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http://dx.doi.org/10.3740/MRSK.2007.17.7.352

Laser Microfabrications for Next-Generation Flat Panel Display  

Kim, Kwang-Ryul (National Core Reserach Center for Hybrid Materials Solution, Pusan National University)
Publication Information
Korean Journal of Materials Research / v.17, no.7, 2007 , pp. 352-357 More about this Journal
Abstract
Since a pattern defects "repair" system using a diode pumped solid state laser for Flat Panel Display (FPD) was suggested, a lot of laser systems have been explored and developed for mass-production microfabrication process. A maskless lithography system using 405 nm violet laser and Digital Micromirror Device (DMD) has been developed for PDP and Liquid Crystal Display (LCD) Thin Film Transistor (TFT) photolithography process. In addition, a "Laser Direct Patterning" system for Indium Tin Oxide (ITO) for Plasma Display Panel(PDP) has been evaluated one of the best successful examples for laser application system which is applied for mass-production lines. The "heat" and "solvent" free laser microfabrications process will be widely used because the next-generation flat panel displays, Flexible Display and Organic Light Emitting Diode (OLED) should use plastic substrates and organic materials which are very difficult to process using traditional fabrication methods.
Keywords
Laser Direct Patterning; Maskless Lithography; Digital Micromirror Device(DMD); Flat Panel Display;
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1 K. R. Kim, I.T. Park, H. W. Kim, Y. W. Lee, C. H. Cho, H. S. Kang, S. K. Hong, S. B. Lee, Proceedings of ICALEO, M807 (2005)
2 E. C. Harvey, P. T. Rumsby, Proceedings of SPIE, 3223, 2332 (1997)
3 K. Chan, Z. Feng, R. Yang, W. Mei, Proceedings of SPIE, 4985, 37 (2003)   DOI
4 B. J. Grenon, H. C. Hamaker, P. D. Buck, Microelectronic Engineering, 27, 225 (1995)   DOI   ScienceOn
5 G. Niven, A. Mooradian, Proceedings of Society of Information Display,1904 (2006)
6 S. T. Kim, Proceedings of IMIDIIDMC, Keynote Address (2006)
7 S. H. Kwon, S. G. Lee, W. K. Cho, B. G. Ruy, B. M. Song, Proceedings of Society of Information Display, 1838 (2006)
8 A. Suzuki, Proceedings of IMID/IDMC, 521 (2006)
9 A. Kahn, I. Shiyanovskaya, T. Schneider, J. W. Doane, Proceedings of Society of Information Display, 1728 (2006)
10 T. R. Groves, D. Pickard, B. Rafferty, N. Crosland, D. Adam, G. Schubert, Microelectronic Engineering, 61, 28 (2002)   DOI   ScienceOn
11 R. F. Pease, Microelectronic Engineering, 78, 381 (2005)   DOI   ScienceOn
12 S. Harry, Microelectronic Engineering, 35, 177 (1997)   DOI   ScienceOn
13 K. Peng, F. Zhang, G. Wu, W. Gu, X. Sun, N. Kang, Q. Pu, Z. Ding, Microelectronic Engineering, 61, 277 (2002)   DOI   ScienceOn
14 N. H. Rizvi, SPIE Conference on Design, Test and Microfabrication of MEMS and MOEMS, 3680, 546 (1999)   DOI
15 K. Callewaert, Y. Martele, L. Breban, K. Naessens, P. Vandaele, R. Baets, G. Geuskens, E. Schacht, Applied Surface Science, 208 (2003)
16 L. Zhou , A. Wanga, S. C. Wu, J. Sun, S. Park, T. N. Jackson, Appl. Phys. Lett., 88, 083502 (2006)   DOI   ScienceOn
17 L. Herbs, R. Paetzel, F. Simon, B. Fechner, Proceedings of IMID/IDMC, 540 (2006)
18 K. R. Kim, H. S. Kang, H. K. Hong, Korean Information Display Society Workshop for Next Generation FPD Manufacturing Systems, Invited (2005)
19 D. H. Kim and D. J. Kim, Proceedings of IMIDIIDMC, 647 (2006)
20 K. R. Kim, S. C. Ko, H. K. Park, Korean Society for Precision Engineering Spring Conference, 932 (2002)
21 O. Streitz, Proceedings of IMID/IDMC, 337 (2006)
22 C. Liu, X. Guo, F. Gao, B. Luo, X. Duan, J. Du, C. Qiu, Proceedings of SPIE, 5645, 307 (2005)   DOI