• 전기학회논문지
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• 제56권12호
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• pp.2221-2225
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• 2007

Hollow-type microneedle array can be used for painless, continuous and stable drug delivery through a human skin. The needles must be sharp and have sufficient length in order to penetrate the epidermis. An array of hollow-type silicon microneedles was fabricated by using deep reactive ion etching and HNA wet etching with two oxide masks. Isotropic etching was used to create tapered tips of the needles, and anisotropic etching of Bosch process was used to make the extended length and holes of microneedles. The microneedles were formed by three steps of isotropic, anisotropic, and isotropic etching in order. The holes were made by one anisotropic etching step. The fabricated microneedles have $170{\mu}m$ width, $40{\mu}m$ hole diameter and $230{\mu}m$ length.

• Journal of Electrical Engineering and Technology
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• 제10권3호
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• pp.1169-1173
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• 2015

This paper presents vertical carbon nanotube (CNT) field effect transistors (FETs). For the first time, the author successfully fabricated vertical CNT-based FETs on an anodized aluminum oxide (AAO) template by using atomic layer deposition (ALD). Single walled CNTs were vertically grown and aligned with the vertical pores of an AAO template. By using ALD, a gate oxide material (Al₂O₃) and a gate metal (Au) were centrally located inside each pore, allowing the vertical CNTs grown in the pores to be individually gated. Characterizations of the gated/vertical CNTs were carried and the successful gate integration with the CNTs was confirmed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1433-1436
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• 2008

Flagellate bacteria such as Escherichia coli or Serratia marcescens possess a remarkable motility system based on a reversible rotary motor. We have employed S. marcescens as microactuators in low Reynolds number fluidic environments to move a larger engineering element around. Microstructures fabricated using conventional microfabrication techniques are blotted on the swarm plate, which leaves a bacterial monolayer on the surface of the microstructure. We have investigated microstructures powered by bacteria to determine how cell orientation on the microstructure surface relates to the swarming patterns as well as how the orientation is affected by the blotting process. This study will help to refine directional control of bacterial transporters by exploiting bacterial sensory mechanisms.

• 한국재료학회지
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• 제17권7호
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• pp.352-357
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• 2007

Since a pattern defects "repair" system using a diode pumped solid state laser for Flat Panel Display (FPD) was suggested, a lot of laser systems have been explored and developed for mass-production microfabrication process. A maskless lithography system using 405 nm violet laser and Digital Micromirror Device (DMD) has been developed for PDP and Liquid Crystal Display (LCD) Thin Film Transistor (TFT) photolithography process. In addition, a "Laser Direct Patterning" system for Indium Tin Oxide (ITO) for Plasma Display Panel(PDP) has been evaluated one of the best successful examples for laser application system which is applied for mass-production lines. The "heat" and "solvent" free laser microfabrications process will be widely used because the next-generation flat panel displays, Flexible Display and Organic Light Emitting Diode (OLED) should use plastic substrates and organic materials which are very difficult to process using traditional fabrication methods.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1997년도 추계학술대회
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• pp.31-34
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• 1997

A semiconductor microelectrode array has been successfully used in obtaining single unit recordings from medial giant nerve of clay fish, rat saphenous nerve and abdominal ganglia of aplysia. The recording device fabricated using silicon microfabrication techniques is a depth-probe type and, previously, has been mostly used to record from central nerve system of vertebrates. From invertebrates, and also from peripheral nerves of vertebrates, however, the quality of the recorded signal depends heavily on the recording conditions, such as the proximity of the electrode site to the nerve cells and the size of the neuron. We have modeled the signal to noise ratio as unctions of these parameters and compared the experimental data with the calculated values thus obtained.

• Journal of Magnetics
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• 제18권2호
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• pp.163-167
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• 2013

We fabricated prototype cantilevers for mechanically detected high-frequency ESR measurement. Cantilevers are fabricated from silicon-on-insulator (SOI) wafers using standard MEMS techniques such as lithography, wet etching, and plasma etching. Using commercial SOI wafers, fabrication cost and the number of processes can be substantially reduced. In this study, three types of cantilevers, designed for capacitive and optical detection, are shown. Capacitive type with lateral dimensions of $3.5{\times}1.6mm^2$ is aimed for low spin concentration sample. On the other hand, optical detection type with lateral dimensions of $50{\times}200{\mu}m^2$ is developed for high-sensitive detection of tiny samples such as newly synthesized microcrystals.

• 한국레이저가공학회지
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• 제13권1호
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• pp.1-5
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• 2010

ln this work, the feasibility of using a UV laser for micromachining of powder injection molded parts is examined experimentally. The results, although preliminary, indicate that microfabrication of various parts by laser micromachining of the injection molded parts and then sintering is promising. Particularly, micromachining of a mixture composed of stainless steel particles and polyrner binders was studied using a KrF excimer laser.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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• pp.71-73
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• 2006

This research aims to develop a multiple channel electrochemical DNA chip using micro- fabrication technology. At first, we fabricated a high integrated type DNA chip array by lithography technology. Several probe DNAs consisting of thiol group at their 5-end were immobilized on the gold electrodes. Then target DNAs were hybridized by an electrical force. Redox peak of cyclic-voltammogram showed a difference between target DNA and mismatched DNA in the anodic peak current. Therefore. it is able to detect a various genes electrochemically after immobilization of a various probe DNA and hybridization of label-free DNA on the electrodes simultaneously. It suggested that this DNA chip could recognize the sequence specific genes.

• 한국세라믹학회지
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• 제34권8호
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• pp.834-842
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• 1997

Controlled Ca impurity implanted inner crack-like pore in the high purity alumina single crystal, sapphire, had been created by micro-fabrication technique, which includes ion implantation, photo-lithography, Ar ion milling, and hot press technique. The morphological change and the healing of cracklike pore in Ca doped high purity single crystal alumina, sapphire, during high temperature heat treatment in vacuum were observed using optical microscopy. The dot-like surface roughening was developed and hexagon like crystal appeared on inner surface of crack-like pore after heat treatment. Bar type crystals, probably CaO.6Al2O3, were observed on the inner surface after 1 hour heat treatment at 1, 50$0^{\circ}C$, but this bar type crystal disappeared after 1 hour heat treatment at 1, $600^{\circ}C$. This disappearance means that there should be a little increase of Ca solubility limit to alumina at this temperatures.

• 산업기술연구
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• 제32권A호
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• pp.29-33
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• 2012

We demonstrated the viability of fully microfabricating SWCNT(single-wall carbon nanotube) film strain sensors for force and weight sensing. Our spray-deposited SWCNT film strain sensors showed good linearity over a range from 0 to 400 microstrain, and much higher sensitivity compared to commercial metal foil-type gauges. The number of grids and the thickness of the SWCNT film were found to have a significant effect on the strain sensing properties of the SWCNT film gauges. A strain sensing methode for the CNT-based strain gauges was also investigated using a binocular type beam load cells. Preliminary results indicate that the microfabrication method shown here is promising for developing a commercial strain gauge using a spray-coated SWCNT thin film. In the near future, various studies will be performed to further enhance the properties of the spray-coated SWCNT film strain sensors.