method and can be applied to mass productionon large surface areas.

• 소성∙가공
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• 제15권1호
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• pp.34-41
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• 2006

Microlens arrays were fabricated by a modified LIGA process composed of the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, both hot embossing and microinjection molding processes have been successfully utilized with the fabricated mold insert. Replicated microlenses showed very good surface roughness with the order of 1 nm. The focal lengths of the injection molded microlenses were successfully estimated theoretically and also measured experimentally.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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• pp.23-28
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• 2005

Microlens arrays were fabricated using a modified LIGA process based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, the hot embossing and the microinjection molding processes have been successfully utilized with the fabricated mold insert. Fabricated microlenses showed good surface roughness than the mold insert. The focal lengths of the injection molded microlenses were successfully measured experimentally and also estimated theoretically.

• Journal of the Optical Society of Korea
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• 제19권3호
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• pp.265-271
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• 2015

We propose a reactive mesogen (RM) lens array to obtain good focusing behavior along with a short focal plane, where the focusing behavior is switchable according to the polarization state of incident light. Polarization-dependent focusing behavior is obtained using a planoconvex RM microlens array on a planoconcave isotropic lens template. Even though the sagitta of our RM lens is high, to obtain the short focal length, the RM layer can be aligned well by introducing a top-down alignment effect, using a nanogrooved template. The optical noise due to the $moir{\acute{e}}$ effect generated by the nanogrooves on the surface of the planoconvex RM layer can be removed simply by overcoating a thin RM layer, which is self-aligned by the geometric surface effect, without an additional alignment process. We demonstrate a hexagonal-packed RM lens array that has a very high fill factor and symmetric phase profile, for an ideal lens.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.323-324
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• 2012

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.465-469
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• 2003

Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for microlens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of microlens which depend on the thermal treatment. For the replication of microlens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of microlenses. Fabricated microlenses showed good surface roughness with the order of 1 nm.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 The Korea-Japan Plastics Processing Joint Seminar
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• pp.15-19
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• 2003

Polymeric micro lens arrays with diameters of $13\~96\;{\mu}m$ fabricated using the micro-compression molding with electro formed mold inserts. In the present study, the electro forming process was used to make the metallic micro-mold insert for micro-molding of microlens array. The wettability property of the fabricated mold insert was examined by measuring the contact angle of the polymer melt on the mold insert. Microlenses were compression-molded with the fabricated mold insert. The effects of the molding temperature and wettability property on the replication quality of the molded lenses were analyzed experimentally.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1682-1683
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• 2011

Through-silicon microlens array has been implemented using glass thermal reflow process. Design, numerical analysis, fabrication, and measurement results are discussed. Microlenses with six different volumetric dimensions were successfully fabricated and characterized. Radius of curvature of each microlenses were measured with less than 1% deviation compared to calculated value. Measured average roughness of the microlens surface was 16.5 nm.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집A
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• pp.743-746
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• 2000

Plastic microlenses play an important role in reducing the size, weight, and the cost of the systems in the fields of optical data storage and optical communication. In the present study, plastic microlens arrays were fabricated using micro-compression molding process. The design and fabrication procedures for mold insert were simplified by using silicon instead of metal. A simple but effective micro compression molding process, which uses polymer powder, were developed for microlens fabrication. The governing process parameters were temperature and pressure histories and the micromolding process was controlled such that the various defects developing during molding process were minimized. The radius and magnification ratio of the fabricated microlens were $125{\mu}m$ and over 3.0, respectively.