• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2007년도 추계학술대회
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• pp.84-87
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• 2007

Recently, many studies concern on the slip flow and slip length, which allow liquid flow to reduce drag force in microchannel. However, until now not enough investigation is performed experimentally to understand the slip flow in the superhydrophobic microchannel exhibiting riblet structures on vertical wall. Here we investigated and compared the slip flows according to the surface characteristics; hydrophilic, hydrophobic, and superhydrophobic wettabilities. Using the micro-PIV, velocity profiles can be obtained in the glass (hydrophilic), PDMS (hydrophobic), and micro-structured PDMS (superhydrophobic) microchannels. For both PDMS and superhydrophobic PDMS microchannels, we observed the slip effects showing the microscale slip lengths. Due to the micro-riblet, there are two distinctive flow characteristics on the riblet surface and the liquid meniscus in the valleys.

• International Journal of Precision Engineering and Manufacturing
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• 제9권1호
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• pp.25-29
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• 2008

We introduce a new fabrication process for antireflective structured surfaces. A 4-inch silicon wafer was dipped in a suspension of 300-nm-diameter silica particles dispersed in a toluene solution. When the wafer was drawn out of the suspension, a hexagonally packed monolayer structure of particles self-assembled on almost the complete wafer surface. Due to the simple process, this could be applied to micro- and nano-patterning. The self-assembled silica particles worked as a mask for the subsequent reactive ion etching. An array of nanometer-sized pits could be fabricated since the regions that correspond to the small gaps between particles were selectively etched off. As etching progressed, the pits became deeper and combined with neighboring pits due to side-etching to produce an array of cone-like structures. We investigated the effect of etching conditions on antireflection properties, and the optimum shape was a nano-cone with height and spacing of 500 nm and 300 nm, respectively. This nano-structured surface was prepared on a $30\;{\times}\;10-mm$ area. The reflectivity of the surface was reduced 97% for wavelengths in the range 400-700 nm.

• Korean Chemical Engineering Research
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• 제57권2호
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• pp.259-266
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• 2019

Tuning of electro-optical properties of nano-structured $SnO_2:Ga$ powders in a micro drop fluidized reactor (MDFR) was highly effective to enhance the activities of powders to be used as sensor materials. The tuning was conducted continuously in a facile one-step process during the formation of powders. The microscopic hydrodynamic forces affected the band gap structure and charge transfer of $SnO_2:Ga$ powders through the oxygen and interfacial tin vacancies by providing plausible pyro-hydraulic conditions, which resulted in the decrease in the electrical resistance of the materials. The analyses of room-temperature photoluminescence (PL) spectra and FT-IR exhibited that the tuning could improve the surface activities of $SnO_2:Ga$ powders by adjusting the excitation as well as separation of electrons and holes, thus maximizing the oxygen vacancies at the surface of the powders. The scheme of photocatalytic mechanism of $SnO_2:Ga$ powders was also discussed.

• 대한기계학회논문집B
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• 제41권8호
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• pp.531-536
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• 2017

최근들어 고체 표면의 젖음성을 향상시키기 위해 표면에 나노/마이크로 기술을 적용하는 연구가 진행되고 있다. 이러한 연구를 통하여 나노 구조가 표면 젖음성을 향상 시킬 수 있고, 액체 퍼짐은 실 모세관(Capillary wicking)에 의해 형성된다는 것을 확인하였다. 그러나 대부분의 연구는 나노 구조의 작은 스케일때문에 분석하는데 어려움이 있어서 퍼짐현상을 정성적으로 분석하고 있다. 본 연구에서는 마이크로/나노/마이크로-나노 구조를 갖는 실리콘 표면에서의 액적 계면 거동을 정량적으로 분석하였으며, 계면의 거동은 방사광 X선 영상법으로 직접 측면가시화를 진행하였다. 그 결과 모든 구조 표면에서 퍼짐 현상이 발생하였고, 액체 계면의 거동이 서로 다르게 나타났다. 마이크로구조의 경우 일정한 액막 두께를 유지하며 퍼졌고, 나노구조는 완만한 경사를 갖는 것으로 나타났다. 마이크로-나노 구조의 경우 두 가지가 결합된 형태의 퍼짐현상을 보였다. 또한 액체의 퍼짐은 마이크로-나노 구조에서 가장 증진됨을 확인하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2000년도 춘계학술대회논문집
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• pp.167-170
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• 2000

Recently the sub-micron structured substrates of 0.74 ${mu}ell$ track pitch and 800 $\AA$groove depth are required for DVD-RAM and the track pitch is expected to be narrower as the need for the information storage density is getting higher. For the accurate replication of the land-groove structure in the stamper to the plastic substrates it is important to control the injection -compression molding process such that the integrity of the replication for the land-groove structure is maximized. in the present study polycarbonate substrates were fabricated by injection comression molding and the land-groove structure regarded as one of mold temperature and the compression pressure on the integrity of the replication were examined experimentally. An efficient design methodology using the response surface method (RSM) the central composite design(CCD) technique and the analysis-of-variance (ANOVA) was developed to obtain the optimum processing conditions which maximize the integrity of the replication with a limited number of experiments.

• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.1-6
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• 2012

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

• 비파괴검사학회지
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• 제30권5호
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• pp.437-443
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• 2010

최근 재료, 생물의학(biomedicine), 음향, 전자 등 다양한 분야에서 나노 구조를 갖는 박막 기술이 도입되면서 박막 계면의 수명과 내구성 확보를 위한 초고주파수의 초음파현미경을 이용한 정량적인 비파괴적 접합평가에 관한 연구가 큰 이슈가 되고 있다. 본 연구에서는 초음파의 집속, 누설탄성표면파의 발생과 V(z) 곡선의 시뮬레이션 그리고 초고주파수 음향 이미징 기법을 이용하여 나노 스케일 구조를 갖는 박막 시험편의 접합계면을 평가하였다. V(z) 곡선의 컴퓨터 시뮬레이션을 통하여 접합계면에 존재하는 미세 결함(디라미네이션 등)의 검출 감도를 추정할 수 있었으며, 1 GHz의 초고주파수 디포커싱 모드로 박막 시험편의 접합계면에 존재하는 나노 스케일의 미세 결함을 음향 이미지로 가시화 할 수 있어 나노 구조를 갖는 박막의 접합계면의 비파괴평가에 초음파현미경이 매우 유용함을 알 수 있었다.

• 한국분무공학회지
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• 제14권4호
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• pp.178-183
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• 2009

Spray cooling heat transfer was experimentally investigated for water sprays impacting on mico-fins structured surfaces in the single phase and nucleate boiling regions. The heat transfer surfaces consist of cubic fins and triangular grooved fins. The spray produced using full cone spray nozzles, and experiments were made under the test condition of $Q=4.92{\times}10^{-6}{\sim}15.83{\times}10^{-6}\;m^3/s$, $T_f=35{\sim}55^{\circ}C$. From the experimental results, it was found that cubic fins surface had the largest heat flux enhancement relative to the smooth surface.

• Advances in nano research
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• 제5권3호
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• pp.245-251
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• 2017

Multiwalled carbon-nanotubes (MWCNT) and micro-structured carbon, such as biochar or activated carbon (AC), have been seen to significantly increase the growth indices of certain plant species such as maize (Zea mays L.). Seed imbibition is the stage where environmental factors that affect water transport across the seed coat barrier, make a large impact. This work explores the effect on water imbibition by maize seeds when the aqueous environment surrounding the seed is diluted by small concentrations (10 and 20 mg/l) of pristine MWCNT (p-MWCNT), carboxylate functionalized MWCNT (COO-MWCNT) and AC. The degree of sensitivity of the process to (i) large structural changes is seen by utilizing the nano (the MWCNT) and the micro (the AC) allotropic forms of carbon; (ii) to small changes in the purity and morphology of the p-MWCNT by utilizing 95% pure and 99% pure p-MWCNTs of slightly differing morphologies; and (iii) to MWCNT functionalization by using highly pure (97%) COO-MWCNT. Water imbibition was monitored over a 15 hour period by Near Infrared Thermography (NIRT) and also by seed weighing. Seed surface topography was seen by SEM imaging. Analysis of the NIRT images suggests rapid seed surface topological changes with the quantity of water imbibed. While further work is necessary to arrive at a conclusive answer, this work shows that the imbibition phase of the maize seed is sensitive to the presence of MWCNT even to small differences in the purity of the p-MWCNT and to small differences in the physicochemical properties of the medium caused by the hydrophilic COO-MWCNT.

• 대한기계학회논문집A
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• 제33권3호
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• pp.224-230
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• 2009

FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.