Microfabrication of MEMS Cantilevers for Mechanically Detected High-Frequency ESR Measurement |
Ohmichi, E.
(Graduate School of Science, Kobe University)
Yasufuku, Y. (Graduate School of Science, Kobe University) Konishi, K. (Graduate School of Science, Kobe University) Ohta, H. (Molecular Photoscience Research Center, Kobe University) |
1 | E. Ohmichi, N. Mizuno, S. Hirano, and H. Ohta, J. Low Temp. Phys. 159, 276 (2010). DOI |
2 | Y. Tokuda, S. Hirano, E. Ohmichi, and H. Ohta, J. Phys. Conf. Ser. 400, 032103/1-4 (2012). |
3 | M. J. Madou, Fundamentals of microfabrication and nanotechnology 3rd edition, CRC Press, Boca Raton (2012). |
4 | E. Ohmichi and T. Osada, Rev. Sci. Instrum. 72, 3022 (2002). |
5 | E. Ohmichi, N. Mizuno, T. Osada, and H. Ohta, Rev. Sci. Instrum. 80, 013904 (2009). DOI ScienceOn |
6 | E. Ohmichi, N. Mizuno, and H. Ohta, Rev. Sci. Instrum. 79, 103903 (2008). DOI ScienceOn |