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Development of Inspection System With Optical Scanning Mechanism and Near-Infrared Camera Optics for Solar Cell Wafer  

Kim, Gyung Bum (Aeronautical & Mechanical Design Eng., Korea National Univ. of Transportation)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.3, 2012 , pp. 1-6 More about this Journal
Abstract
In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.
Keywords
Geometric camera optics; Inspection system; Optical scanning mechanism; Solar cell wafer; Structured hybrid illumination system;
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